JPS585525A - Static pressure fluid slide apparatus - Google Patents

Static pressure fluid slide apparatus

Info

Publication number
JPS585525A
JPS585525A JP10282581A JP10282581A JPS585525A JP S585525 A JPS585525 A JP S585525A JP 10282581 A JP10282581 A JP 10282581A JP 10282581 A JP10282581 A JP 10282581A JP S585525 A JPS585525 A JP S585525A
Authority
JP
Japan
Prior art keywords
oil
pocket
fluid
hydraulic
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10282581A
Other languages
Japanese (ja)
Inventor
Mamoru Inoue
守 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10282581A priority Critical patent/JPS585525A/en
Publication of JPS585525A publication Critical patent/JPS585525A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

PURPOSE:To prevent leakage of operating oil by providing a second oil duct for reclaiming fluid on the outside of a pocket and coupling means for sucking fluid in the second oil duct. CONSTITUTION:Oil pressure discharged from a pump 16 passes through a switching valve 18, a first oil duct 5 and a throttle 6 into a pocket 4. The operating oil flowed out from the pocket 4 through a gap 10 into a second oil duct 7 is compulsorily sucked by a pump 20 driven by a motor 19 to be returned to a tank 14. Thus, the operating oil is prevented from leaking out from the second oil duct 7 further.

Description

【発明の詳細な説明】 本発明は、静圧流体軸受を用いたスライド装置に関する
ものであり、特に作動油の漏出がなく、かつ装置全体を
コンパクトにした静圧流体スライド装置を提供するもの
である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a slide device using a hydrostatic fluid bearing, and in particular provides a hydrostatic fluid slide device that does not leak hydraulic oil and has a compact overall device. be.

従来静圧流体軸受を用いたスライド機構には次のような
長所があり近年多ぐの装置に用いられている。
Conventional slide mechanisms using hydrostatic fluid bearings have the following advantages and have been used in many devices in recent years.

1 スライド部の摩擦抵抗が小さい。1. The frictional resistance of the sliding part is small.

11  スライド部の摩耗がな(寿命が長い。11. No wear on the sliding part (long lifespan).

Ill  ボールやコロに比べて軸受剛性が大きい。Ill Bearing rigidity is greater than balls or rollers.

1v  流体の平均化効果により、ガイドの加工精度よ
りも高い精度の直進性が得られる。
1v Due to the averaging effect of the fluid, straightness with higher accuracy than the processing accuracy of the guide can be obtained.

このように静圧流体軸受には優れた点がある反面、スラ
イド機構に用いると作動油の漏出が発生しゃすぐ装置に
用いる際の取扱いがむずかしいという欠点があった。こ
のため比較的寸法の小さいものに対しては静圧流体軸受
を使用することがむずかしかった。
While hydrostatic fluid bearings have advantages as described above, they also have the disadvantage that when used in slide mechanisms, hydraulic oil leaks and it is difficult to handle when used in equipment. For this reason, it has been difficult to use hydrostatic fluid bearings for relatively small items.

以下第1〜5図を用いて従来例を説明する。第1〜3図
は一般的なスライド機構で、ガイド1に沿ってスライド
ブロック2が摺動する。第4図は静圧流体軸受に作動油
を供給するための油圧ユニット3の回路図である。
A conventional example will be explained below using FIGS. 1 to 5. 1 to 3 show a general slide mechanism, in which a slide block 2 slides along a guide 1. FIG. 4 is a circuit diagram of the hydraulic unit 3 for supplying hydraulic oil to the hydrostatic fluid bearing.

ガイド1に摺動可能に嵌合したスライドプロヅり2の内
面には、ポケット4があり、第1油道5から絞り6を通
して油圧が供給される。矢印Pは油圧の供給を示し矢印
Tけタンク12への戻りを示す。ポケット4の外(10
には第2油道7がある。
A pocket 4 is provided on the inner surface of the slide prod 2 which is slidably fitted into the guide 1, and hydraulic pressure is supplied from a first oil passage 5 through a throttle 6. Arrow P indicates the supply of hydraulic pressure, and arrow T indicates return to the tank 12. Outside pocket 4 (10
There is a second oil road 7.

