JPS5815968U - Objective lens for electron beam equipment - Google Patents
Objective lens for electron beam equipmentInfo
- Publication number
- JPS5815968U JPS5815968U JP10913881U JP10913881U JPS5815968U JP S5815968 U JPS5815968 U JP S5815968U JP 10913881 U JP10913881 U JP 10913881U JP 10913881 U JP10913881 U JP 10913881U JP S5815968 U JPS5815968 U JP S5815968U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- objective lens
- hole
- pole piece
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案の一実施例に係る電子線装置の対物レ
ンズの構造を示す断面図である。第２図は、本考案の実
施例における可動磁極片の作動を表わし、この可動磁極
片の可動部が上昇した状態を例示的に示す断面図である
。第３図は、第２図と同様の作動図であり、可動磁極片
の可動部が降下した状態を例示的に示す断面図である。
１・・・継鉄、２，３・・・磁極コイル、７・・・上側
磁極片、２３・・・試料ステージ、２４・・・絞り。FIG. 1 is a sectional view showing the structure of an objective lens of an electron beam apparatus according to an embodiment of the present invention. FIG. 2 is a cross-sectional view illustrating the operation of the movable pole piece in the embodiment of the present invention, and illustrating a state in which the movable part of the movable pole piece is raised. FIG. 3 is an operational view similar to FIG. 2, and is a sectional view illustrating a state in which the movable portion of the movable magnetic pole piece is lowered. DESCRIPTION OF SYMBOLS 1... Yoke, 2, 3... Magnetic pole coil, 7... Upper magnetic pole piece, 23... Sample stage, 24... Aperture.
Claims (1)
方向に所定のギャップを置いて対向している上側及び下
側磁極片と、上側磁極片と下側磁極片との間のギャップ
に配置された試料ステージとを有する対物レンズにおい
て、前記上側磁極片及び下側磁極片のうち少なくとも一
方を、貫通孔を有し且つ対物レンズ本体に固定した磁極
外部筒と、この磁極外部筒の貫通孔内に嵌入され、当該
貫通孔に沿って上下方向に移動可能に配置されると共に
軸方向に延びる孔を有する磁極内部筒とで構成し、磁極
内部筒は、磁極外部筒に対して、貫通孔の半径寸法以上
の長さ距離だけ陥没し得ることを特徴とする電子線装置
の対物レンズ。A lens body, upper and lower magnetic pole pieces attached to the lens body and facing each other with a predetermined gap in the vertical direction, and arranged in the gap between the upper magnetic pole piece and the lower magnetic pole piece. In the objective lens, at least one of the upper magnetic pole piece and the lower magnetic pole piece is provided with a magnetic pole outer cylinder having a through hole and fixed to the objective lens body; and a magnetic pole inner cylinder that is fitted into the through hole and has a hole that extends in the axial direction and is disposed so as to be movable in the vertical direction along the through hole. An objective lens for an electron beam device, characterized in that it can be depressed by a length distance greater than a radius dimension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10913881U JPS5815968U (en) | 1981-07-24 | 1981-07-24 | Objective lens for electron beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10913881U JPS5815968U (en) | 1981-07-24 | 1981-07-24 | Objective lens for electron beam equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5815968U true JPS5815968U (en) | 1983-01-31 |
Family
ID=29903517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10913881U Pending JPS5815968U (en) | 1981-07-24 | 1981-07-24 | Objective lens for electron beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815968U (en) |
-
1981
- 1981-07-24 JP JP10913881U patent/JPS5815968U/en active Pending
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