JPS5846845B2 - 固体拡散法およびド−プ用組成物 - Google Patents
固体拡散法およびド−プ用組成物Info
- Publication number
- JPS5846845B2 JPS5846845B2 JP48059432A JP5943273A JPS5846845B2 JP S5846845 B2 JPS5846845 B2 JP S5846845B2 JP 48059432 A JP48059432 A JP 48059432A JP 5943273 A JP5943273 A JP 5943273A JP S5846845 B2 JPS5846845 B2 JP S5846845B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- solution
- atoms
- solvent
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00258173A US3837873A (en) | 1972-05-31 | 1972-05-31 | Compositions for use in forming a doped oxide film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4944667A JPS4944667A (no) | 1974-04-26 |
JPS5846845B2 true JPS5846845B2 (ja) | 1983-10-19 |
Family
ID=22979414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48059432A Expired JPS5846845B2 (ja) | 1972-05-31 | 1973-05-29 | 固体拡散法およびド−プ用組成物 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5846845B2 (no) |
CS (1) | CS172390B2 (no) |
DD (1) | DD103819A5 (no) |
HU (1) | HU165458B (no) |
PL (1) | PL87113B1 (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0628171Y2 (ja) * | 1988-07-26 | 1994-08-03 | 株式会社ナブコ | 圧縮空気乾燥装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE429064B (sv) * | 1976-04-02 | 1983-08-08 | Bofors Ab | Slutfaskorrigering av roterande projektil |
JPS5671933A (en) * | 1979-11-19 | 1981-06-15 | Toshiba Corp | Impurity diffusion to semiconductor substrate |
-
1973
- 1973-05-24 CS CS377273A patent/CS172390B2/cs unknown
- 1973-05-29 JP JP48059432A patent/JPS5846845B2/ja not_active Expired
- 1973-05-30 DD DD17120373A patent/DD103819A5/xx unknown
- 1973-05-30 HU HUTE000718 patent/HU165458B/hu unknown
- 1973-05-31 PL PL16298873A patent/PL87113B1/pl unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0628171Y2 (ja) * | 1988-07-26 | 1994-08-03 | 株式会社ナブコ | 圧縮空気乾燥装置 |
Also Published As
Publication number | Publication date |
---|---|
CS172390B2 (no) | 1976-12-29 |
JPS4944667A (no) | 1974-04-26 |
PL87113B1 (no) | 1976-06-30 |
HU165458B (no) | 1974-08-28 |
DD103819A5 (no) | 1974-02-12 |
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