JPS5847273A - Method and device for measurement by high frequency - Google Patents

Abstract

PURPOSE:To perform measurement efficiently with improved reliability by measuring an object to be measured in two states, erected and inverted states, by a constitution wherein the object is held by a self-aligning holding device with insulation members arranged therein and the holding device is inverted. CONSTITUTION:A holding element 10 holding an object to be measured consists of holding plates 11 arranged opposite to each other and of insulation members 12 and 13 arranged so as to insulate the holding plates 11 electrically from other parts, and an opening lever 14 controlling the opening of the holding plates 11 by shaking is connected thereto through the intermediary of a power transmission mechanism, whereby a holding unit 15 is constituted. The holding unit 15 is connected to an inverting unit 20 containing an inversion rod 22 and a positioning cam 21, and when the holding element is inverted at an angle of 180 deg., a steel ball 24 enters one of grooves 23 provided at two opposite places of the positioning cam 21, and thereby the holding element is positioned. Since the object to be measured can be inverted for measurement while it is held by the holding unit 15, the measurement thereof can be made efficient and the reliability of the measurement can be improved.

Description

[Detailed description of the invention] The present invention relates to a high frequency measurement method and apparatus.

When performing high frequency measurements on products that process high frequencies of several tens of MHz, such as surface acoustic wave filters, the process is usually done manually by workers. The reason for processing in this way is that foot measurements in a high frequency range are generally sensitive to electrical disturbances, and it is difficult to obtain the true value of the measurement unless the influence can be removed. For example, if there is a conductor near the object to be measured, the measured value will change due to the induction of the conductor. Further, unless the distance from the disclosure contact in contact with the object to be measured to the amplifier is configured to minimize changes in capacitance, the true value cannot be obtained. For these reasons, it has been difficult to obtain a good measuring device that can efficiently measure high frequencies.

However, there are various devices used in the high frequency range to measure the various characteristics of products such as those mentioned above, and when measuring the various characteristics with these measuring devices, the object to be measured is held in place and the various characteristics are measured. However, when it comes to the high-frequency measurement process after measuring various characteristics, the object to be measured is removed from the clamping part, transported to an area with little induction and capacitance change, and high-frequency measurements are performed there. The method used was to return it to its original holding area. In this way, it was extremely inefficient.

Furthermore, when measuring a product, for example, a product as shown in Figure 1, high-frequency measurement of the entire product is performed when the object to be measured (1) is either in a captive state (BJ state) or in one of the following states. (2) in the figure is a lead. Therefore, if fine particles such as lint remain inside the object to be measured, for example in the state (4) above, it is necessary to Even if the characteristics measurement result is good because the fine particles are not attached to the chip part pattern,
When the product reaches the condition (B) during transportation after shipping or when it is attached to a device, fine particles inside the tube may adhere to the inner material of the tube, resulting in a defect.

As described above, conventional high frequency measurements have various drawbacks, making it difficult to perform high frequency measurements appropriately and efficiently.

The present invention has been made in consideration of this point, and is an object of the present invention to efficiently measure the object to be measured by attaching it to a measuring device and improving the reliability of the automatic ζ trowel when performing high-frequency measurements on the object to be measured. The purpose of the present invention is to provide a high frequency measurement method and device that can perform the same.

In other words, the measurement device measures the object in two states, upright and inverted, and the measuring device is capable of easily measuring the object in the upright and inverted states without removing or attaching the object. shall be. Here, the erect and inverted states refer to, for example, the AJ state and the inverted state shown in FIG.

Examples of the present invention will be described below with reference to the N-side.

The measuring device of the present invention is shown in FIGS. 2 to 4. The clamping part q1 that clamps the object to be measured is arranged so as to electrically insulate the clamping plates (11) and the clamping blades arranged to face each other from other parts of the measuring device. Insulating member (121, 0
31, and an opening/closing lever 01 that controls the opening/closing amount of the clamping plate (11) by swinging is connected via a power transmission mechanism (details will be described later), and is connected to a self-aligning clamping device (holder) for the object to be measured. is formed.

A reversing device @ that inverts this clamping device, that is, rotates the clamping part that clamps the object to be measured (1) 180 degrees to the position (B) indicated by the dotted line in the figure as shown in FIG. ]. This reversing device■
is a reversing rod C having one end connected to the clamping device and a positioning cam (!1) at the other end, and the positioning cam 011 has a groove (2) into which a reversing device driver (not shown) is fitted. :1 is provided at two locations in the 180 degree direction.

High-frequency measurements of an object to be measured can be performed using such a measuring device as follows.

To open and close the clamping plates in order to sandwich the object to be measured between the clamping plates, an opening/closing lever (1 force is transmitted to the clamping plate 011, that is, opening/closing lever f14), a drive rod 0
6), opening/closing arm α force, clamping plate support arm (181, clamping plate 0) is performed, opening/closing lever 0 is at the dotted line position (1) shown in the figure.
45t, the drive rod tte connected to this opening/closing lever rotates, and the opening/closing arm 071 fixed to this driving rod (161) rotates as shown by the dotted line. Move to widen the gap, clamping plate 0]
J is opened as shown by the dotted line in the figure, the object to be measured is inserted, and then the object to be measured is firmly clamped by a pair of opposing clamping plates by the reverse operation. High frequency measurements of the object to be measured held in this manner are performed.

The opening/closing arm 07) has precisely machined grooves (11) at both ends, into which the pin C30 is inserted, and the gap between the pin and the groove is extremely small.
Moreover, the center of the pin and the center of the drive rod are always arranged in a straight line. For this reason, a self-centering effect is obtained, and even if the outer diameter of the object to be measured changes slightly, the center can always be obtained and the object can be held with high position accuracy.

