JPS585523A - Static pressure fluid slide apparatus - Google Patents
Static pressure fluid slide apparatusInfo
- Publication number
- JPS585523A JPS585523A JP10282381A JP10282381A JPS585523A JP S585523 A JPS585523 A JP S585523A JP 10282381 A JP10282381 A JP 10282381A JP 10282381 A JP10282381 A JP 10282381A JP S585523 A JPS585523 A JP S585523A
- Authority
- JP
- Japan
- Prior art keywords
- oil
- outside
- guide
- hydraulic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、静圧流体軸受金用いたスライド装置に関する
ものであり、特に作動油の漏出がなく、2、
かつ装置全体全コンパクトにしたスライド装置を提供す
るものである。[Detailed Description of the Invention] The present invention relates to a slide device using a hydrostatic fluid bearing metal, and in particular provides a slide device that does not leak hydraulic oil, 2. and is compact in its entirety. .
従来静圧流体軸受を用いたスライド機構には次のような
長所があり、近年多くの装置に用いられている。Conventional slide mechanisms using hydrostatic fluid bearings have the following advantages, and have been used in many devices in recent years.
i スライド部の摩擦抵抗が小さ−。i Frictional resistance of the sliding part is small.
11 スライド部の摩耗がなく寿命が長い。11 Long life with no wear on the sliding part.
111 ボールやコロに比べて軸受剛性が大きい。111 Bearing rigidity is greater than balls or rollers.
1v 流体の平均効果により、ガイドの加工精度より
も高い精度の直進性が得られる。1v Due to the average effect of the fluid, straightness with higher accuracy than the processing accuracy of the guide can be obtained.
このように静圧流体軸受には優fLk点がある反面、ス
ライド機構に用いると作動油の漏出が発生しやすく、装
置に用いる際の取扱いがむずかしいという欠点があった
。このため比較的寸法の小さいものに対し−Cは静圧流
体軸受を使用することがむずかしかった。Although hydrostatic fluid bearings have excellent fLk points as described above, they have the disadvantage that when used in slide mechanisms, hydraulic oil tends to leak, and it is difficult to handle when used in devices. For this reason, it has been difficult to use hydrostatic fluid bearings in -C for relatively small dimensions.
以下第1〜6図全相いて従来例全説明する。第1〜3図
は一般的なスライド機構で、ガイド1に沿ってスライド
ブロック2が摺動する。第4図は静圧流体軸受に作動油
全供給するための油圧ユニ3 パ−7
ツト3の回路図である。The conventional example will be fully explained below with reference to FIGS. 1 to 6. 1 to 3 show a general slide mechanism, in which a slide block 2 slides along a guide 1. FIG. 4 is a circuit diagram of the hydraulic unit 3 part 3 for supplying all the hydraulic oil to the hydrostatic fluid bearing.
ガイド1に摺動可能に嵌合したスライドブロック2の内
面には、ボケ、ット4があり、第1油道5から絞り6を
通して油圧が供給される。矢印Pは油圧の供給を示し矢
印Tはタンク12への戻りを示す。ポケット4の外側に
は第2油道7があるOポケット4と第2油道7のパター
ンは第5図に示す。ポケット4に対向するガイド1の面
8とポケット4の捷わりのランド部9の間には間隙10
がある。一般にこの間隙は10〜2o〔μm〕程度であ
る。A slide block 2 slidably fitted into the guide 1 has a groove 4 on its inner surface, and hydraulic pressure is supplied from a first oil passage 5 through a throttle 6. Arrow P indicates the supply of hydraulic pressure, and arrow T indicates return to the tank 12. There is a second oil pipe 7 outside the pocket 4. The pattern of the O pocket 4 and the second oil pipe 7 is shown in FIG. There is a gap 10 between the surface 8 of the guide 1 facing the pocket 4 and the land portion 9 in place of the pocket 4.
There is. Generally, this gap is about 10-20 [μm].
