JPS5839025A - 半導体装置の特性測定方法 - Google Patents

半導体装置の特性測定方法

Info

Publication number
JPS5839025A
JPS5839025A JP13721881A JP13721881A JPS5839025A JP S5839025 A JPS5839025 A JP S5839025A JP 13721881 A JP13721881 A JP 13721881A JP 13721881 A JP13721881 A JP 13721881A JP S5839025 A JPS5839025 A JP S5839025A
Authority
JP
Japan
Prior art keywords
contact
resistance value
measurement
semiconductor wafer
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13721881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS612295B2 (enrdf_load_stackoverflow
Inventor
Iwao Matsushima
松島　巌
Hiroyuki Toyoda
裕之 豊田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP13721881A priority Critical patent/JPS5839025A/ja
Publication of JPS5839025A publication Critical patent/JPS5839025A/ja
Publication of JPS612295B2 publication Critical patent/JPS612295B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13721881A 1981-08-31 1981-08-31 半導体装置の特性測定方法 Granted JPS5839025A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13721881A JPS5839025A (ja) 1981-08-31 1981-08-31 半導体装置の特性測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13721881A JPS5839025A (ja) 1981-08-31 1981-08-31 半導体装置の特性測定方法

Publications (2)

Publication Number Publication Date
JPS5839025A true JPS5839025A (ja) 1983-03-07
JPS612295B2 JPS612295B2 (enrdf_load_stackoverflow) 1986-01-23

Family

ID=15193539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13721881A Granted JPS5839025A (ja) 1981-08-31 1981-08-31 半導体装置の特性測定方法

Country Status (1)

Country Link
JP (1) JPS5839025A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6239022A (ja) * 1985-08-14 1987-02-20 Toshiba Corp プロ−ブテスト方法
JP2013238488A (ja) * 2012-05-15 2013-11-28 Mitsubishi Electric Corp 太陽電池セル特性評価装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6239022A (ja) * 1985-08-14 1987-02-20 Toshiba Corp プロ−ブテスト方法
JP2013238488A (ja) * 2012-05-15 2013-11-28 Mitsubishi Electric Corp 太陽電池セル特性評価装置

Also Published As

Publication number Publication date
JPS612295B2 (enrdf_load_stackoverflow) 1986-01-23

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