ポケット4と第2油道7のパターンは第6図に示す。ポ
ケット4に対向するガイド1の面8とポケット4のまわ
りのランド部9の間には間隙1oがある。一般にこの間
隙は10〜2o〔/1m〕程度である。
The pattern of the pocket 4 and the second oil pipe 7 is shown in FIG. There is a gap 1o between the surface 8 of the guide 1 facing the pocket 4 and the land 9 around the pocket 4. Generally, this gap is about 10 to 2 degrees [/1 m].

今、第4図に示すように油圧ユニット3のポンプ11に
より加圧された作動油が第1油道6、絞り6を通ってポ
ケット4に供給されると、スライドブロック2とガイド
1との間は流体潤滑状態になる。ポケット4から間隙1
oを通って流出した作動油は第2油道7を通り油圧ユニ
・ソト3のタンク12に戻る。油圧ユニット3のタンク
12は大気圧であるが、スライドブロック2の第2油道
7における作動油の油圧は、タンク12とスライドブロ
ック2の間に配管損失があるので、大気圧より高くなる
。このため作動油はスライドブロック本発明は以上のよ
うな欠点を排除したものであり、即ち、静圧流体軸受に
おける作動油の漏出を防いだスライド装置を提供するも
のである。
Now, as shown in FIG. 4, when hydraulic oil pressurized by the pump 11 of the hydraulic unit 3 is supplied to the pocket 4 through the first oil pipe 6 and the throttle 6, the slide block 2 and the guide 1 are connected to each other. During this period, there is fluid lubrication. Pocket 4 to gap 1
The hydraulic oil that has flown out through O passes through the second oil pipe 7 and returns to the tank 12 of the hydraulic uni-soto 3. Although the tank 12 of the hydraulic unit 3 is at atmospheric pressure, the hydraulic pressure of the hydraulic oil in the second oil passage 7 of the slide block 2 is higher than the atmospheric pressure because there is piping loss between the tank 12 and the slide block 2. Therefore, the hydraulic fluid is contained in a slide block.The present invention eliminates the above-mentioned drawbacks, and provides a slide device that prevents leakage of hydraulic fluid in a hydrostatic fluid bearing.

第6図は実施例の油圧回路図であり、油圧ユニット13
は静圧軸受に油圧を供給するためのものである。
FIG. 6 is a hydraulic circuit diagram of the embodiment, in which the hydraulic unit 13
is for supplying hydraulic pressure to the hydrostatic bearing.

タンク14の作動油はモータ15で駆動されるポンプ1
6により、フィルタ17を通して吸上げられ、加圧され
る。ポンプ16から吐出された油圧は切換弁18を通り
第1油道6、絞り6を経てポケット4に達する。ポケッ
ト4から間隙10を通って第2油道7に流出した作動油
は、モータ19で駆動されるポンプ20により強制的に
吸引され、タンク14に戻される。このため第2油道7
から更に外側に作動油が漏出することはない。
The hydraulic oil in the tank 14 is supplied to the pump 1 driven by a motor 15.
6, it is sucked up through a filter 17 and pressurized. The hydraulic pressure discharged from the pump 16 passes through the switching valve 18, the first oil passage 6, and the throttle 6 before reaching the pocket 4. The hydraulic oil flowing out from the pocket 4 through the gap 10 into the second oil passage 7 is forcibly sucked by a pump 20 driven by a motor 19 and returned to the tank 14. For this reason, the second oil road 7
Hydraulic oil will not leak further to the outside.

以上のように本発明のスライド装置では、流体軸受のポ
ケットの外側に設けた第2油道の作動油をポンプで強制
的に油圧ユニットに戻しているのでスライド装置の外部
に作動油が漏出することがない。
As described above, in the slide device of the present invention, the hydraulic oil in the second oil path provided outside the pocket of the hydrodynamic bearing is forcibly returned to the hydraulic unit by the pump, so the hydraulic oil leaks to the outside of the slide device. Never.

このため装置への組込が容易である。Therefore, it is easy to incorporate into the device.