今、第4図に示すように油圧ユニット3のポンプ11に
より加圧された作動油が第1油道6、絞り6を通ってポ
ケット4に供給さnると、スライドブロック2とガイド
1との間は流体潤滑状態になる。ポケット4から間隙1
0全通って流出した作動油は第2油道7ケ通り油圧ユニ
ット3のタンク12に戻る。油圧ユニット3のタンク1
2は大気圧であるが、スライドプロ、り2の第2の油道
7における作動油の油圧は、タンク12とスライドブロ
ック2の間に配管損失があるので、大気圧より高くなる
。このため作動油はスライドブロック2とガイド1の間
隙より漏出する。Now, as shown in FIG. 4, when hydraulic oil pressurized by the pump 11 of the hydraulic unit 3 is supplied to the pocket 4 through the first oil pipe 6 and the throttle 6, the slide block 2 and guide 1 are connected to each other. During this period, there is a state of fluid lubrication. Pocket 4 to gap 1
The hydraulic oil that has flowed out through all seven second oil passages returns to the tank 12 of the hydraulic unit 3. Tank 1 of hydraulic unit 3
2 is atmospheric pressure, but since there is piping loss between the tank 12 and the slide block 2, the hydraulic pressure of the hydraulic oil in the second oil passage 7 of the slide pro 2 is higher than the atmospheric pressure. Therefore, the hydraulic oil leaks from the gap between the slide block 2 and the guide 1.
本発明は1反上のような欠点全排除したものであり、即
ち、静圧流体軸受における作動油の漏出全防いだスライ
ド装置全提供するものである。The present invention eliminates all of the above drawbacks, namely, provides a slide device that completely prevents leakage of hydraulic oil in a hydrostatic fluid bearing.
以下にその実施例?第6〜第8図により詳細に説明する
。Below is an example? This will be explained in detail with reference to FIGS. 6 to 8.
第6図は実施例の断面図であり、第8図は油圧及び空圧
回路図である。FIG. 6 is a sectional view of the embodiment, and FIG. 8 is a hydraulic and pneumatic circuit diagram.
第6図においてガイド13に沿って、スライドブロック
14が摺動する。ガイド13に摺動可能に嵌合したスラ
イドブロック14の内面にはポケット15があり、第1
油道16から絞り17ケ通して油圧が供給される。ポケ
ット16の外側には第2油道18、第3油道19、更に
外側には#!0がある。ここに矢印pH油圧の供給、矢
印T−Dは作動油のタンク24への戻り、矢印A。はエ
アの供給全示す。In FIG. 6, the slide block 14 slides along the guide 13. A pocket 15 is provided on the inner surface of the slide block 14 which is slidably fitted into the guide 13.
Hydraulic pressure is supplied from an oil pipe 16 through 17 throttles. On the outside of the pocket 16 there is a second oil pipe 18, a third oil pipe 19, and on the outside there is a #! There is 0. Here, arrow pH indicates oil pressure supply, arrow T-D indicates return of hydraulic oil to tank 24, arrow A. indicates full air supply.
ボケ1.ト16.第2油道18.第3油道19及5 −
。Bokeh 1. G16. 2nd oil road 18. No. 3 oil road 19 and 5 -
.
び溝20のパターンは第7図に示す。The pattern of the grooves 20 is shown in FIG.
ポケット16に対向するガイド13の面21とスライド
プロ、り14との間には間隙22があも一般にこの間隙
は10〜20(μm)程度である。There is a gap 22 between the surface 21 of the guide 13 facing the pocket 16 and the slide plate 14. Generally, this gap is about 10 to 20 (μm).
次に第8図により油圧及び空圧回路図について説明する
。Next, a hydraulic and pneumatic circuit diagram will be explained with reference to FIG.
油圧ユニット23は静圧軸受に油圧全供給するためのも
のである。タンク24の作動油はモータ26で駆動され
るポンプ26により、フィルタ27を通して吸上げられ
、加圧される。ポンプ26から吐出された油圧は、切換
弁28を通り第1油道16、絞り17を経てポケット1
6に達する。ポケット15から間隙22全通って流出し
た作動油の大部分は第2油道18を通りタンク24に戻
る。The hydraulic unit 23 is for supplying all hydraulic pressure to the hydrostatic bearings. The hydraulic oil in the tank 24 is sucked up through a filter 27 by a pump 26 driven by a motor 26 and pressurized. The hydraulic pressure discharged from the pump 26 passes through the switching valve 28, the first oil pipe 16, the throttle 17, and the pocket 1.
Reach 6. Most of the hydraulic oil that has flowed out from the pocket 15 through the entire gap 22 returns to the tank 24 through the second oil passage 18.
