JPS5834775B2 - Defect inspection equipment - Google Patents

Defect inspection equipment

Info

Publication number
JPS5834775B2
JPS5834775B2 JP9335777A JP9335777A JPS5834775B2 JP S5834775 B2 JPS5834775 B2 JP S5834775B2 JP 9335777 A JP9335777 A JP 9335777A JP 9335777 A JP9335777 A JP 9335777A JP S5834775 B2 JPS5834775 B2 JP S5834775B2
Authority
JP
Japan
Prior art keywords
round bar
light
signal
defect
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9335777A
Other languages
Japanese (ja)
Other versions
JPS5428185A (en
Inventor
友和 五代
義久 森岡
康人 竹内
和夫 竹内
幸三 中井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd, Tokyo Shibaura Electric Co Ltd filed Critical Kobe Steel Ltd
Priority to JP9335777A priority Critical patent/JPS5834775B2/en
Publication of JPS5428185A publication Critical patent/JPS5428185A/en
Publication of JPS5834775B2 publication Critical patent/JPS5834775B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【発明の詳細な説明】 本発明は欠陥検査装置に係り、特に断面が略円形の棒状
被検査体の表面に存在する欠陥を検出する欠陥検査装置
に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a defect inspection apparatus, and more particularly to a defect inspection apparatus for detecting defects present on the surface of a rod-shaped object to be inspected having a substantially circular cross section.

円形状の断面を有する被検査体として、例えば溶接棒が
ある。
An example of an object to be inspected having a circular cross section is a welding rod.

この溶接棒製造において溶接棒の使用時の性能および商
品価値等の品質を保証するため、最終工程である包装直
前において溶接棒の表面欠陥をチェックする外観検査を
実施している。
In this welding rod manufacturing process, in order to guarantee quality such as the performance and commercial value of the welding rod during use, a visual inspection is carried out to check for surface defects on the welding rod immediately before packaging, which is the final process.

ところで溶接棒は溶接棒製造の塗装工程あるいは乾燥工
程を中心として塗装フラックスが部分的に欠落する欠は
傷、フラツクスに亀裂開口部が生ずる割れ傷等の欠陥が
端部に多く発生しているので溶接棒の品質を保証するに
はこれらの欠陥を検出しなくてはならない。
By the way, welding rods often have defects such as chips and scratches where paint flux is partially missing, and cracks where cracks open in the flux, mainly during the painting or drying process of welding rod manufacturing, at the ends. These defects must be detected to ensure the quality of welding rods.

したがって最終工程において1本づつ溶接棒の端部の表
面形状を検査員による目視で検査し、欠陥の種類および
大小にわけて選別している。
Therefore, in the final process, the surface shape of the end of each welding rod is visually inspected by an inspector, and the defects are sorted by type and size.

このように1本づつ検査員が溶接棒端部の表面を目視で
検査する目視検査は、作業が長時間におよんだり、また
検査スピードが高速になるにつれて検査員の疲労が急激
に増大し、検査員の判断能力の低下をもたらし検査ミス
等の発生につながる危険がある。
In this visual inspection, in which the inspector visually inspects the surface of the end of each welding rod, the work takes a long time, and as the inspection speed increases, the fatigue of the inspector increases rapidly. There is a risk that the inspector's decision-making ability will deteriorate, leading to inspection errors, etc.

すなわち溶接棒端部の表面形状に欠陥があっても良品と
して選別しかねない問題があった。
In other words, there was a problem in that even if there was a defect in the surface shape of the end of the welding rod, it could be selected as a good product.

本発明の目的は、高速度でしかも正確に溶接棒等の被検
査体の端部に発生する欠陥を検出できる欠陥検査装置を
提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a defect inspection device that can detect defects occurring at the end of an object to be inspected, such as a welding rod, at high speed and accuracy.

