JPS58164229U - Film forming device - Google Patents

Film forming device

Info

Publication number
JPS58164229U
JPS58164229U JP5971282U JP5971282U JPS58164229U JP S58164229 U JPS58164229 U JP S58164229U JP 5971282 U JP5971282 U JP 5971282U JP 5971282 U JP5971282 U JP 5971282U JP S58164229 U JPS58164229 U JP S58164229U
Authority
JP
Japan
Prior art keywords
film forming
forming device
chamber
abstract
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5971282U
Other languages
Japanese (ja)
Inventor
義久 石田
金井　謙雄
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP5971282U priority Critical patent/JPS58164229U/en
Publication of JPS58164229U publication Critical patent/JPS58164229U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は、本考案による膜形成袋−の一実施例を示す縦断
面図である。 １０・・・・・・真空室、１１・・・・・・膜形成室、
１２・・・・・・　　　　−排気室、２５・・・・・・
邪魔板。The drawing is a longitudinal sectional view showing an embodiment of the membrane-forming bag according to the present invention. 10... Vacuum chamber, 11... Film forming chamber,
12... - Exhaust chamber, 25...
baffle board.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空室が膜形成室と排気室とからなる膜形成装置におい
て、前記膜形成室と前記排気室との間で前記真空室に邪
魔板を内設したことを特徴とする膜形成装置。A film forming apparatus having a vacuum chamber including a film forming chamber and an exhaust chamber, characterized in that a baffle plate is provided in the vacuum chamber between the film forming chamber and the exhaust chamber.
JP5971282U 1982-04-26 1982-04-26 Film forming device Pending JPS58164229U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5971282U JPS58164229U (en) 1982-04-26 1982-04-26 Film forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5971282U JPS58164229U (en) 1982-04-26 1982-04-26 Film forming device

Publications (1)

Publication Number Publication Date
JPS58164229U true JPS58164229U (en) 1983-11-01

Family

ID=30070006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5971282U Pending JPS58164229U (en) 1982-04-26 1982-04-26 Film forming device

Country Status (1)

Country Link
JP (1) JPS58164229U (en)

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