JPS5852061Y2 - 不織布製研摩材 - Google Patents
不織布製研摩材Info
- Publication number
- JPS5852061Y2 JPS5852061Y2 JP11996079U JP11996079U JPS5852061Y2 JP S5852061 Y2 JPS5852061 Y2 JP S5852061Y2 JP 11996079 U JP11996079 U JP 11996079U JP 11996079 U JP11996079 U JP 11996079U JP S5852061 Y2 JPS5852061 Y2 JP S5852061Y2
- Authority
- JP
- Japan
- Prior art keywords
- fiber layer
- abrasive material
- resin
- inorganic fiber
- grinding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003082 abrasive agent Substances 0.000 title claims description 19
- 239000000835 fiber Substances 0.000 claims description 22
- 239000012784 inorganic fiber Substances 0.000 claims description 14
- 239000011230 binding agent Substances 0.000 claims description 13
- 239000011347 resin Substances 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 239000004745 nonwoven fabric Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 description 6
- 239000005011 phenolic resin Substances 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- SGTNSNPWRIOYBX-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-{[2-(3,4-dimethoxyphenyl)ethyl](methyl)amino}-2-(propan-2-yl)pentanenitrile Chemical compound C1=C(OC)C(OC)=CC=C1CCN(C)CCCC(C#N)(C(C)C)C1=CC=C(OC)C(OC)=C1 SGTNSNPWRIOYBX-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000004580 weight loss Effects 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000005007 epoxy-phenolic resin Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11996079U JPS5852061Y2 (ja) | 1979-08-30 | 1979-08-30 | 不織布製研摩材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11996079U JPS5852061Y2 (ja) | 1979-08-30 | 1979-08-30 | 不織布製研摩材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5638766U JPS5638766U (enExample) | 1981-04-11 |
| JPS5852061Y2 true JPS5852061Y2 (ja) | 1983-11-28 |
Family
ID=29352151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11996079U Expired JPS5852061Y2 (ja) | 1979-08-30 | 1979-08-30 | 不織布製研摩材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5852061Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2547035B2 (ja) * | 1987-07-31 | 1996-10-23 | 東京エレクトロン 株式会社 | プラズマ処理装置 |
-
1979
- 1979-08-30 JP JP11996079U patent/JPS5852061Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5638766U (enExample) | 1981-04-11 |
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