この目的を遠戚するための概要は、検査領域を移動して
いく被検査体が1回転する間に、細いビーム状の光を被
検査体の直径方向に複数回走査し、走査ごとに遮蔽によ
って得られた被検査体の太さに対応する幅値と、予じめ
定められた太さ設定値とを比較して丸棒の端部の欠陥を
検出するように構成し、移動させつつ被検査体を検査し
、しかも径の細い光で被検査体を走査することにより被
検査体との遮蔽による光の変化量を大きくして1体あた
りの処理に要する時間を短縮するとともに欠陥検出の正
確さを向上させた。
The outline of this objective is to scan a thin beam of light multiple times in the diameter direction of the object to be inspected while the object to be inspected moves through the inspection area and makes one rotation, and to block the object for each scan. The width value corresponding to the thickness of the object to be inspected obtained by By inspecting the object to be inspected and scanning the object with a narrow diameter light, the amount of change in light due to shielding with the object to be inspected is increased, reducing the processing time per object and detecting defects. Improved accuracy.

以下本発明の一実施例を図面を参照しなから構成および
作用効果を説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure and effects of an embodiment of the present invention will be described below with reference to the drawings.

第1図は被検査体となる丸棒10を矢符号方向に搬送す
る搬送装置を示す。
FIG. 1 shows a conveying device that conveys a round bar 10, which is an object to be inspected, in the direction of the arrow mark.

この搬送装置は被検査体となる丸棒を2組のベルトコン
ベア11゜12の働により、その丸棒の長手方向に対し
直角方向に搬送するもので、その2組のベルトコンベア
のいずれか一方の組のコンベアの繰り出す速度を違えて
丸棒に回転運動すなわち自転運動を行なわせている。
This conveyance device conveys a round bar to be inspected in a direction perpendicular to the longitudinal direction of the round bar by means of two sets of belt conveyors 11 and 12. The round bars are made to perform rotational motion, that is, rotational motion, by varying the feeding speeds of the conveyors of the set.

なおベルトコンベアは図示しない駆動部で駆動されてい
る。
Note that the belt conveyor is driven by a drive section (not shown).

第2図は、自転しながら搬送される丸棒の端部に存在す
る欠陥を検出する検出部を示す。
FIG. 2 shows a detection unit that detects defects present at the end of a round bar that is transported while rotating.

この検出部は細い光を放出する光源13、前記光源の光
を反射して搬送装置により搬送されてくる丸棒の端部位
置でかつ搬送方向に沿って走査させる走査鏡14、丸棒
と走査鏡14との間に配置され、走査光を平行光にする
第1光学系15、丸棒を挾み第1光学系に対する位置に
配置されて第1光学系を通ってきた走査光を一点に集光
する第2光学系16、光電変換器17および変換された
電気信号を増幅する前置増幅器18からなり、丸棒が光
学系で定まる検査領域を横切る間に、丸棒は少なくとも
1回自転し、走査光は丸棒の端部を複数回走査するよう
にする。
This detection unit includes a light source 13 that emits a thin light, a scanning mirror 14 that reflects the light from the light source and scans the round bar at the end position and along the conveying direction of the round bar being conveyed by the conveying device, and a scanning mirror 14 that reflects the light from the light source and scans the round bar along the conveying direction. A first optical system 15 is placed between the mirror 14 and converts the scanning light into parallel light; and a first optical system 15 is placed between the round bar and the first optical system to convert the scanning light that has passed through the first optical system into a single point. It consists of a second optical system 16 for condensing light, a photoelectric converter 17, and a preamplifier 18 for amplifying the converted electrical signal, and the round rod rotates at least once while it crosses the inspection area determined by the optical system. However, the scanning light is made to scan the end of the round bar multiple times.

第3図は検出部の電気信号から丸棒の端部に欠陥が存在
したか否かを判断する処理装置である。
FIG. 3 shows a processing device that determines whether or not there is a defect at the end of a round bar based on the electrical signal from the detection section.

