JPS5853686A - 流体圧駆動式定量ポンプ - Google Patents

流体圧駆動式定量ポンプ

Info

Publication number
JPS5853686A
JPS5853686A JP56150586A JP15058681A JPS5853686A JP S5853686 A JPS5853686 A JP S5853686A JP 56150586 A JP56150586 A JP 56150586A JP 15058681 A JP15058681 A JP 15058681A JP S5853686 A JPS5853686 A JP S5853686A
Authority
JP
Japan
Prior art keywords
fluid
fluid pressure
pump
pressure
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56150586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH028149B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Eiichi Sugano
栄一 菅野
Takao Ide
井手　孝夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Z KOGYO KK
Organo Corp
Original Assignee
Z KOGYO KK
Organo Corp
Japan Organo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Z KOGYO KK, Organo Corp, Japan Organo Co Ltd filed Critical Z KOGYO KK
Priority to JP56150586A priority Critical patent/JPS5853686A/ja
Publication of JPS5853686A publication Critical patent/JPS5853686A/ja
Publication of JPH028149B2 publication Critical patent/JPH028149B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/10—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid
    • F04B9/103—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having only one pumping chamber
    • F04B9/107—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having only one pumping chamber rectilinear movement of the pumping member in the working direction being obtained by a single-acting liquid motor, e.g. actuated in the other direction by gravity or a spring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP56150586A 1981-09-25 1981-09-25 流体圧駆動式定量ポンプ Granted JPS5853686A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56150586A JPS5853686A (ja) 1981-09-25 1981-09-25 流体圧駆動式定量ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56150586A JPS5853686A (ja) 1981-09-25 1981-09-25 流体圧駆動式定量ポンプ

Publications (2)

Publication Number Publication Date
JPS5853686A true JPS5853686A (ja) 1983-03-30
JPH028149B2 JPH028149B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-22

Family

ID=15500119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56150586A Granted JPS5853686A (ja) 1981-09-25 1981-09-25 流体圧駆動式定量ポンプ

Country Status (1)

Country Link
JP (1) JPS5853686A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100332951B1 (ko) * 1999-08-11 2002-04-20 윤종용 반도체 설비용 케미컬 정량 공급 장치
JPWO2005088129A1 (ja) * 2004-03-15 2008-01-31 株式会社コガネイ 薬液供給装置
CN107923375A (zh) * 2015-08-06 2018-04-17 多沙特隆国际公司 受监控的比例计量供给设备和用于监控计量供给泵的方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248803A (en) * 1975-10-16 1977-04-19 Maruyama Seisakusho:Kk Feed pump
JPS5663860U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-10-20 1981-05-29
JPS56122111U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-02-15 1981-09-17

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248803A (en) * 1975-10-16 1977-04-19 Maruyama Seisakusho:Kk Feed pump
JPS5663860U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-10-20 1981-05-29
JPS56122111U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-02-15 1981-09-17

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100332951B1 (ko) * 1999-08-11 2002-04-20 윤종용 반도체 설비용 케미컬 정량 공급 장치
JPWO2005088129A1 (ja) * 2004-03-15 2008-01-31 株式会社コガネイ 薬液供給装置
JP4566989B2 (ja) * 2004-03-15 2010-10-20 株式会社コガネイ 薬液供給装置
CN107923375A (zh) * 2015-08-06 2018-04-17 多沙特隆国际公司 受监控的比例计量供给设备和用于监控计量供给泵的方法

Also Published As

Publication number Publication date
JPH028149B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-22

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