JPS5848484A - Sealed type carbon dioxide gas laser tube - Google Patents
Sealed type carbon dioxide gas laser tubeInfo
- Publication number
- JPS5848484A JPS5848484A JP14765981A JP14765981A JPS5848484A JP S5848484 A JPS5848484 A JP S5848484A JP 14765981 A JP14765981 A JP 14765981A JP 14765981 A JP14765981 A JP 14765981A JP S5848484 A JPS5848484 A JP S5848484A
- Authority
- JP
- Japan
- Prior art keywords
- platinum
- carbon dioxide
- laser tube
- cathode
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は封入型炭酸ガスレーザ管に関する。[Detailed description of the invention] The present invention relates to a sealed carbon dioxide laser tube.
従来、封入型炭酸ガスレーザ管の電極材料として、主と
して白金が用いられて来た。その理由は白金は非常に優
れた酸化触媒作用を示す″ため、白金を電極に用いるこ
とにより、放電によるレーザ管内の炭酸ガスの解離を抑
制することが可能となり、レーザ出力の向上が図れるか
らである。しかし、白金はスパッタリングを起こしやす
いという欠点を有している。従って、白金を陰極に用い
るとスパッタリングが激しく起こり、レーザー内壁にス
パッタリング生成物が多量に付着する。一般に、スパッ
タリング生成物はガスを吸着する性質を有しており、白
金のそれも例外ではない。特に炭酸2 、、。Conventionally, platinum has been mainly used as an electrode material for sealed carbon dioxide laser tubes. The reason for this is that platinum exhibits an extremely excellent oxidation catalytic effect, so by using platinum in the electrode, it is possible to suppress the dissociation of carbon dioxide gas in the laser tube due to discharge, and it is possible to improve the laser output. However, platinum has the disadvantage of being prone to sputtering. Therefore, when platinum is used as a cathode, sputtering occurs violently, and a large amount of sputtering products adheres to the inner wall of the laser. Generally, sputtering products are Platinum is no exception, especially carbonic acid 2.
ガスは、炭酸ガスレーザに通常使用される他のガス、即
ち、窒素ガス、ヘリウムガスと比較して、著しくスパッ
タリング生成物に吸着されやすいという性質を有してい
るため、白金を陰極に用いた場合、封入型炭酸ガスレー
ザ管の長寿命化を図ることは非常に困難であった。なお
陽極ではスノ(ツタリングは起こらないので、白金を陽
極に用いても上述した問題は生じない。Compared to other gases commonly used in carbon dioxide lasers, such as nitrogen gas and helium gas, the gas has the property of being adsorbed by sputtering products much more easily, so when platinum is used as the cathode, However, it has been extremely difficult to extend the life of sealed carbon dioxide laser tubes. Incidentally, since splattering does not occur at the anode, the above-mentioned problem does not occur even if platinum is used for the anode.
次に従来例を図面に基いて説明する。Next, a conventional example will be explained based on the drawings.
第1の従来例としてはレーザ管は第1図に示した様に、
冷却部3を有するガラス製の二重構造になっており、放
電部2は内径10■の円筒管で、両端はジンクセレナイ
ド(ZnSe)製の光学窓1によって封止されている。As the first conventional example, the laser tube is as shown in Figure 1.
It has a double structure made of glass and has a cooling section 3. The discharge section 2 is a cylindrical tube with an inner diameter of 10 cm, and both ends are sealed with optical windows 1 made of zinc selenide (ZnSe).
陽極4は直径2−の白金製円柱電極である。陰極6は外
径1ofiの白金製円筒電極で肉厚は0.11IIII
+であり、有効放電長は400瓢である。′このレーザ
管に、混合比が11%Co2゜20%N2? a e
fa Heで全圧30Toxrノ混杏ガスを封入した後
、ミラー間隔600m+aのレーザ共振器に設置し、冷
却部3を水道水で冷却しつつ、直流20 mAの放電電
流でレーザ発振させた。その時の動作時間対レーザ出力
特性は第2図に破線aで示したが、初期レーザ出力は1
6W、出力が初期値の%に減衰する時間は110時間で
あった。The anode 4 is a cylindrical platinum electrode with a diameter of 2. The cathode 6 is a platinum cylindrical electrode with an outer diameter of 1ofi and a wall thickness of 0.11III.
+, and the effective discharge length is 400 gourds. 'In this laser tube, the mixing ratio is 11%Co2°20%N2? a e
After enclosing a mixed gas with fa He at a total pressure of 30 Toxr, it was installed in a laser resonator with mirror spacing of 600 m+a, and while the cooling part 3 was cooled with tap water, laser oscillation was performed with a discharge current of 20 mA DC. The operating time vs. laser output characteristic at that time is shown by the broken line a in Figure 2, and the initial laser output is 1
6W, and the time for the output to decay to % of the initial value was 110 hours.
