JPS5857296A - Tubular static eliminator - Google Patents
Tubular static eliminatorInfo
- Publication number
- JPS5857296A JPS5857296A JP15541981A JP15541981A JPS5857296A JP S5857296 A JPS5857296 A JP S5857296A JP 15541981 A JP15541981 A JP 15541981A JP 15541981 A JP15541981 A JP 15541981A JP S5857296 A JPS5857296 A JP S5857296A
- Authority
- JP
- Japan
- Prior art keywords
- static eliminator
- corona discharge
- pipe
- type static
- high voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Elimination Of Static Electricity (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は管路内を走行する粉体または液体の静電気を中
和するための除電器に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a static eliminator for neutralizing static electricity of powder or liquid traveling in a pipe.
電気抵抗の高い各種粉体ないし液体の管路輸送に当って
、これら物体の管路内壁とのまさつにより、おびただし
い静電気が発生し、その結果、種々の障災害がひきおこ
されることはよく知られている。これに対して管路輸送
の途中において静電気を中和する除電器を設けることが
出来れば、輸送過程を変更せず特別な場所も不要で極め
て経済的であるが、従来この様な除電器は存在せず、し
たがって管路輸送の出口において公知の除電器をもって
静電気の中和が行われて来た。したがって管路の途中忙
著るしく帯電せる粉体等が電気力で耐着して輸送を妨げ
、また粒径の大きな団塊として剥離排出され品質上の問
題をおこすことも少くなかった。It is well known that when various powders or liquids with high electrical resistance are transported through pipes, a large amount of static electricity is generated due to the collision of these objects with the inner walls of the pipes, resulting in various disasters. It is being On the other hand, if it were possible to install a static eliminator that neutralizes static electricity during pipe transportation, it would be extremely economical without changing the transportation process and requiring no special space. Therefore, static electricity has been neutralized using known static eliminators at the outlet of pipe transport. Therefore, powder particles, etc., which become extremely charged along the pipe line, adhere to the particles due to the electric force and impede transportation, and are often peeled off and discharged as agglomerates with large particle diameters, causing quality problems.
本発明の目的は、従来存しなかった管路の途中にその一
部として挿入し、通過物体の除電を行うことの出来る管
路式除電器を提供するにある。An object of the present invention is to provide a conduit-type static eliminator that can be inserted as part of a conduit, which has not existed in the past, and can eliminate static from passing objects.
しかして本発明は、この目的を管路と同一内側断面を有
し、その内壁に正負イオンよ構成る面状プラズマを形成
せしめた管状プラズマ源をもって除電器を構成、この中
を通過する帯電物体の電荷と逆極性のイオンを該面上プ
ラズマからクーロン力の作用で供給除電せしめることに
より達成する。しかして本発明は、この除電器を安全、
かつ簡単に構成するため、管路と同一内側断面を有する
絶−縁物筒体の内部に、その内壁に接して軸と平行方向
に長形のコロナ放電極を設け、該筒体の外部に該コロナ
放電極と対向して誘導電極を設け、両者の間に適当な交
流高電圧を印加して該コロナ放電極から交流沿面コロナ
放電を発生せしめることによシ達成する。Therefore, the present invention aims to achieve this by constructing a static eliminator with a tubular plasma source having the same inner cross section as the pipe and forming a planar plasma composed of positive and negative ions on the inner wall of the static eliminator, through which a charged object passes. This is achieved by supplying ions of opposite polarity to the charge on the surface from the plasma on the surface by the action of Coulomb force. However, the present invention makes this static eliminator safe and
In addition, in order to simplify the structure, an elongated corona discharge electrode is provided inside an insulating cylinder having the same inner cross section as the pipe, in contact with the inner wall thereof and parallel to the axis, and on the outside of the cylinder. This is achieved by providing an induction electrode opposite the corona discharge electrode and applying an appropriate AC high voltage between the two to generate an AC creeping corona discharge from the corona discharge electrode.