この処理装置は、前記増幅器18の出力信号を波形整形
する波形整形回路19、パルス発生器20を内蔵して波
形整形回路19の出力信号の丸棒に対応したパルス幅を
パルス発生器のパルス数に変換するゲート回路21、丸
棒の直径をパルスの数として設定する第1設定器22、
第1設定器のパルス数からゲート回路の出力パルス数を
差引いた信号を出力する減算回路23、欠陥に対応した
パルス数を設定する第2設定器24および第2設定器2
4の設定パルス数から減算回路23の出力値を比較判別
した信号を出力する比較回路25から構成し、検査領域
を通過する丸棒の端部の全周を比較回路25の出力より
検出するようにする。
This processing device has a built-in waveform shaping circuit 19 that shapes the waveform of the output signal of the amplifier 18, and a pulse generator 20, and the pulse width corresponding to the round bar of the output signal of the waveform shaping circuit 19 is determined by the number of pulses of the pulse generator. a first setting device 22 that sets the diameter of the round bar as the number of pulses;
A subtraction circuit 23 that outputs a signal obtained by subtracting the number of output pulses of the gate circuit from the number of pulses of the first setter, a second setter 24 that sets the number of pulses corresponding to the defect, and a second setter 2
It is composed of a comparison circuit 25 that outputs a signal obtained by comparing and determining the output value of the subtraction circuit 23 from the set pulse number of 4, and the entire circumference of the end of the round bar passing through the inspection area is detected from the output of the comparison circuit 25. Make it.

次にこのように構成された装置の作動を説明する。Next, the operation of the device configured as described above will be explained.

光線が走査する検査領域において丸棒を搬送しながら少
なくとも1回だけ自転させ、かつこの検査領域内に丸棒
を1本以上存在しないように搬送装置が丸棒を搬送きせ
ている。
The round bar is rotated at least once while being conveyed in the inspection area scanned by the light beam, and the conveying device is configured to convey the round bar so that there is no more than one round bar within the inspection area.

また前記検査領域において光が走査しているので通過中
の丸棒は一回転する間にこの直径方向に走査している光
線により複数回(図において3回)走査される。
Further, since the light is scanning in the inspection area, the round bar passing through the inspection area is scanned multiple times (three times in the figure) by the light beam scanning in the diametrical direction during one rotation.

光電変換素子から走査するごとに出力され、第4図に示
すごとく丸棒で遮蔽されたパルス幅の取分を含む信号(
第4図A)が出力される。
A signal (
Figure 4A) is output.

第2図において第1回目の走査のとき丸棒はAの位置、
第2回目の走査のとき丸棒はBの位置、第3回目の走査
のとき丸棒はCの位置にそれぞれ位置される。
In Figure 2, during the first scan, the round bar is at position A,
During the second scan, the round bar is located at position B, and during the third scan, the round bar is located at position C.

ところで丸棒の移送速度、自転速度および光の走査速度
が一定と仮定すれば、丸棒で遮ぎられる時間はほぼ一定
となる。
By the way, if we assume that the transport speed, rotation speed, and scanning speed of light of the round bar are constant, the time that the round bar interrupts is almost constant.

しかし光走査する箇所の丸棒に欠は傷等があれば、この
丸棒により遮えぎられる時間が異なってくる。
However, if there is a chip or scratch on the round bar at the location where the light is scanned, the time blocked by the round bar will vary.

すなわち第2図B−Cでは欠は部の影響が表われ、正常
の直径の丸棒で遮ぎられるパルス幅より短かく、また第
2図Aでは真下に欠は部があるが欠けによる走査光を作
用する箇所がなく、正常の径の丸棒とほぼ等しいパルス
幅の信号を得る。
In other words, in Figure 2 B-C, the influence of the chip appears, and the pulse width is shorter than that blocked by a round bar with a normal diameter, and in Figure 2 A, there is a chip directly below, but the scanning due to the chip is There is no part where light is applied, and a signal with a pulse width almost equal to that of a round bar with a normal diameter is obtained.