第2の従来例として陽極4にニッケル製円柱電極、陰極
6にニッケル製円筒電極を使用した以外は従来例1と全
く同じ条件でレニザ発振を行った。As a second conventional example, lensizer oscillation was performed under exactly the same conditions as in the conventional example 1, except that a nickel cylindrical electrode was used as the anode 4 and a nickel cylindrical electrode was used as the cathode 6.
その時の動作時間対レーザ出力特性は第2図に破線すで
示したが、初期レーザ出力は3W、出力が初期値のHに
減衰する時・間は3,290時間であった。The operating time vs. laser output characteristics at that time are already shown in broken lines in FIG. 2, and the initial laser output was 3 W, and the time for the output to decay to the initial value of H was 3,290 hours.
2・°以上の・様に、電極に白金を用いた場合にはレー
ザ出力は高いが寿命が短いという欠点を有しており、ま
た、電極にスパッタリングに強いニッケルを用いた場合
には寿命は長いが、ニッケルは酸化触媒能力を有してい
ないためレーザ出力が低いという欠点を有していた。、
2 、
本発明はこの様な点に鑑みてなされたものでありレーザ
出力が高ぐ、且つ、・長寿命の封入型炭酸ガスレーザ管
を提供するものである。2.° or more, when platinum is used for the electrode, the laser output is high, but the life is short, and when the electrode is made of nickel, which is resistant to sputtering, the life is short. However, since nickel does not have oxidation catalytic ability, it has the disadvantage of low laser output. ,
2. The present invention has been made in view of these points, and provides an enclosed carbon dioxide laser tube with high laser output and long life.
本発明の封入型炭酸ガスレーザ管は陰極に白金−ニッケ
ル合金を用いたことを特徴とする。即ち、本発明者は白
金にスパッタリングに強いニッケルを添加することによ
り、白金の酸化触媒作用を著しく損うことなく、スパッ
タリングをかなりの程度迄抑制できることを確認した。The enclosed carbon dioxide laser tube of the present invention is characterized in that a platinum-nickel alloy is used for the cathode. That is, the present inventors have confirmed that by adding nickel, which is resistant to sputtering, to platinum, sputtering can be suppressed to a considerable extent without significantly impairing the oxidation catalytic action of platinum.
そこで、白金−ニッケル合金を封入型炭酸ガスレーザ管
の陰極に用いた結果、白金を陰極に用いた場合と比較し
てレーザ出力はある程度低下するが、封入型炭酸ガスレ
ーザ管の長寿命化が可能となった。なお、レーザ出力お
よび封入型炭酸ガスレーザ管の寿命はニッケルの添加量
に依存し、それぞれは相反する事項であるので、目的に
応じてニッケルの添加量を選択すれば良い。又、電極形
状は、通常、円筒状電極が、用いられるが、円柱状ある
いはその他の形状においても、本発明の効果は何ら損わ
れない。Therefore, as a result of using a platinum-nickel alloy for the cathode of an encapsulated carbon dioxide laser tube, although the laser output is reduced to some extent compared to when platinum is used for the cathode, it is possible to extend the life of the encapsulated carbon dioxide laser tube. became. Note that the laser output and the life of the sealed carbon dioxide laser tube depend on the amount of nickel added, and since these are contradictory matters, the amount of nickel added may be selected depending on the purpose. Further, although a cylindrical electrode shape is normally used, the effects of the present invention will not be impaired in any way even if the electrode shape is cylindrical or other shapes.
次に本発明による実施例を図面に基いて説明する。
)・
〈実施例1〉
第1図における陰極4にNiPt3(三白金・ニラ6ベ
ーミ′
ケル合金)製内筒電極を使用した以外は従来例1と全く
同じ条件でレーザ発振を行った。その時の動作時間対−
レーザ出力特性は第2図に実線Aで示したが、初期レー
ザ出力は16W、出力が初期値の%に減衰する時r5は
420時間であ?た。従来例1と比較して出力は約6%
減、少したが、寿命は約4信仰びている。Next, embodiments according to the present invention will be described based on the drawings.
)・<Example 1> Laser oscillation was carried out under exactly the same conditions as in Conventional Example 1, except that an inner cylindrical electrode made of NiPt3 (triplatinum-Nila-6-Beh-Mickel alloy) was used as the cathode 4 in FIG. Operating time at that time -
The laser output characteristics are shown by the solid line A in Figure 2.The initial laser output is 16W, and when the output decays to % of the initial value, r5 is 420 hours. Ta. Output is approximately 6% compared to conventional example 1
Although it has decreased slightly, life expectancy has increased by about 4 years.