すなわち本発明による所の新規の管路式除電器は、管路
中に挿入接続するだめの入口接続部、出口接続部を有す
る管状本体ケーシングと、その内部に配設された所の絶
縁物筒体と、該筒体の内壁に接して配設せるコロナ放電
極と、該筒体の外壁に接し、かつ該コロナ放電極ど相対
向する部位をおおう如くに設けた誘導電極と、該コロナ
放電極と誘導電極との間に交流高電圧を印加するための
交流高圧電源とを有し、これによって該絶縁物筒体の内
壁に沿って該コロナ放電極より交流沿面コロナ放電を発
生せしめて面状プラズマイオン源を形成、上流側管路か
ら該絶縁筒体内に進入２する帯電物体にその電荷と逆極
性のイオンをクーロン引力の作用で該面状プラズマイオ
ン源よシ供給し、これによシ該帯電物体の電荷を中和の
上、該出口接続部を介して下流側管路に排出することを
特徴とする。That is, the novel pipe-type static eliminator according to the present invention includes a tubular main body casing having an inlet connection part and an outlet connection part for insertion and connection into the pipe, and an insulating tube disposed inside the main body casing. a corona discharge electrode disposed in contact with the inner wall of the cylindrical body; an induction electrode disposed in contact with the outer wall of the cylindrical body and covering a portion facing the corona discharge electrode; It has an AC high-voltage power source for applying an AC high voltage between the electrode and the induction electrode, thereby generating an AC creeping corona discharge from the corona discharge electrode along the inner wall of the insulating cylinder. A planar plasma ion source is formed, and ions with a polarity opposite to that of the charged object entering the insulating cylinder from the upstream pipe are supplied from the planar plasma ion source by the action of Coulomb attraction. The electric charge of the charged object is neutralized and then discharged to the downstream conduit through the outlet connection.
かぐすることによって従来存在しなかった管路式除電器
を構成でき、かつコロナ放電極と誘導電極との間に絶縁
物筒体を介在させることにより、両者間処火花が発生し
着火爆発を生ずる危険性を完全に除去することができる
。この場合、コロナ放電極としては、らせん状、線状、
ストリップ状、その他如何なる形状、構造のものでもよ
いが、特に一般に線状ないしストリップ状の長形電極と
し、かつ軸と平行方向に該筒体内壁面に沿って、等間隔
に配設することによシ、その製作が著るしく簡易化し、
安価となる。By smelling, a conduit-type static eliminator that did not previously exist can be constructed, and by interposing an insulating cylinder between the corona discharge electrode and the induction electrode, sparks are generated between the two, resulting in an ignition explosion. The danger can be completely eliminated. In this case, the corona discharge electrode may be spiral, linear,
It may be strip-shaped or any other shape or structure, but in particular, it is generally a linear or strip-shaped elongated electrode and arranged at equal intervals along the wall surface of the cylinder in a direction parallel to the axis. , its production has been significantly simplified,
It will be cheaper.
この場合、上記入口および出口接続部はフランジをもっ
て構成することが出来る。また本体ケーシングは金属製
の函体をもって構成の上、接地すると好適である。また
該絶縁物筒体は一般にガラス筒体等の無機材料をもって
構成するのが寿命の点で好適である。また該長形コロナ
放電極は金属細線、金属テープその他如何なる長形コロ
ナ電極を用いてもよい。また該誘導電極は該筒体の外面
全体をおおう面状電極としてもよく、これを金属箔ない
し導電性塗料、蒸着金属膜等をもって形成してもよい。In this case, the inlet and outlet connections can be constructed with flanges. Further, it is preferable that the main body casing is configured with a metal box and is grounded. Further, it is generally preferable for the insulating cylinder to be made of an inorganic material such as a glass cylinder from the viewpoint of longevity. Further, the elongated corona discharge electrode may be a thin metal wire, a metal tape, or any other elongated corona electrode. Further, the induction electrode may be a planar electrode covering the entire outer surface of the cylindrical body, and may be formed of metal foil, conductive paint, vapor-deposited metal film, or the like.
