JPS5845363U - 蒸着装置 - Google Patents

蒸着装置

Info

Publication number
JPS5845363U
JPS5845363U JP13998181U JP13998181U JPS5845363U JP S5845363 U JPS5845363 U JP S5845363U JP 13998181 U JP13998181 U JP 13998181U JP 13998181 U JP13998181 U JP 13998181U JP S5845363 U JPS5845363 U JP S5845363U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition equipment
hearth
nose
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13998181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6120032Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
藤崎　博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP13998181U priority Critical patent/JPS5845363U/ja
Publication of JPS5845363U publication Critical patent/JPS5845363U/ja
Application granted granted Critical
Publication of JPS6120032Y2 publication Critical patent/JPS6120032Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13998181U 1981-09-21 1981-09-21 蒸着装置 Granted JPS5845363U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13998181U JPS5845363U (ja) 1981-09-21 1981-09-21 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13998181U JPS5845363U (ja) 1981-09-21 1981-09-21 蒸着装置

Publications (2)

Publication Number Publication Date
JPS5845363U true JPS5845363U (ja) 1983-03-26
JPS6120032Y2 JPS6120032Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-17

Family

ID=29933156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13998181U Granted JPS5845363U (ja) 1981-09-21 1981-09-21 蒸着装置

Country Status (1)

Country Link
JP (1) JPS5845363U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6120032Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-17

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