JPS5638766U - - Google Patents
Info
- Publication number
- JPS5638766U JPS5638766U JP11996079U JP11996079U JPS5638766U JP S5638766 U JPS5638766 U JP S5638766U JP 11996079 U JP11996079 U JP 11996079U JP 11996079 U JP11996079 U JP 11996079U JP S5638766 U JPS5638766 U JP S5638766U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11996079U JPS5852061Y2 (ja) | 1979-08-30 | 1979-08-30 | 不織布製研摩材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11996079U JPS5852061Y2 (ja) | 1979-08-30 | 1979-08-30 | 不織布製研摩材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5638766U true JPS5638766U (enExample) | 1981-04-11 |
| JPS5852061Y2 JPS5852061Y2 (ja) | 1983-11-28 |
Family
ID=29352151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11996079U Expired JPS5852061Y2 (ja) | 1979-08-30 | 1979-08-30 | 不織布製研摩材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5852061Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6437018A (en) * | 1987-07-31 | 1989-02-07 | Tokyo Electron Ltd | Plasma processor |
-
1979
- 1979-08-30 JP JP11996079U patent/JPS5852061Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6437018A (en) * | 1987-07-31 | 1989-02-07 | Tokyo Electron Ltd | Plasma processor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5852061Y2 (ja) | 1983-11-28 |