また一般に該コロナ放電極を接地するのが安全上好適で
あるが、この時は該誘導電極を絶縁物等のモールド内に
埋入の上これに交流高電圧を印加するのがよい。また本
発明に用いる該交流高電圧は商用周波数の交流高電圧の
他、これよシも高い高周波交流電圧、パルス高電圧等適
当な任意の交流高電圧を用いうる。Generally, it is preferable for safety to ground the corona discharge electrode, but in this case, it is preferable to embed the induction electrode in a mold of an insulator or the like and then apply an AC high voltage thereto. The AC high voltage used in the present invention may be any suitable AC high voltage such as a commercial frequency AC high voltage, a higher frequency AC voltage, or a pulsed high voltage.
いま本発明の特徴を実施例および図面により更に詳細に
説明する。The features of the present invention will now be explained in more detail with reference to examples and drawings.
第１図は本発明の一実施例の縦断面図。そのＸ−Ｘ断面
における横断面図を第２図に示す。図においてｌは本発
明の管路式除電器で２は接地せる円筒形の金属本体ケー
シング、３．４は、それぞれ入口および出口接続部をな
す７ランジで、それぞれ上流側管路５および下流側管路
６の７ランジ７．８とボルト・ナツト９、ｌＯによシパ
ソキング１１．１２を介して接続されている。１３は絶
縁物筒体で、管路５．６の内側断面と同一の内側断面形
状、本例ではいづれも円筒形であるので同一内径を有し
ておシ、その両端において円環平皿状の金属つば１４．
１５に固定支持されて、該本体ケーシング２の内部に、
これと同軸に収納配設されている。１６は該筒体１３の
内面に接して互に等間隔に、かつ軸に平行な方向に設け
られた複数個の長形コロナ放電極で、本例では６本のタ
ングステン細線より成シ、その両端において、該円環平
皿状つば１４．１５の凹んだ周縁部１７．１８において
、それぞれ６ケのネヂ１９２０により固定張架され、こ
れにより同時に接地されている。２１は該筒体１３の外
壁面上に左右各１避を残して塗布せる導電性塗料により
構成せる面状誘導電極で、その両端にコロナ防止用の円
環電極２２．２３を備え、２２．２３と共に絶縁物２４
の内部如モールドされ、かつ交流高圧電源２５よシ導線
２６、ブッシング２７を介して交流高電圧を印加されて
いる。その結果、接地された該コロナ放電極１６と該面
状誘導電極２１との間には絶縁物筒体１３を介して交流
高電圧が加わシ、コロナ放電極１６から該筒体１３の内
壁面２８に沿って交流沿面コロナ放電を生じ、豊富な正
負イオンよ構成る面状プラズマイオン源が筒体１３の°
内壁面２８全体にわたって形成される。いま上流側管路
より帯電物体、たとえば正に帯電せるプラスチック粉体
雲が気流忙同搬されて該管路式除電器１の絶縁物筒体１
３の内部に矢印２９の方向に進入すると、該帯電粉体雲
の作る空間電荷電界によって該面上プラズマイオン源よ
り選択的に負イオンのみが吸引されて正に帯電せる該粉
体雲忙射突し、その電荷を中和・除電する。したがって
粉体は完全に除電された状態で下流側管路６へと排出さ
れる。この場合、絶縁物モールド２４の外壁には導電性
塗料等による膜状電極３０を設け、これが接地せる本体
ケーシング１に接しｆ大地電位になる様忙することによ
り絶縁物モールド２４の外壁とケーシングｌの間の空隙
で放電がおこるのを防止し、これによる絶縁物モールド
２４Ω劣化を防ぐ必要がある。FIG. 1 is a longitudinal sectional view of one embodiment of the present invention. A cross-sectional view taken along line XX is shown in FIG. In the figure, l is the pipe-type static eliminator of the present invention, 2 is a cylindrical metal main body casing that can be grounded, and 3.4 is 7 flanges forming the inlet and outlet connections, respectively, for the upstream pipe 5 and the downstream pipe 5. The 7 flange 7.8 of the conduit 6 is connected to the bolt/nut 9, lO via a shipasooking 11.12. Reference numeral 13 denotes an insulating cylinder, which has the same inner cross-sectional shape as the inner cross-section of the conduit 5.6. In this example, both are cylindrical, so they have the same inner diameter. Metal brim 14.
