JPS5851878U - レ−ザによる穴明け加工装置 - Google Patents

レ−ザによる穴明け加工装置

Info

Publication number
JPS5851878U
JPS5851878U JP1981148028U JP14802881U JPS5851878U JP S5851878 U JPS5851878 U JP S5851878U JP 1981148028 U JP1981148028 U JP 1981148028U JP 14802881 U JP14802881 U JP 14802881U JP S5851878 U JPS5851878 U JP S5851878U
Authority
JP
Japan
Prior art keywords
laser
section
laser beam
gas
drilling equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1981148028U
Other languages
English (en)
Japanese (ja)
Other versions
JPS628951Y2 (enExample
Inventor
憲 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1981148028U priority Critical patent/JPS5851878U/ja
Publication of JPS5851878U publication Critical patent/JPS5851878U/ja
Application granted granted Critical
Publication of JPS628951Y2 publication Critical patent/JPS628951Y2/ja
Granted legal-status Critical Current

Links

JP1981148028U 1981-10-05 1981-10-05 レ−ザによる穴明け加工装置 Granted JPS5851878U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981148028U JPS5851878U (ja) 1981-10-05 1981-10-05 レ−ザによる穴明け加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981148028U JPS5851878U (ja) 1981-10-05 1981-10-05 レ−ザによる穴明け加工装置

Publications (2)

Publication Number Publication Date
JPS5851878U true JPS5851878U (ja) 1983-04-08
JPS628951Y2 JPS628951Y2 (enExample) 1987-03-02

Family

ID=29940855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981148028U Granted JPS5851878U (ja) 1981-10-05 1981-10-05 レ−ザによる穴明け加工装置

Country Status (1)

Country Link
JP (1) JPS5851878U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001269793A (ja) * 2000-03-27 2001-10-02 Ricoh Microelectronics Co Ltd レーザ加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS518558U (enExample) * 1974-07-06 1976-01-22
JPS5148836A (ja) * 1974-10-23 1976-04-27 Yoshihiko Nakamura Baanaanonenshojoseihoho narabini sonosochi

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS518558U (enExample) * 1974-07-06 1976-01-22
JPS5148836A (ja) * 1974-10-23 1976-04-27 Yoshihiko Nakamura Baanaanonenshojoseihoho narabini sonosochi

Also Published As

Publication number Publication date
JPS628951Y2 (enExample) 1987-03-02

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