〈実施例2〉
陰極4にNiPt製円筒電極を使用した以外は従来例1
と全く同じ条件でレーザ発振を行った。その時の動作時
間対レーザ出力特性は第2図に実線Bで示したが、初期
レーザ出力は13W、出力が初期値の%に減衰する時間
は1,770時間であった。従来例1と比較して出力は
約19チ減少したが、寿命は約16信仰びている。<Example 2> Conventional example 1 except that a NiPt cylindrical electrode was used for the cathode 4
Laser oscillation was performed under exactly the same conditions. The operating time vs. laser output characteristic at that time is shown by the solid line B in FIG. 2, where the initial laser output was 13 W and the time it took for the output to decay to % of the initial value was 1,770 hours. Compared to Conventional Example 1, the output decreased by about 19 inches, but the life span increased by about 16 inches.
〈実施例3〉 。<Example 3>
陰極4にN 13P を製内筒電極を使用した以外は従
来例1と全く同じ条件でレーザ発振を行った。その時の
動作時間対レーザ出力特性は第2図に実線Cで示したが
、初期レーザ出力は1oe、出力が初期値の%に減衰す
る時間は2,820時間であった。従来例1と比較して
出力は約38チ減少したが、寿命は約26信仰びている
。又、従来例2と比較して寿命は約14%減少したが、
出力は約3倍向上している。Laser oscillation was performed under exactly the same conditions as in Conventional Example 1, except that an inner cylindrical electrode made of N 13P was used for the cathode 4. The operating time vs. laser output characteristic at that time is shown by solid line C in FIG. 2, where the initial laser output was 1 oe and the time for the output to decay to % of the initial value was 2,820 hours. Compared to Conventional Example 1, the output was reduced by about 38 cm, but the life span was increased by about 26 cm. Also, compared to conventional example 2, the life span was reduced by about 14%, but
Output has improved by about 3 times.
以上述べた様に、本発明は陰極材料として白金−ニッケ
ル合金を用いることによりレーザ出力が高く、且つ、長
寿命の封入型炭酸ガス、レーザ管を提供するものであり
、その工業的価値は極めて大なるものである。
。As described above, the present invention provides a carbon dioxide sealed laser tube with high laser output and long life by using a platinum-nickel alloy as the cathode material, and its industrial value is extremely high. It is a big thing.
.
第1図は封入型炭酸ガスレーザ管を示す側面図、第2図
は本発〜明および従来の封入型炭酸ガスレーザ管の動作
時間対レーザ出力特性を示す図である。
1・・・・・・光学窓、2・・・・・・放電部、3・・
・・・・冷却部、4・・・・・・陽極、6・・・・・・
陰極。FIG. 1 is a side view showing a sealed carbon dioxide laser tube, and FIG. 2 is a diagram showing operating time versus laser output characteristics of the present invention and a conventional sealed carbon dioxide laser tube. 1...Optical window, 2...Discharge section, 3...
...Cooling section, 4...Anode, 6...
cathode.
Claims (1)
型炭酸ガスレーザ管。An encapsulated carbon dioxide laser tube characterized by using a platinum-nickel alloy for the cathode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14765981A JPS5848484A (en) | 1981-09-17 | 1981-09-17 | Sealed type carbon dioxide gas laser tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14765981A JPS5848484A (en) | 1981-09-17 | 1981-09-17 | Sealed type carbon dioxide gas laser tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5848484A true JPS5848484A (en) | 1983-03-22 |
Family
ID=15435355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14765981A Pending JPS5848484A (en) | 1981-09-17 | 1981-09-17 | Sealed type carbon dioxide gas laser tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5848484A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01286473A (en) * | 1988-05-13 | 1989-11-17 | Amada Co Ltd | Gas laser oscillator |
EP0464841A2 (en) * | 1990-07-06 | 1992-01-08 | Mitsubishi Denki Kabushiki Kaisha | Excimer laser device |
US6474895B2 (en) | 1998-11-27 | 2002-11-05 | Hics Corporation | Writing instrument and method of producing the same |
-
1981
- 1981-09-17 JP JP14765981A patent/JPS5848484A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01286473A (en) * | 1988-05-13 | 1989-11-17 | Amada Co Ltd | Gas laser oscillator |
EP0464841A2 (en) * | 1990-07-06 | 1992-01-08 | Mitsubishi Denki Kabushiki Kaisha | Excimer laser device |
US5187716A (en) * | 1990-07-06 | 1993-02-16 | Mitsubishi Denki Kabushiki Kaisha | Excimer laser device |
US6474895B2 (en) | 1998-11-27 | 2002-11-05 | Hics Corporation | Writing instrument and method of producing the same |
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