15, inside the main casing 2,
It is stored coaxially with this. Reference numeral 16 denotes a plurality of long corona discharge electrodes that are provided in contact with the inner surface of the cylinder 13 at equal intervals and parallel to the axis, and in this example are made of six thin tungsten wires. At both ends, the concave periphery 17.18 of the annular plate-shaped collar 14.15 is fixed and tensioned by six screws 1920, thereby simultaneously being grounded. 21 is a planar induction electrode made of a conductive paint that can be applied on the outer wall surface of the cylindrical body 13 leaving one spacing on each side, and has circular electrodes 22 and 23 at both ends for corona prevention; 22. Insulator 24 along with 23
It is molded inside, and an AC high voltage is applied through an AC high voltage power supply 25, a conductor 26, and a bushing 27. As a result, an AC high voltage is applied between the grounded corona discharge electrode 16 and the planar induction electrode 21 via the insulating cylinder 13, and from the corona discharge electrode 16 to the inner wall of the cylinder 13. An alternating current creeping corona discharge is generated along the cylindrical body 13, and a planar plasma ion source consisting of abundant positive and negative ions is generated along the cylindrical body 13.
It is formed over the entire inner wall surface 28. Now, a charged object, for example, a positively charged plastic powder cloud, is carried along with the airflow from the upstream pipe, and the insulating cylinder 1 of the pipe-type static eliminator 1
3, the space charge electric field created by the charged powder cloud selectively attracts only negative ions from the surface plasma ion source, causing the powder cloud to become positively charged. The electric charge is then neutralized and eliminated. Therefore, the powder is discharged to the downstream pipe line 6 in a completely neutralized state. In this case, a film-like electrode 30 made of conductive paint or the like is provided on the outer wall of the insulating mold 24, and this contacts the main body casing 1 to be grounded and reaches the ground potential. It is necessary to prevent discharge from occurring in the gap between the two and prevent the insulator mold from deteriorating to 24Ω due to this.
また云うまでもな〜く帯電物体としては帯電せる液体で
あってもその除電の機構と効果は変るところがない。ま
た該誘導電極２１を接地し、該コロナ放電極を大地から
絶縁して両者の間に交流高電圧を印加しても良い。また
本例では筒体状の絶縁物１３を用いだが、これを可撓性
の絶縁物としてもよいことは云うまでもない。Needless to say, even if the charged object is a liquid that can be charged, the mechanism and effect of static elimination remain the same. Alternatively, the induction electrode 21 may be grounded, the corona discharge electrode may be insulated from the ground, and an AC high voltage may be applied between the two. Furthermore, although the cylindrical insulator 13 is used in this example, it goes without saying that this may be a flexible insulator.
また粉体の電気抵抗が著るしく高い時は、その表面で電
荷が移動しないため、単にグラズマイオン源の方に面し
た部分のみが除電されることが明らかとなった。この時
は、本発明による管路式除電器の入口に帯電物体にかく
はん作用を与える作用をもつ、固定翼、回転翼、固定プ
ロペラ、その他適当なかくはん体を設けると有効である
。また本発明による管路式除電器は、ユニット構成とし
、必要に応じて多数のユニットを接続使用すると便利で
あり、この時には各ユニットの間にかくはん体を挿入す
ることができる。It has also become clear that when the electrical resistance of the powder is extremely high, no charge moves on its surface, so that only the portion facing the glazma ion source is neutralized. In this case, it is effective to provide a fixed blade, rotary blade, fixed propeller, or other suitable agitator at the inlet of the pipe-type static eliminator according to the present invention, which has the effect of stirring the charged object. Further, the conduit type static eliminator according to the present invention has a unit configuration, and it is convenient to use a large number of units connected as necessary, and in this case, a stirrer can be inserted between each unit.
