JPS585523A - 静圧流体スライド装置 - Google Patents

静圧流体スライド装置

Info

Publication number
JPS585523A
JPS585523A JP56102823A JP10282381A JPS585523A JP S585523 A JPS585523 A JP S585523A JP 56102823 A JP56102823 A JP 56102823A JP 10282381 A JP10282381 A JP 10282381A JP S585523 A JPS585523 A JP S585523A
Authority
JP
Japan
Prior art keywords
oil
hydraulic
guide
pocket
oil pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56102823A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6119848B2 (enExample
Inventor
Mamoru Inoue
守 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56102823A priority Critical patent/JPS585523A/ja
Publication of JPS585523A publication Critical patent/JPS585523A/ja
Publication of JPS6119848B2 publication Critical patent/JPS6119848B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Bearings For Parts Moving Linearly (AREA)
JP56102823A 1981-06-30 1981-06-30 静圧流体スライド装置 Granted JPS585523A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56102823A JPS585523A (ja) 1981-06-30 1981-06-30 静圧流体スライド装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56102823A JPS585523A (ja) 1981-06-30 1981-06-30 静圧流体スライド装置

Publications (2)

Publication Number Publication Date
JPS585523A true JPS585523A (ja) 1983-01-12
JPS6119848B2 JPS6119848B2 (enExample) 1986-05-19

Family

ID=14337737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56102823A Granted JPS585523A (ja) 1981-06-30 1981-06-30 静圧流体スライド装置

Country Status (1)

Country Link
JP (1) JPS585523A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999066221A1 (en) * 1998-06-17 1999-12-23 Nikon Corporation Static pressure gas bearing, stage device using it, and optical device using it
US6467960B1 (en) 2000-08-18 2002-10-22 Nikon Corporation Air bearing linear guide for use in a vacuum
US6499880B2 (en) 1999-02-19 2002-12-31 Nikon Corporation Static pressure air bearing
KR100601205B1 (ko) 2004-10-25 2006-07-13 (주)하이드로 메틱스 유압을 이용한 고하중 테이블 부상 및 이송장치
KR100908087B1 (ko) 2007-06-01 2009-07-16 화천기공 주식회사 공작기계용 공기 반부상 슬라이드 장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6590129B1 (ja) 2018-02-28 2019-10-16 Ｊｆｅスチール株式会社 プレス成形用の金属板、プレス成形装置及びプレス部品の製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999066221A1 (en) * 1998-06-17 1999-12-23 Nikon Corporation Static pressure gas bearing, stage device using it, and optical device using it
US6328473B1 (en) 1998-06-17 2001-12-11 Nikon Corporation Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus
US6499880B2 (en) 1999-02-19 2002-12-31 Nikon Corporation Static pressure air bearing
US6735867B2 (en) 1999-02-19 2004-05-18 Nikon Corporation Method of making a static pressure air bearing
US6467960B1 (en) 2000-08-18 2002-10-22 Nikon Corporation Air bearing linear guide for use in a vacuum
KR100601205B1 (ko) 2004-10-25 2006-07-13 (주)하이드로 메틱스 유압을 이용한 고하중 테이블 부상 및 이송장치
KR100908087B1 (ko) 2007-06-01 2009-07-16 화천기공 주식회사 공작기계용 공기 반부상 슬라이드 장치

Also Published As

Publication number Publication date
JPS6119848B2 (enExample) 1986-05-19

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