JPS5857064U - Objective lens for electron beam equipment - Google Patents
Objective lens for electron beam equipmentInfo
- Publication number
- JPS5857064U JPS5857064U JP15218581U JP15218581U JPS5857064U JP S5857064 U JPS5857064 U JP S5857064U JP 15218581 U JP15218581 U JP 15218581U JP 15218581 U JP15218581 U JP 15218581U JP S5857064 U JPS5857064 U JP S5857064U
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- magnetic pole
- electron beam
- lens body
- vertical direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案の第１の実施例に係る電子線１．装置
の対物レンズの構造を示す断面図である。第２−１本考
案の第１の実施例における絞り支持体部分の構造を拡大
し石示す要部断面図である。
第３図は、本考案の第２の実施例における絞り支持体部
分の構造を拡大して示す要部断面図である。
、第１図は、本考案の第３の実施例における絞り支゛持
体部分の構造を拡大して示す要部断面図である。
１−・・継鉄、２・・・上側磁極コイル、３・・・下側
磁極コイル、７・・・上側磁極片、８・・・上側磁極外
部筒、９・・・上側磁極内部筒、２４・・・絞り、２５
・・・絞り支持体、２７・・・調節ねじ、３１・・・下
側磁極片、３２−・・・下側磁極外部筒、３３・・・下
側磁極内部筒、５４・・・軸受部材、５８・・・ベロー
ズ。FIG. 1 shows an electron beam 1 according to a first embodiment of the present invention. FIG. 3 is a cross-sectional view showing the structure of an objective lens of the apparatus. 2-1 is an enlarged cross-sectional view of the main part showing the structure of the aperture support portion in the first embodiment of the present invention. FIG. 3 is an enlarged sectional view of the main part of the structure of the aperture support portion in the second embodiment of the present invention. , FIG. 1 is an enlarged cross-sectional view of a main part of the structure of a throttle support portion in a third embodiment of the present invention. 1 - Yoke, 2... Upper magnetic pole coil, 3... Lower magnetic pole coil, 7... Upper magnetic pole piece, 8... Upper magnetic pole outer cylinder, 9... Upper magnetic pole inner cylinder, 24... Aperture, 25
... Diaphragm support, 27... Adjustment screw, 31... Lower magnetic pole piece, 32-... Lower magnetic pole outer cylinder, 33... Lower magnetic pole inner cylinder, 54... Bearing member , 58... bellows.
Claims (1)
方向に所定のギャップを置いて対向している一対の磁極
片と、磁極片間隙ｉこ配置した試料ステージ及び絞りと
を備えた対物レンズにおいて、前記一対の磁極片のうち
少なくとも一方の磁極片を上下方向に移動可能に構成す
る一方、上記絞りレンズ本体部に対してシール保持し、
且つレンズ本体内部の真空を保ちつつ上下方向に移動可
能にしたことを特徴とする電子線装置の対物レンズ。In an objective lens comprising a lens body, a pair of magnetic pole pieces attached to the lens body and facing each other with a predetermined gap in the vertical direction, and a sample stage and an aperture arranged with the magnetic pole piece gap i. , at least one of the pair of magnetic pole pieces is configured to be movable in the vertical direction, while being sealed and held relative to the aperture lens body;
An objective lens for an electron beam device, characterized in that it is movable in the vertical direction while maintaining a vacuum inside the lens body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15218581U JPS5857064U (en) | 1981-10-15 | 1981-10-15 | Objective lens for electron beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15218581U JPS5857064U (en) | 1981-10-15 | 1981-10-15 | Objective lens for electron beam equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5857064U true JPS5857064U (en) | 1983-04-18 |
Family
ID=29944845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15218581U Pending JPS5857064U (en) | 1981-10-15 | 1981-10-15 | Objective lens for electron beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5857064U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4327725Y1 (en) * | 1965-10-15 | 1968-11-15 | ||
| JPS51137368A (en) * | 1975-05-23 | 1976-11-27 | Hitachi Ltd | Movable iris for electron microscope |
-
1981
- 1981-10-15 JP JP15218581U patent/JPS5857064U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4327725Y1 (en) * | 1965-10-15 | 1968-11-15 | ||
| JPS51137368A (en) * | 1975-05-23 | 1976-11-27 | Hitachi Ltd | Movable iris for electron microscope |
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