第１図は本発明の一実施例の縦断面図、第２図はそのＸ
−Ｘ断面における横断面図である。図において
ｌ ・・・・・・・・・・・・本発明の管路式除電器２
・・・・・・・・・・・・本体ケーシング３ ・・・
・・・・・・・・・入口接続部４ ・・・・・・・・・
・・・出口接続部５ ・・・・・・・・・・・・上流側
管路６ ・・・・・・・・・・・・下流側管路７．８・
・・・・・・・・フランジ
９、１０・・・・・・・・・ボルト・ナンド１１．１２
・・・・・・・・・バッキング１３ ・・・・・・・
・絶縁物筒体
１４、１５・・・・・・・・・円環モ皿状金属つば１６
・・・・・・・・・長形コロナ放電極１７．１８・
・・・・・・金属つば凹状周縁物１９．２０・・・・・
・・ネヂ
２１ ・・・・・・・・・誘導電極
環
２２．２３・・・・・・・・・コロナ防止用円春電極２
４ ・・・・・・・・・絶縁物モールド２５ ・・
・・・・・・・交流高圧電源２６ ・・・・・・・・
・導線
２７ ・・・・・・・・・ブッシング２８ ・・・
・・・・・・絶縁物筒体内壁２９ ・・・・・・・・
・矢印
３０ ・・・・・・・・・接地用膜状電極以上
特許出願人 増 １）閃 −Fig. 1 is a longitudinal sectional view of one embodiment of the present invention, and Fig. 2 is its
It is a cross-sectional view in the -X section. In the diagram, l...... Pipe type static eliminator 2 of the present invention
・・・・・・・・・・・・Body casing 3 ・・・
...... Entrance connection part 4 ......
...Outlet connection part 5 ......Upstream pipe line 6 ......Downstream pipe line 7.8.
・・・・・・Flange 9, 10・・・・・・Bolt Nand 11.12
・・・・・・・・・Backing 13 ・・・・・・・・・
・Insulator cylinders 14, 15......Circular dish-shaped metal collar 16
...... Long corona discharge electrode 17.18.
...Metal brim concave periphery 19.20...
...Neji 21 ......Induction electrode ring 22.23 ......Corona prevention circular spring electrode 2
4...Insulator mold 25...
・・・・・・AC high voltage power supply 26 ・・・・・・・・・
・Conductor 27 ・・・・・・Bushing 28 ・・・
...Insulator cylinder inner wall 29 ......
・Arrow 30 ......Grounding membrane electrode and above Patent applicant increase 1) Flash -
Claims (9)
口接続部を有する管状本体ケーシングと、その内部に配
設された所の絶縁物筒体と、該筒体の内壁に接して配設
せる放電極と、該筒体の外壁に接し、かつ該コロナ放電
極と相対向する部位をおおう如くに設けられた誘導電極
と、該コロナ放電極と誘導電極との間に交流高電圧を印
加するだめの交流高圧電源とを有し、これによって該絶
縁物筒体の内壁に沿って、該コロナ放電極よシ交流沿面
コロナ放電を発生せしめて面状プラズマイオン源を形成
、上流側管路から該絶縁物円筒内に進入する帯電物体に
その電荷と逆極性のイオンをクーロ′ン引力の作用によ
り該面状プラズマイオン源より供給し、これにより該帯
電物体の電荷を中和の上、下流側管路に排出することを
特徴とする所の管路式除電器。(1) A tubular body casing having an inlet connection part and an outlet connection part for insertion and connection into a pipe, an insulating cylinder disposed inside the casing, and an insulator cylinder disposed in contact with the inner wall of the cylinder. An AC high voltage is applied between a discharge electrode provided, an induction electrode provided so as to be in contact with the outer wall of the cylindrical body and cover a portion facing the corona discharge electrode, and the corona discharge electrode and the induction electrode. An AC high-voltage power supply is applied to generate an AC creeping corona discharge from the corona discharge electrode along the inner wall of the insulating cylinder to form a planar plasma ion source. Ions of opposite polarity to the charged object entering the insulating cylinder from the path are supplied from the planar plasma ion source by the action of Coulomb's attraction, thereby neutralizing the charge of the charged object. , a pipe-type static eliminator for a place characterized by discharging into a downstream pipe.
請求範囲第１項に記載の管路式除電器。(2) The pipe-type static eliminator according to claim 1, wherein the corona discharge electrode is a spiral electrode.
平行ＶＣＣ前筒体内面沿って等間隔に配設せる所の特許
請求範囲第１項に記載の管路式除電器。(3) The pipe-type static eliminator according to claim 1, wherein the corona discharge electrodes are hairstyle electrodes arranged at equal intervals along the inner surface of the VCC front cylinder parallel to the axis of the insulating cylinder.
