JPS5840518Y2 - 真空チヤツク装置 - Google Patents

真空チヤツク装置

Info

Publication number
JPS5840518Y2
JPS5840518Y2 JP12348476U JP12348476U JPS5840518Y2 JP S5840518 Y2 JPS5840518 Y2 JP S5840518Y2 JP 12348476 U JP12348476 U JP 12348476U JP 12348476 U JP12348476 U JP 12348476U JP S5840518 Y2 JPS5840518 Y2 JP S5840518Y2
Authority
JP
Japan
Prior art keywords
rod
vacuum chuck
chuck device
mounting flange
dish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12348476U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5342554U (enrdf_load_stackoverflow
Inventor
喜良 佐久間
隆司 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12348476U priority Critical patent/JPS5840518Y2/ja
Publication of JPS5342554U publication Critical patent/JPS5342554U/ja
Application granted granted Critical
Publication of JPS5840518Y2 publication Critical patent/JPS5840518Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
JP12348476U 1976-09-16 1976-09-16 真空チヤツク装置 Expired JPS5840518Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12348476U JPS5840518Y2 (ja) 1976-09-16 1976-09-16 真空チヤツク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12348476U JPS5840518Y2 (ja) 1976-09-16 1976-09-16 真空チヤツク装置

Publications (2)

Publication Number Publication Date
JPS5342554U JPS5342554U (enrdf_load_stackoverflow) 1978-04-12
JPS5840518Y2 true JPS5840518Y2 (ja) 1983-09-12

Family

ID=28732895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12348476U Expired JPS5840518Y2 (ja) 1976-09-16 1976-09-16 真空チヤツク装置

Country Status (1)

Country Link
JP (1) JPS5840518Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6219034A (ja) * 1985-07-17 1987-01-27 ヨシモトポ−ル株式会社 家畜舎における集糞装置
JPS6345173U (enrdf_load_stackoverflow) * 1986-09-12 1988-03-26

Also Published As

Publication number Publication date
JPS5342554U (enrdf_load_stackoverflow) 1978-04-12

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