第2油道18から更に外側の第3油道19に漏出した作
動油は、モータ29により駆動されるポンプ30により
強制的に吸引され、タンク24に戻される。このため第
3油道19から、更に外側に作動油が漏出することはな
い。第3油道19の更に外側の溝20には外部のエア源
31からエアが6ベー7
道19の作動油はポンプ30で吸引されるため、第3油
道は負圧になり、外部から大気が侵入すんこれとともに
外部の異物、とくに本発明のスライド装置全工作機械、
等に組込んだときには、切断や切削油がガイド13とス
ライドブロック14との間に入り、スライド装置を損傷
する恐れがある。The hydraulic oil leaking from the second oil pipe 18 to the third oil pipe 19 located further outside is forcibly sucked by a pump 30 driven by a motor 29 and returned to the tank 24 . Therefore, the hydraulic oil does not leak further outward from the third oil pipe 19. Air is supplied from an external air source 31 to the groove 20 on the outside of the third oil pipe 19. Since the hydraulic oil in the pipe 19 is sucked by the pump 30, the third oil pipe becomes negative pressure, and from the outside. Atmospheric air enters the machine and foreign objects, especially all machine tools with the slide device of the present invention,
When the slide device is assembled into a device such as the like, cutting or cutting oil may enter between the guide 13 and the slide block 14 and damage the slide device.
しかし溝20に清浄なエアを供給し、溝2oの圧力全大
気圧より高くすることにより異物の侵入はなく々る。However, by supplying clean air to the groove 20 and making the pressure in the groove 2o higher than the total atmospheric pressure, the intrusion of foreign matter is reduced.
また第3油道19を設けずに第2油道の作動ポンプ30
で強・制約に回収することも考えられるが作動油の流量
が多く、ポンプ3oに大型のものが必要となるため実用
的でない。Also, the operating pump 30 of the second oil pipe is not provided with the third oil pipe 19.
Although it is conceivable to recover the oil in a strong and limited manner, it is not practical because the flow rate of the hydraulic oil is large and a large pump 3o is required.
以上のように本発明のスライド装置では、流体軸受のポ
ケット16の外側に設けた第2油道18で作動油の大部
分全油圧ユニット23に戻し、第2油道の更に外側に設
けた第3油道19に漏出した作動油紮ポンプ3oで強制
的に油圧ユニット237ページ
に戻しているのでスライド装置の外部に作動油が清浄な
エアを供給しているので、異物がガイド13とスライド
ブロック14との間に侵入することがない。このため異
物によるスライド装置の損傷がない。As described above, in the slide device of the present invention, most of the hydraulic fluid is returned to the full hydraulic unit 23 through the second oil passage 18 provided outside the pocket 16 of the fluid bearing, and the second oil passage 18 provided outside the pocket 16 of the fluid bearing returns most of the hydraulic oil to the full hydraulic unit 23. 3 The hydraulic oil that leaked into the oil pipe 19 is forcibly returned to the hydraulic unit page 237 by the pump 3o, so the hydraulic oil is supplying clean air to the outside of the slide device, so foreign objects can be removed from the guide 13 and the slide block. There is no possibility of intrusion between 14 and 14. Therefore, there is no damage to the slide device due to foreign objects.
また一般に静圧軸受を用いたスライド装置は小型にする
と作動油の漏出が著しく増加するが、本発明のものは漏
出の恐れがないので装置をコンパクトに設計できる。Furthermore, in general, when a slide device using a hydrostatic bearing is downsized, the leakage of hydraulic oil increases significantly, but with the slide device of the present invention, there is no risk of leakage, so the device can be designed compactly.
以上説明したように本発明は作動油の漏出のないコンパ
クトな静圧流体軸受構造のスライド装置を提供するもの
である。As described above, the present invention provides a compact slide device with a hydrostatic fluid bearing structure that does not leak hydraulic fluid.
第1図はスライド機構の正面図、第2図は第1図のAR
線断面図で、従来の静圧流体軸受構造を用いたスライド
機構の断面図、第3図は第1図のB B’線断面図で、
従来の静圧流体軸受構造を用いたスライド機構の断面図
・第4図は従来の静圧流体軸受構造分用いたスライド装
置の油圧回路図、第5図は従来の静圧流体軸受構造を用
いたスライド機構におけるポケット及び第2油道のパタ
ーン図、第6図は本発明の一実施例における静圧流体ス
ライド装置の断面図、第7図は同装置のパター図、第8
図は同装置の油圧及び空圧回路図である。
1.13・・・・・・ガイド、2.14・・・・・・ス
ライドブロック、4.15・・・・拳・ポケット、6.
17・・・・・・絞り、5.16・・・・・・第1油道
、7,18・・・・・・第2油道、19・・・・・・第
3油道、20・・・・・・溝、31・・・・・・エア源
。Figure 1 is a front view of the slide mechanism, Figure 2 is the AR of Figure 1.
