JPS6437018A - Plasma processor - Google Patents
Plasma processorInfo
- Publication number
- JPS6437018A JPS6437018A JP19321687A JP19321687A JPS6437018A JP S6437018 A JPS6437018 A JP S6437018A JP 19321687 A JP19321687 A JP 19321687A JP 19321687 A JP19321687 A JP 19321687A JP S6437018 A JPS6437018 A JP S6437018A
- Authority
- JP
- Japan
- Prior art keywords
- electrode sheets
- grooves
- processed
- substrates
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To facilitate the installation and removal as well as the assembly and disassembly of substrates to be processed and electrode sheets by a method wherein grooves are cut at every specified intervals in an insulating holder with feeders built in the holder to be partly exposed while multiple plasma producing electrode sheets holding substrates to be processed are arranged to be connected to respective grooves. CONSTITUTION:Grooves 17a, 17b are cut at every specified intervals in an insulating holder 13 with feeder 12 built in the holder to be partly exposed. Multiple plasma producing electrode sheets 7 holding substrates to be processed are arranged to be connected to respective grooves 17a, 17b. Through these procedures, the substrates 2 to be processed and the electrode sheets 7 can be easily installed and removed as well as assembled and disassembled while any defective contact failure can be avoided due to the direct connection of electrode sheets 7 to the grooves 17a, 17b with the feeders 12 in the exposed state.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62193216A JP2547035B2 (en) | 1987-07-31 | 1987-07-31 | Plasma processing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62193216A JP2547035B2 (en) | 1987-07-31 | 1987-07-31 | Plasma processing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6437018A true JPS6437018A (en) | 1989-02-07 |
JP2547035B2 JP2547035B2 (en) | 1996-10-23 |
Family
ID=16304238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62193216A Expired - Lifetime JP2547035B2 (en) | 1987-07-31 | 1987-07-31 | Plasma processing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2547035B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007223277A (en) * | 2006-02-27 | 2007-09-06 | Seiko Epson Corp | Fixture for surface treatment, method of surface treatment, method for manufacturing liquid ejection head, and method for manufacturing liquid droplet ejection apparatus |
JP2014118631A (en) * | 2012-12-19 | 2014-06-30 | Kaneka Corp | Substrate holder and method of manufacturing solar cell substrate |
CN109082649A (en) * | 2018-09-06 | 2018-12-25 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of loading device of stable plated film |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5638766U (en) * | 1979-08-30 | 1981-04-11 |
-
1987
- 1987-07-31 JP JP62193216A patent/JP2547035B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5638766U (en) * | 1979-08-30 | 1981-04-11 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007223277A (en) * | 2006-02-27 | 2007-09-06 | Seiko Epson Corp | Fixture for surface treatment, method of surface treatment, method for manufacturing liquid ejection head, and method for manufacturing liquid droplet ejection apparatus |
JP2014118631A (en) * | 2012-12-19 | 2014-06-30 | Kaneka Corp | Substrate holder and method of manufacturing solar cell substrate |
CN109082649A (en) * | 2018-09-06 | 2018-12-25 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of loading device of stable plated film |
Also Published As
Publication number | Publication date |
---|---|
JP2547035B2 (en) | 1996-10-23 |
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