JPS584923Y2 - 横型スパッタリング装置 - Google Patents

横型スパッタリング装置

Info

Publication number
JPS584923Y2
JPS584923Y2 JP1979052130U JP5213079U JPS584923Y2 JP S584923 Y2 JPS584923 Y2 JP S584923Y2 JP 1979052130 U JP1979052130 U JP 1979052130U JP 5213079 U JP5213079 U JP 5213079U JP S584923 Y2 JPS584923 Y2 JP S584923Y2
Authority
JP
Japan
Prior art keywords
cathode
bellows
pipe
anode
horizontal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979052130U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55155866U (OSRAM
Inventor
伊藤嘉規
Original Assignee
株式会社 徳田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 徳田製作所 filed Critical 株式会社 徳田製作所
Priority to JP1979052130U priority Critical patent/JPS584923Y2/ja
Publication of JPS55155866U publication Critical patent/JPS55155866U/ja
Application granted granted Critical
Publication of JPS584923Y2 publication Critical patent/JPS584923Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1979052130U 1979-04-20 1979-04-20 横型スパッタリング装置 Expired JPS584923Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979052130U JPS584923Y2 (ja) 1979-04-20 1979-04-20 横型スパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979052130U JPS584923Y2 (ja) 1979-04-20 1979-04-20 横型スパッタリング装置

Publications (2)

Publication Number Publication Date
JPS55155866U JPS55155866U (OSRAM) 1980-11-10
JPS584923Y2 true JPS584923Y2 (ja) 1983-01-27

Family

ID=29288494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979052130U Expired JPS584923Y2 (ja) 1979-04-20 1979-04-20 横型スパッタリング装置

Country Status (1)

Country Link
JP (1) JPS584923Y2 (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295581A (en) * 1976-02-09 1977-08-11 Anelva Corp Sputiering apparatus
NL7607473A (nl) * 1976-07-07 1978-01-10 Philips Nv Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting.

Also Published As

Publication number Publication date
JPS55155866U (OSRAM) 1980-11-10

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