JPS5842442Y2 - 被蒸着体保持部品 - Google Patents

被蒸着体保持部品

Info

Publication number
JPS5842442Y2
JPS5842442Y2 JP3664279U JP3664279U JPS5842442Y2 JP S5842442 Y2 JPS5842442 Y2 JP S5842442Y2 JP 3664279 U JP3664279 U JP 3664279U JP 3664279 U JP3664279 U JP 3664279U JP S5842442 Y2 JPS5842442 Y2 JP S5842442Y2
Authority
JP
Japan
Prior art keywords
piezoelectric substrate
groove
vapor deposition
holding part
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3664279U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55139165U (enExample
Inventor
薫 志水
俊一 水越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3664279U priority Critical patent/JPS5842442Y2/ja
Publication of JPS55139165U publication Critical patent/JPS55139165U/ja
Application granted granted Critical
Publication of JPS5842442Y2 publication Critical patent/JPS5842442Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP3664279U 1979-03-20 1979-03-20 被蒸着体保持部品 Expired JPS5842442Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3664279U JPS5842442Y2 (ja) 1979-03-20 1979-03-20 被蒸着体保持部品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3664279U JPS5842442Y2 (ja) 1979-03-20 1979-03-20 被蒸着体保持部品

Publications (2)

Publication Number Publication Date
JPS55139165U JPS55139165U (enExample) 1980-10-03
JPS5842442Y2 true JPS5842442Y2 (ja) 1983-09-26

Family

ID=28898194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3664279U Expired JPS5842442Y2 (ja) 1979-03-20 1979-03-20 被蒸着体保持部品

Country Status (1)

Country Link
JP (1) JPS5842442Y2 (enExample)

Also Published As

Publication number Publication date
JPS55139165U (enExample) 1980-10-03

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