JPS5987138U - Wafer alignment jig - Google Patents
Wafer alignment jigInfo
- Publication number
- JPS5987138U JPS5987138U JP18061482U JP18061482U JPS5987138U JP S5987138 U JPS5987138 U JP S5987138U JP 18061482 U JP18061482 U JP 18061482U JP 18061482 U JP18061482 U JP 18061482U JP S5987138 U JPS5987138 U JP S5987138U
- Authority
- JP
- Japan
- Prior art keywords
- alignment jig
- wafer alignment
- wafer
- arm
- facets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来のウェハ整列治具の構造を説明する図で
ある。第２図は、本考案の実施例を示す□ 図である
。FIG. 1 is a diagram illustrating the structure of a conventional wafer alignment jig. FIG. 2 is a square diagram showing an embodiment of the present invention.
Claims (1)
りつけた。ローラの高さ位置を変えてウェハのファセッ
トを揃え、かつ、所望の位置までウェハを回転できるよ
うにしたウェハ整列治具の構造。An arm with a stopper was provided on the base and attached to this arm. The structure of the wafer alignment jig allows the facets of the wafer to be aligned by changing the height position of the rollers, and the wafer can be rotated to the desired position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18061482U JPS5987138U (en) | 1982-12-01 | 1982-12-01 | Wafer alignment jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18061482U JPS5987138U (en) | 1982-12-01 | 1982-12-01 | Wafer alignment jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5987138U true JPS5987138U (en) | 1984-06-13 |
Family
ID=30391577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18061482U Pending JPS5987138U (en) | 1982-12-01 | 1982-12-01 | Wafer alignment jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5987138U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5434774A (en) * | 1977-08-24 | 1979-03-14 | Hitachi Ltd | Article transfer device |
-
1982
- 1982-12-01 JP JP18061482U patent/JPS5987138U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5434774A (en) * | 1977-08-24 | 1979-03-14 | Hitachi Ltd | Article transfer device |
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