JPS5815969U - Objective lens for electron beam equipment - Google Patents
Objective lens for electron beam equipmentInfo
- Publication number
- JPS5815969U JPS5815969U JP10913981U JP10913981U JPS5815969U JP S5815969 U JPS5815969 U JP S5815969U JP 10913981 U JP10913981 U JP 10913981U JP 10913981 U JP10913981 U JP 10913981U JP S5815969 U JPS5815969 U JP S5815969U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- tube
- objective lens
- cylinder
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
、第１図は、本考案の一実施例に係る電子線装置の対物
レンズの構造を示す断面図である。第２図は、本考案の
実施例における可動磁極片の降下した状態を例示的に示
す断面図である。第３図は、本考案の実施例における可
動磁極片の上昇した状態を例示的に示す断面図である。
１・・・継鉄、２，３・・・磁極コイル、７・・・上側
磁極片、２・・・試料ステージ、２４・・・絞り。FIG. 1 is a sectional view showing the structure of an objective lens of an electron beam apparatus according to an embodiment of the present invention. FIG. 2 is a cross-sectional view illustrating the lowered state of the movable magnetic pole piece in the embodiment of the present invention. FIG. 3 is a cross-sectional view exemplarily showing the raised state of the movable magnetic pole piece in the embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Yoke, 2, 3... Magnetic pole coil, 7... Upper magnetic pole piece, 2... Sample stage, 24... Aperture.
Claims (2)
、上下方向に所定のギャップを置いて対向している上側
及び下側磁極片と、上側磁極片と下側磁極片との間のギ
ャップに配置された試料ステージとを有する対物レンズ
において、前記上側磁極片及び下側磁極片のうち少なく
とも一方を、対物レンズ本体に固定した磁極外部筒、こ
の磁極外部筒内に上下方向に移動可能ｉ嵌合した磁極内
部筒とで構成し、さらに磁極外部筒と磁極内部筒とは、
磁極内部筒が磁極外部筒に対して叢も前進したとき磁極
内部筒が磁極外部筒に対して緊密に合体し、一体化する
様組み合わさっていることを特徴とする電子線装置の対
物レンズ。(1) A gap between a lens body, upper and lower magnetic pole pieces attached to the lens body and facing each other with a predetermined gap in the vertical direction, and the upper magnetic pole piece and the lower magnetic pole piece. In the objective lens, at least one of the upper magnetic pole piece and the lower magnetic pole piece is fixed to the objective lens body, and is movable in the vertical direction inside the magnetic pole outer cylinder It consists of a fitted magnetic pole inner cylinder, and the magnetic pole outer cylinder and magnetic pole inner cylinder are
1. An objective lens for an electron beam apparatus, characterized in that the inner magnetic pole tube is tightly combined with the outer magnetic pole tube to be integrated with the outer magnetic tube when the inner tube of the magnetic pole moves forward with respect to the outer tube of the magnetic pole.
を截頭円錐形状の頭部と、当該頭部の下側に連続する胴
体部とで構成し且つ頭部と胴体部との間にテーパ部を設
ける一方、磁極外筒部には、上記磁極内部筒のテーパ部
ば整合するテーパ部を有する貫通孔を設け、磁極内部筒
が貫通孔内を前進したとき、これらの磁極内部筒と外部
筒とが合体するようにして成ることを特徴とする実用新
案登録請求の範囲第１項記載の電子線装置の対物レンズ
。(2) The fitting between the magnetic pole outer cylinder and the magnetic pole inner cylinder is achieved by constructing the magnetic pole inner cylinder with a truncated cone-shaped head and a body part continuous to the lower side of the head; A tapered portion is provided between the magnetic pole outer tube and a through hole having a tapered portion that matches the tapered portion of the magnetic pole inner tube.When the magnetic pole inner tube moves forward in the through hole, these An objective lens for an electron beam apparatus according to claim 1, characterized in that the inner cylinder and the outer cylinder of the magnetic pole are integrated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10913981U JPS5815969U (en) | 1981-07-24 | 1981-07-24 | Objective lens for electron beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10913981U JPS5815969U (en) | 1981-07-24 | 1981-07-24 | Objective lens for electron beam equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5815969U true JPS5815969U (en) | 1983-01-31 |
| JPS6313646Y2 JPS6313646Y2 (en) | 1988-04-18 |
Family
ID=29903518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10913981U Granted JPS5815969U (en) | 1981-07-24 | 1981-07-24 | Objective lens for electron beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815969U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131351A (en) * | 1984-11-30 | 1986-06-19 | Internatl Precision Inc | Objective lens of electron beam device |
| JP3001609U (en) * | 1994-03-02 | 1994-09-06 | マルホ産業株式会社 | Utility pole indicator light |
-
1981
- 1981-07-24 JP JP10913981U patent/JPS5815969U/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131351A (en) * | 1984-11-30 | 1986-06-19 | Internatl Precision Inc | Objective lens of electron beam device |
| JP3001609U (en) * | 1994-03-02 | 1994-09-06 | マルホ産業株式会社 | Utility pole indicator light |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6313646Y2 (en) | 1988-04-18 |
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