第１、第２、第３項に記載の管路式除電器。(4) A pipe-type static eliminator according to claims 1, 2, and 3, wherein the insulator cylinder is a glass cylinder.
範囲第３項に記載の管路式除電器。(5) The pipe-type static eliminator according to claim 3, wherein the corona discharge electrode is a thin metal wire.
モールド内に埋入し、かつ該モールドの外面に接地電極
膜を設け、かつ該モールドを貫通して交流高電圧を印加
するだめの導線を導入せる所の特許請求範囲第１より第
５項に記載の管路式除電器。(6) A corona discharge electrode is grounded, the induction electrode is embedded in an insulating mold, a ground electrode film is provided on the outer surface of the mold, and an AC high voltage is applied through the mold. A conduit type static eliminator according to claims 1 to 5, into which a conducting wire can be introduced.
の特許請求範囲第１よシ第６項に記載の管路式除電器。(7) A pipe-type static eliminator according to claims 1 to 6, wherein the AC high voltage power source is a commercial frequency AC high voltage power source.
許請求範囲第１より第６項に記載の管路式除電器。(8) A conduit type static eliminator according to claims 1 to 6, wherein the AC high voltage power source is a high frequency AC high voltage power source.
求範囲第１より第６項に記載の管路式除電器。 ００ 人口部に帯電物体のかくはん部を設けた所の特
許請求範囲第１よシ第９項に記載の管路式除電器。(9) A conduit type static eliminator according to claims 1 to 6, wherein the AC high voltage power source is a high voltage pulse power source. 00 A conduit-type static eliminator according to claims 1 to 9, in which a charged object stirring part is provided in the population part.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15541981A JPS5857296A (en) | 1981-09-30 | 1981-09-30 | Tubular static eliminator |
| US06/421,729 US4472756A (en) | 1981-09-30 | 1982-09-23 | Duct type charge eliminator |
| DE3235874A DE3235874C2 (en) | 1981-09-30 | 1982-09-28 | Charge arrester for a pipeline |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15541981A JPS5857296A (en) | 1981-09-30 | 1981-09-30 | Tubular static eliminator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5857296A true JPS5857296A (en) | 1983-04-05 |
| JPH0354440B2 JPH0354440B2 (en) | 1991-08-20 |
Family
ID=15605581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15541981A Granted JPS5857296A (en) | 1981-09-30 | 1981-09-30 | Tubular static eliminator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5857296A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918906U (en) * | 1982-07-30 | 1984-02-04 | 田代 三雄 | Fastener cutting device |
| JP2006250576A (en) * | 2005-03-08 | 2006-09-21 | Shimadzu Corp | Device for measuring particle size distribution |
| JP2015204384A (en) * | 2014-04-14 | 2015-11-16 | 株式会社Ｓｃｒｅｅｎホールディングス | Process liquid supply device, substrate processing apparatus, process liquid supply method, and substrate processing method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933192U (en) * | 1972-06-26 | 1974-03-23 | ||
| JPS5478698A (en) * | 1977-12-05 | 1979-06-22 | Senichi Masuda | Antistatic device |
-
1981
- 1981-09-30 JP JP15541981A patent/JPS5857296A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933192U (en) * | 1972-06-26 | 1974-03-23 | ||
| JPS5478698A (en) * | 1977-12-05 | 1979-06-22 | Senichi Masuda | Antistatic device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918906U (en) * | 1982-07-30 | 1984-02-04 | 田代 三雄 | Fastener cutting device |
| JP2006250576A (en) * | 2005-03-08 | 2006-09-21 | Shimadzu Corp | Device for measuring particle size distribution |
| JP4618421B2 (en) * | 2005-03-08 | 2011-01-26 | 株式会社島津製作所 | Particle size distribution measuring device |
| JP2015204384A (en) * | 2014-04-14 | 2015-11-16 | 株式会社Ｓｃｒｅｅｎホールディングス | Process liquid supply device, substrate processing apparatus, process liquid supply method, and substrate processing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0354440B2 (en) | 1991-08-20 |
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