JPS5836868Y2 - 油廻転式真空ポンプ - Google Patents

油廻転式真空ポンプ

Info

Publication number
JPS5836868Y2
JPS5836868Y2 JP1978108375U JP10837578U JPS5836868Y2 JP S5836868 Y2 JPS5836868 Y2 JP S5836868Y2 JP 1978108375 U JP1978108375 U JP 1978108375U JP 10837578 U JP10837578 U JP 10837578U JP S5836868 Y2 JPS5836868 Y2 JP S5836868Y2
Authority
JP
Japan
Prior art keywords
oil
pump
exhaust valve
vacuum pump
rotary vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978108375U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5525641U (enExample
Inventor
昭太郎 磯崎
純一 相川
篤美 村岡
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP1978108375U priority Critical patent/JPS5836868Y2/ja
Publication of JPS5525641U publication Critical patent/JPS5525641U/ja
Application granted granted Critical
Publication of JPS5836868Y2 publication Critical patent/JPS5836868Y2/ja
Expired legal-status Critical Current

Links

JP1978108375U 1978-08-09 1978-08-09 油廻転式真空ポンプ Expired JPS5836868Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978108375U JPS5836868Y2 (ja) 1978-08-09 1978-08-09 油廻転式真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978108375U JPS5836868Y2 (ja) 1978-08-09 1978-08-09 油廻転式真空ポンプ

Publications (2)

Publication Number Publication Date
JPS5525641U JPS5525641U (enExample) 1980-02-19
JPS5836868Y2 true JPS5836868Y2 (ja) 1983-08-19

Family

ID=29053359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978108375U Expired JPS5836868Y2 (ja) 1978-08-09 1978-08-09 油廻転式真空ポンプ

Country Status (1)

Country Link
JP (1) JPS5836868Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114324U (enExample) * 1974-07-19 1976-02-02

Also Published As

Publication number Publication date
JPS5525641U (enExample) 1980-02-19

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