JPS5846542A - 電界放出型液体金属アルミニウムイオン銃及びその製造方法 - Google Patents

電界放出型液体金属アルミニウムイオン銃及びその製造方法

Info

Publication number
JPS5846542A
JPS5846542A JP56142529A JP14252981A JPS5846542A JP S5846542 A JPS5846542 A JP S5846542A JP 56142529 A JP56142529 A JP 56142529A JP 14252981 A JP14252981 A JP 14252981A JP S5846542 A JPS5846542 A JP S5846542A
Authority
JP
Japan
Prior art keywords
emitter
boride
ion gun
needle
liquid metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56142529A
Other languages
English (en)
Japanese (ja)
Other versions
JPH026184B2 (cg-RX-API-DMAC7.html
Inventor
Yasuhiro Torii
鳥居　康弘
Hiroshi Yamada
宏 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56142529A priority Critical patent/JPS5846542A/ja
Publication of JPS5846542A publication Critical patent/JPS5846542A/ja
Publication of JPH026184B2 publication Critical patent/JPH026184B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56142529A 1981-09-11 1981-09-11 電界放出型液体金属アルミニウムイオン銃及びその製造方法 Granted JPS5846542A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56142529A JPS5846542A (ja) 1981-09-11 1981-09-11 電界放出型液体金属アルミニウムイオン銃及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56142529A JPS5846542A (ja) 1981-09-11 1981-09-11 電界放出型液体金属アルミニウムイオン銃及びその製造方法

Publications (2)

Publication Number Publication Date
JPS5846542A true JPS5846542A (ja) 1983-03-18
JPH026184B2 JPH026184B2 (cg-RX-API-DMAC7.html) 1990-02-07

Family

ID=15317473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56142529A Granted JPS5846542A (ja) 1981-09-11 1981-09-11 電界放出型液体金属アルミニウムイオン銃及びその製造方法

Country Status (1)

Country Link
JP (1) JPS5846542A (cg-RX-API-DMAC7.html)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059623A (ja) * 1983-09-10 1985-04-06 Anelva Corp 液体金属イオン源
JPS60155647A (ja) * 1984-01-24 1985-08-15 Riken Corp ピストンリング
JPS61237328A (ja) * 1985-04-11 1986-10-22 Denki Kagaku Kogyo Kk 液体硼素含有合金イオン源構造体
JPS6383264A (ja) * 1986-09-26 1988-04-13 Anelva Corp 液体金属イオン源
JPH03233826A (ja) * 1989-10-25 1991-10-17 Denki Kagaku Kogyo Kk 電界放出型イオン源
US6527879B2 (en) 1999-06-25 2003-03-04 Hitachi Metals Ltd. Self-lubricating piston ring material for internal combustion engine and piston ring
EP1622184A3 (en) * 2004-07-28 2007-07-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter for an ion source and method of producing same
JPWO2021015039A1 (cg-RX-API-DMAC7.html) * 2019-07-23 2021-01-28

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132632A (en) * 1981-02-09 1982-08-17 Hitachi Ltd Ion source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132632A (en) * 1981-02-09 1982-08-17 Hitachi Ltd Ion source

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059623A (ja) * 1983-09-10 1985-04-06 Anelva Corp 液体金属イオン源
JPS60155647A (ja) * 1984-01-24 1985-08-15 Riken Corp ピストンリング
JPS61237328A (ja) * 1985-04-11 1986-10-22 Denki Kagaku Kogyo Kk 液体硼素含有合金イオン源構造体
JPS6383264A (ja) * 1986-09-26 1988-04-13 Anelva Corp 液体金属イオン源
JPH03233826A (ja) * 1989-10-25 1991-10-17 Denki Kagaku Kogyo Kk 電界放出型イオン源
US6527879B2 (en) 1999-06-25 2003-03-04 Hitachi Metals Ltd. Self-lubricating piston ring material for internal combustion engine and piston ring
EP1622184A3 (en) * 2004-07-28 2007-07-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter for an ion source and method of producing same
US7696489B2 (en) 2005-07-27 2010-04-13 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter for an ion source and method of producing same
JPWO2021015039A1 (cg-RX-API-DMAC7.html) * 2019-07-23 2021-01-28
WO2021015039A1 (ja) * 2019-07-23 2021-01-28 株式会社Ｐａｒａｍ 電子銃装置
US11295925B2 (en) 2019-07-23 2022-04-05 Param Corporation Electron gun device

Also Published As

Publication number Publication date
JPH026184B2 (cg-RX-API-DMAC7.html) 1990-02-07

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