3 is a sectional view taken along the line B B' of FIG. 1;
A cross-sectional view of a slide mechanism using a conventional hydrostatic fluid bearing structure. Figure 4 is a hydraulic circuit diagram of a slide mechanism using a conventional hydrostatic fluid bearing structure. Figure 5 is a hydraulic circuit diagram of a slide mechanism using a conventional hydrostatic fluid bearing structure. FIG. 6 is a sectional view of a hydrostatic fluid slide device according to an embodiment of the present invention, FIG. 7 is a putter diagram of the same device, and FIG.
The figure is a hydraulic and pneumatic circuit diagram of the same device. 1.13...Guide, 2.14...Slide block, 4.15...Fist/pocket, 6.
17...Aperture, 5.16...1st oil road, 7,18...2nd oil road, 19...3rd oil road, 20 ...Groove, 31...Air source.
Claims (1)
ガイドに沿って摺動するスライドブロックとから構成さ
れる静圧流体スライド装置において、前記ガイドとの対
向面に設けられたポケットと、このポケットに絞り手段
全通して圧力流体を導くよう設けられた第1油道と、前
記ポケットの外側に前記ポケットから流出した流体全回
収するよう設けられた第2油道と、この第2油道の外側
に設けられた第3油道と、前記第3油道に流出した流体
全吸引する手段と、前記第3油道の外側に設けられた溝
部と、この溝部にエア全供給する手段とを有したことを
特徴とする静圧流体スライド装置。A hydrostatic fluid slide device comprising a guide and a slide block that slides along the guide with all of the pressure fluid flowing between the guide, a pocket provided on a surface facing the guide; A first oil pipe is provided to guide the pressure fluid through the entire throttle means into the pocket, a second oil pipe is provided outside the pocket to collect all the fluid that has flowed out from the pocket, and A third oil pipe provided on the outside of the road, a means for sucking all the fluid spilled into the third oil pipe, a groove provided on the outside of the third oil pipe, and a means for completely supplying air to the groove. A hydrostatic fluid slide device comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10282381A JPS585523A (en) | 1981-06-30 | 1981-06-30 | Static pressure fluid slide apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10282381A JPS585523A (en) | 1981-06-30 | 1981-06-30 | Static pressure fluid slide apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS585523A true JPS585523A (en) | 1983-01-12 |
JPS6119848B2 JPS6119848B2 (en) | 1986-05-19 |
Family
ID=14337737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10282381A Granted JPS585523A (en) | 1981-06-30 | 1981-06-30 | Static pressure fluid slide apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS585523A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999066221A1 (en) * | 1998-06-17 | 1999-12-23 | Nikon Corporation | Static pressure gas bearing, stage device using it, and optical device using it |
US6467960B1 (en) | 2000-08-18 | 2002-10-22 | Nikon Corporation | Air bearing linear guide for use in a vacuum |
US6499880B2 (en) | 1999-02-19 | 2002-12-31 | Nikon Corporation | Static pressure air bearing |
KR100601205B1 (en) | 2004-10-25 | 2006-07-13 | (주)하이드로 메틱스 | Heavy table rising and sliding apparatus using oil pressure |
KR100908087B1 (en) | 2007-06-01 | 2009-07-16 | 화천기공 주식회사 | Air floatation slide device for machine tool |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111867747B (en) | 2018-02-28 | 2022-05-13 | 杰富意钢铁株式会社 | Metal plate for press molding, press molding device, and method for manufacturing press member |
-
1981
- 1981-06-30 JP JP10282381A patent/JPS585523A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999066221A1 (en) * | 1998-06-17 | 1999-12-23 | Nikon Corporation | Static pressure gas bearing, stage device using it, and optical device using it |
US6328473B1 (en) | 1998-06-17 | 2001-12-11 | Nikon Corporation | Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus |
US6499880B2 (en) | 1999-02-19 | 2002-12-31 | Nikon Corporation | Static pressure air bearing |
US6735867B2 (en) | 1999-02-19 | 2004-05-18 | Nikon Corporation | Method of making a static pressure air bearing |
US6467960B1 (en) | 2000-08-18 | 2002-10-22 | Nikon Corporation | Air bearing linear guide for use in a vacuum |
KR100601205B1 (en) | 2004-10-25 | 2006-07-13 | (주)하이드로 메틱스 | Heavy table rising and sliding apparatus using oil pressure |
KR100908087B1 (en) | 2007-06-01 | 2009-07-16 | 화천기공 주식회사 | Air floatation slide device for machine tool |
Also Published As
Publication number | Publication date |
---|---|
JPS6119848B2 (en) | 1986-05-19 |
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