JPS5857702A - 湿度センサ− - Google Patents
湿度センサ−Info
- Publication number
- JPS5857702A JPS5857702A JP56156650A JP15665081A JPS5857702A JP S5857702 A JPS5857702 A JP S5857702A JP 56156650 A JP56156650 A JP 56156650A JP 15665081 A JP15665081 A JP 15665081A JP S5857702 A JPS5857702 A JP S5857702A
- Authority
- JP
- Japan
- Prior art keywords
- humidity sensor
- thin film
- wos
- humidity
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 17
- 239000010408 film Substances 0.000 claims description 8
- 229920006395 saturated elastomer Polymers 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 239000011888 foil Substances 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 6
- 238000004040 coloring Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 241000195955 Equisetum hyemale Species 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002226 superionic conductor Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56156650A JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56156650A JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5857702A true JPS5857702A (ja) | 1983-04-06 |
| JPS639721B2 JPS639721B2 (enrdf_load_stackoverflow) | 1988-03-01 |
Family
ID=15632287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56156650A Granted JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5857702A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60211347A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
| JPS60211348A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
-
1981
- 1981-09-30 JP JP56156650A patent/JPS5857702A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60211347A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
| JPS60211348A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS639721B2 (enrdf_load_stackoverflow) | 1988-03-01 |
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