また一般に静圧軸受を用いたスライド装置は小型にする
と作動油の漏出が著しく増加するが、本発明のものは漏
出の恐れがないので装置をコンパクトに設計できる。
Furthermore, in general, when a slide device using a hydrostatic bearing is downsized, the leakage of hydraulic oil increases significantly, but with the slide device of the present invention, there is no risk of leakage, so the device can be designed compactly.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はスライド機構の正面図、第2図は第1図のA、
A’線断面図で、静圧流体軸受構造を用いたスライド機
構の断面図、第3図は第1図のBB′線断面図で、静圧
流体軸受構造を用いたスライド機構の断面図、第4図は
従来の静圧流体軸受構造を用いたスライド装置の油圧回
路図、第5図は従来の静圧流体軸受構造を用いたスライ
ド機構におけるポケット及び第2油道のパターン図、第
6図は本発明の一実施例の静圧流体スライド装置の油圧
回路図である。 1・・・・・・ガイド、2・・・・・・スライドブロッ
ク、4・・・・・・ポケット、6・・・・・・絞り、5
・・・・・・第1油道、了・・・・・・第2油道、11
,16.20・・・・・・・・・ポンプ。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第4
図 第5図
Figure 1 is a front view of the slide mechanism, Figure 2 is A of Figure 1,
3 is a sectional view taken along the line BB' of FIG. 1, which is a sectional view taken along line A' and shows a slide mechanism using a hydrostatic fluid bearing structure; FIG. 3 is a sectional view taken along line BB' in FIG. Fig. 4 is a hydraulic circuit diagram of a slide device using a conventional hydrostatic fluid bearing structure, Fig. 5 is a pattern diagram of a pocket and a second oil passage in a slide mechanism using a conventional hydrostatic fluid bearing structure, and Fig. 6 is a hydraulic circuit diagram of a slide device using a conventional hydrostatic fluid bearing structure. The figure is a hydraulic circuit diagram of a hydrostatic fluid slide device according to an embodiment of the present invention. 1...Guide, 2...Slide block, 4...Pocket, 6...Aperture, 5
...No. 1 oil road, completion...No. 2 oil road, 11
,16.20...Pump. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 4
Figure 5

Claims (1)

【特許請求の範囲】[Claims] ガイドと、このガイドとの間に圧力流体を流入して前記
ガイドに沿って摺動するスライドブロックとから構成さ
れる静圧流体スライド装置において、前記スライドブロ
ックは、前記ガイドとの対向面に設けられたポケットと
、このポケットに絞り手段を通して圧力流体を導ぐよう
設けられた第1油道と、前記ポケットの外側に前記ポケ
ットから流出した流体を回収するよう設けられた第2油
道と、前記第2油道に流出した流体を吸引する手段とを
有することを特徴とする静圧流体スライド装置。
In a hydrostatic fluid slide device comprising a guide and a slide block that slides along the guide by flowing pressure fluid between the guide, the slide block is provided on a surface facing the guide. a first oil pipe provided to guide pressure fluid through a restricting means into the pocket; and a second oil pipe provided outside the pocket to collect the fluid flowing out from the pocket; A hydrostatic fluid slide device comprising means for suctioning the fluid that has flowed into the second oilway.
JP10282581A 1981-06-30 1981-06-30 Static pressure fluid slide apparatus Pending JPS585525A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10282581A JPS585525A (en) 1981-06-30 1981-06-30 Static pressure fluid slide apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10282581A JPS585525A (en) 1981-06-30 1981-06-30 Static pressure fluid slide apparatus

Publications (1)

Publication Number Publication Date
JPS585525A true JPS585525A (en) 1983-01-12

Family

ID=14337793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10282581A Pending JPS585525A (en) 1981-06-30 1981-06-30 Static pressure fluid slide apparatus

Country Status (1)

Country Link
JP (1) JPS585525A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6366491A (en) * 1986-09-09 1988-03-25 日立電子エンジニアリング株式会社 Moving stage mechanism
JPH0160018U (en) * 1987-10-14 1989-04-17
CN105108498A (en) * 2015-08-24 2015-12-02 湖南长河机械有限公司 Hydrostatic guideway
JP2019214089A (en) * 2018-06-12 2019-12-19 東芝機械株式会社 Guide mechanism of machine tool, machine tool and guide member of machine tool

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621932U (en) * 1979-07-27 1981-02-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621932U (en) * 1979-07-27 1981-02-26

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6366491A (en) * 1986-09-09 1988-03-25 日立電子エンジニアリング株式会社 Moving stage mechanism
JPH0160018U (en) * 1987-10-14 1989-04-17
CN105108498A (en) * 2015-08-24 2015-12-02 湖南长河机械有限公司 Hydrostatic guideway
JP2019214089A (en) * 2018-06-12 2019-12-19 東芝機械株式会社 Guide mechanism of machine tool, machine tool and guide member of machine tool

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