In the past, when making high-frequency measurements, the leads of the object under test (
2) and the measuring contact (not shown) are in a fixed position, and as described above, an insulating member consisting of an insulating spacer (1) and a P3 edge sleeve (13) is provided in the clamping part. With C・'), measurements can be taken while attached to the device, and stable disclosure values can always be obtained.

Next, the clamping portion is reversed 180 degrees using a reversing device. The positioning cam 12 provided at the other end of the reversing rod (221)
11 is provided with two positioning grooves C23) in a 180 degree direction, and when the driver of the reversing device enters the groove of the positioning cam and rotates, the object to be measured connected to one end of the reversing rod (221) is clamped. The holding device 0 is inverted while holding the object to be measured, and is inverted to the position indicated by the dotted line (BJ) in the figure.

Accuracy after the 180 degree inversion is ensured by inserting the steel ball C1 into the positioning groove provided on the outer surface of the positioning cam (211). ) applies force to the outer surface of the positioning cam COD, and when the positioning cam COD is reversed, a compression spring acts from the positioning groove and the steel ball comes off. !The gap between the outer diameters of the force affects the accuracy of the rotating direction of the clamping device, so it is necessary to keep it to a minimum.

After the object to be measured is held in the holding portion and turned over 180 degrees, high-frequency measurement is performed in the same manner as described above. Therefore, if there is dust or small pieces of parts attached to the lid inside the object to be measured, as described above, the measurement is carried out in two positions: upright and inverted. Compared to measuring only one state, the selection of pass/fail is much improved, and it is no longer judged as a good product when it is a defective product.In addition, since an insulating member is installed, High-frequency measurements can be made while the device is held in place, allowing more carefully selected products to be sorted out efficiently.

In addition, during mass production, a large number of measuring devices are arranged, and the measurement is performed by holding the object to be measured in each one. In this case, the opening of the clamping plates of each device must be uniform. Must be. In other words, the distance between the object to be measured and the clamping plate must be one foot. The reason for this is that in the case of a directional object as mentioned above, the clamping plate is slightly opened and the object is rotated to determine the foot position, and after positioning, the clamping plate is closed and the position is fixed. It belongs to If these openings vary, measurements during mass production cannot be carried out efficiently. Therefore, in the present invention, the conventionally time-consuming and labor-intensive adjustment by finely adjusting the opening/closing lever 041 of Al1 is simplified and performed with accuracy as follows.

In other words, the pol used for cam floor-c31) u'
A is arranged as an eccentric bolt. As a result, the amount of opening of the clamping plate can be kept constant for all the openings with high precision, resulting in an opening/closing amount fine adjustment device that can simplify the work.

The clamping plate (ill) and the clamping plate support arm 08c can be slid by the slide ball o3 and its guide rails c'+t+ and os.

As mentioned above, by performing high-frequency measurements on the object to be measured using the measuring device of the present invention, it is possible to measure the object while it is held in the measuring device, and it is also possible to perform measurements while inverting the object at the same time, improving efficiency and increasing productivity compared to conventional methods. This improves quality and allows the selection of overlooked defective products, making it possible to supply carefully selected and highly reliable products.

As shown in Fig. 2, the clamping plates installed in the clamping section that clamps the object to be measured are provided with triangular notches ((2)) facing each other so that the object to be measured can be held well. is provided, but this angle is preferably approximately 120 degrees.

[Brief explanation of drawings]

Figure 1 (Bl) is a front view of the object to be measured by high frequency measurement, Figure 2 is a plan view of an embodiment of the device of the present invention, Figure 3 is a side view, and Figure 4 is a reversing device. It is an enlarged explanatory view of the parts. 1. Object to be measured, 2. - Lead, Friend... Holding part.
11. Holding plate, 12, 13. Insulating member, 14.
・・Opening/closing lever, ・・・Self-aligning clamp device, ・・Reversing device, 21・・Positioning cam, 16・・Drive rod, 1
7...Opening/closing arm, 18...-Holding plate support arm, 22...Reversing rod, 31...Cam floor-132...-Bolt, 3
6... Notch in the clamping board. Agent: Patent Attorney Inoue - Male Procedural Amendment (spontaneous) Date: Month, Showa, Director General of the Patent Office Shima 1) Haruki Tono 1, Indication of Case Patent Application No. 144627 of 1982. 2. Name of the invention: High-frequency measurement method and its device 3. Relationship with the person making the amendment Patent applicant (307) Tokyo Shibaura Electric Co., Ltd. 4, Agent 4-41-11 Kamata, Ota-ku, Tokyo 144 Japan -Tsunoda Building Benjo Patent Office 5, drawing subject to amendment 6, content of amendment drawings 2, 3 and 4 are amended as shown in the attached sheet. that's all

Claims (3)

[Claims] (1) The step of performing high frequency measurement by holding the object to be measured in a holding device provided with an insulating member, and reversing the holding device while holding the object to be measured in the holding device, and then repeating the high frequency measurement again. A high frequency measurement method characterized by comprising a step of performing high frequency measurement. (2) A self-aligning clamping device that fixes the object to be measured at high frequency using the clamping portion, an insulating member disposed on the clamping device to electrically insulate the clamping portion, and a clamping portion of the clamping device. A high frequency measurement device comprising: an adjustment device for finely adjusting the opening/closing amount; and a reversing device for reversing the clamping device. (3) Clamping plates are arranged opposite to each other in the clamping parts that fix the object to be measured, and the angle of the triangular notch formed in the part of the clamping plate that clamps the object to be measured is approximately 120 degrees. A high frequency measuring device according to claim 2, characterized in that: