JPS5834969U - Substrate holder for LPE film growth - Google Patents

Substrate holder for LPE film growth

Info

Publication number
JPS5834969U
JPS5834969U JP12739781U JP12739781U JPS5834969U JP S5834969 U JPS5834969 U JP S5834969U JP 12739781 U JP12739781 U JP 12739781U JP 12739781 U JP12739781 U JP 12739781U JP S5834969 U JPS5834969 U JP S5834969U
Authority
JP
Japan
Prior art keywords
substrate holder
film growth
substrates
lpe film
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12739781U
Other languages
Japanese (ja)
Inventor
慎一 笠原
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP12739781U priority Critical patent/JPS5834969U/en
Publication of JPS5834969U publication Critical patent/JPS5834969U/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Thin Magnetic Films (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る基板ホルダの斜視図、第２図はこ
れに使用する保持用治具の平面図、また第３図Ａ、　Ｂ
、　Ｃは保持用治具のＬＰＥ成長工程における挙動の説
明図である。 図において、１は保持用治具、３は側板、４は支持腕ｚ
７は固定治具、８はストッパ。Fig. 1 is a perspective view of a substrate holder according to the present invention, Fig. 2 is a plan view of a holding jig used for this, and Figs. 3A and B.
, C is an explanatory diagram of the behavior of the holding jig in the LPE growth process. In the figure, 1 is a holding jig, 3 is a side plate, and 4 is a support arm z.
7 is a fixing jig, and 8 is a stopper.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 複数個の単結晶基板を階層状に保持し高温の溶融液中に
浸漬することにより該基板上にエピタキシャル成長を行
う基板ホルダにおいて、単結晶基板を保持する保持用治
具が該治具の支持軸を中心とし回動可能な状態に保持さ
れていることを特徴とするＬＰＥ膜成長用基板ホルダ。In a substrate holder that holds a plurality of single-crystal substrates in a layered manner and performs epitaxial growth on the substrates by immersing the substrates in a high-temperature melt, a holding jig for holding the single-crystal substrates has a support shaft of the jig. A substrate holder for LPE film growth, characterized in that it is held in a rotatable state around a center.
JP12739781U 1981-08-28 1981-08-28 Substrate holder for LPE film growth Pending JPS5834969U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12739781U JPS5834969U (en) 1981-08-28 1981-08-28 Substrate holder for LPE film growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12739781U JPS5834969U (en) 1981-08-28 1981-08-28 Substrate holder for LPE film growth

Publications (1)

Publication Number Publication Date
JPS5834969U true JPS5834969U (en) 1983-03-07

Family

ID=29921125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12739781U Pending JPS5834969U (en) 1981-08-28 1981-08-28 Substrate holder for LPE film growth

Country Status (1)

Country Link
JP (1) JPS5834969U (en)

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