JPS5848990U - Differential pressure exhaust mechanism of vacuum equipment - Google Patents
Differential pressure exhaust mechanism of vacuum equipmentInfo
- Publication number
- JPS5848990U JPS5848990U JP14405981U JP14405981U JPS5848990U JP S5848990 U JPS5848990 U JP S5848990U JP 14405981 U JP14405981 U JP 14405981U JP 14405981 U JP14405981 U JP 14405981U JP S5848990 U JPS5848990 U JP S5848990U
- Authority
- JP
- Japan
- Prior art keywords
- differential pressure
- vacuum
- pressure exhaust
- diaphragm plate
- exhaust mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の動作原理を説明する概略図、第２図イ
１口は第１図の詳細図、第３図は本考案の他の実施例を
示す概略図である。
１・・・・５高真空側真空容器、２・・・・・・低真空
側真空容器、３−・・・・・・高真空側排気装置、４・
・・・・・低真空側排気装置、５・・・・・・スリット
、６・・・・・・絞り板、９−・・・・・・絞り板移り
機構。FIG. 1 is a schematic diagram for explaining the operating principle of the present invention, FIG. 2 is a detailed diagram of FIG. 1, and FIG. 3 is a schematic diagram showing another embodiment of the present invention. 1...5 high vacuum side vacuum container, 2...low vacuum side vacuum container, 3-...high vacuum side exhaust device, 4...
...low vacuum side exhaust device, 5... slit, 6... aperture plate, 9-... aperture plate transfer mechanism.
Claims (1)
続し、各真空排気装置の真空度を所定の圧力に保つよう
各真空排気装置を適当な圧力差を保って排気する差圧排
気機構において、前記、差圧排気口の開口部に接して、
開口部の面積を可変するための絞り板と、絞り板と開口
部周囲に真空的に密着するＯリングあるいはこれに類す
る部品と、絞り板を真空外から円滑に移動するための絞
り板送り機構を有することを特徴とする真空装置の差圧
排気機構。A differential pressure system in which multiple evacuation devices are connected in a vacuum manner through differential pressure exhaust ports, and each evacuation device is evacuated while maintaining an appropriate pressure difference to maintain the degree of vacuum in each evacuation device at a predetermined pressure. In the exhaust mechanism, in contact with the opening of the differential pressure exhaust port,
A diaphragm plate for varying the area of the aperture, an O-ring or similar part that vacuum-adheres to the diaphragm plate and the periphery of the aperture, and a diaphragm plate feeding mechanism to smoothly move the diaphragm plate from outside the vacuum. A differential pressure exhaust mechanism for a vacuum device, characterized by having the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14405981U JPS5848990U (en) | 1981-09-30 | 1981-09-30 | Differential pressure exhaust mechanism of vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14405981U JPS5848990U (en) | 1981-09-30 | 1981-09-30 | Differential pressure exhaust mechanism of vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5848990U true JPS5848990U (en) | 1983-04-02 |
Family
ID=29937026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14405981U Pending JPS5848990U (en) | 1981-09-30 | 1981-09-30 | Differential pressure exhaust mechanism of vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5848990U (en) |
-
1981
- 1981-09-30 JP JP14405981U patent/JPS5848990U/en active Pending
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