このような状況のもとで丸棒の直径に比例したパルス幅
を含む信号が光電変換素子から出力される。
Under such circumstances, a signal containing a pulse width proportional to the diameter of the round bar is output from the photoelectric conversion element.

この丸棒の直径に比例したパルス幅信号はゲート回路2
1によりパルス発振器20から生ずるパルス(第4図B
)の数(第4図C)に変換され、正常な丸棒の直径に対
応した第1設定値との差が減算回路23でとられる。
The pulse width signal proportional to the diameter of this round bar is sent to the gate circuit 2.
1 generates a pulse from the pulse oscillator 20 (Fig. 4B)
) (FIG. 4C), and the subtraction circuit 23 calculates the difference from the first set value corresponding to the diameter of a normal round bar.

すなわち欠陥がなければ減算回路の内容は零になり、欠
陥があると数パルス以上の数が残る。
That is, if there is no defect, the contents of the subtraction circuit will be zero; if there is a defect, a number of more than a few pulses will remain.

この減算回路の内容が欠陥設定信号と比較回路25で比
較判別され、欠陥設定信号以上の内容のとき比較回路2
5から欠陥の存在した内容の判別信号が出力される。
The content of this subtraction circuit is compared and determined with the defect setting signal in the comparison circuit 25, and when the content is higher than the defect setting signal, the comparison circuit 25
5 outputs a determination signal indicating the content in which the defect exists.

なお丸棒が検査領域を1回転して横切る間に光ビームが
3回走査して丸棒の端部の全周を検査しているものであ
るから、比較回路25は丸棒を3回走査したそれぞれの
出力を蓄積し、丸棒が検査位置を離れるときに第4図り
ごとき信号で3回分の情報に欠陥があったとき丸棒に欠
陥ある旨の信号を出力して検査が行なわれる。
Note that while the round bar crosses the inspection area once, the light beam scans three times to inspect the entire circumference of the end of the round bar, so the comparison circuit 25 scans the round bar three times. The respective outputs are accumulated, and when the round bar leaves the inspection position, if there is a defect in the information for three times using a fourth operation signal, a signal indicating that the round bar is defective is outputted and the inspection is performed.

次に他の実施例を第5図を参照しながら説明する。Next, another embodiment will be described with reference to FIG.

第3図と同一機能をもつ装置に同−耐量を付し、その説
明を省略して説明する。
Devices having the same functions as those shown in FIG. 3 are labeled with the same tolerance, and the explanation thereof will be omitted.

検査領域となる棒10が矢耐量方向に移動しつつ矢符号
方向に1回転する場所には丸棒の端部を照射するため、
この端部の移動方向に対し直角方向の面を照射する棒状
の光源26を配置する。
In order to irradiate the end of the round bar at the location where the bar 10, which is the inspection area, moves once in the direction of the arrow sign while moving in the arrow resistance direction, the end of the round bar is irradiated.
A rod-shaped light source 26 is arranged to illuminate a surface perpendicular to the direction of movement of this end.

この棒状の光源からの光は、検査域を視野内とする検出
器27に導かれる。
Light from this rod-shaped light source is guided to a detector 27 whose field of view is the inspection area.

この検出器は集光光学系27Aの集光位置に所定時間を
隔てて複数個の光電変換素子を一直線状に配置してなる
光電変換器27Bを配置し、この変換器の複数の光電変
換素子の出力端を順々に走査し、出力の生じていない素
子の数から丸棒の直径に比例したディジタル量を取り出
し、このディジタル量を第3図の減算回路に与え、第1
設定値と差をとるようにしてもよい。
This detector has a photoelectric converter 27B in which a plurality of photoelectric conversion elements are arranged in a straight line at a predetermined time interval at a light collection position of a light collection optical system 27A, and the plurality of photoelectric conversion elements of this converter The output terminals of 1 are scanned one after another, a digital amount proportional to the diameter of the round bar is extracted from the number of elements that are not producing an output, and this digital amount is applied to the subtraction circuit shown in Fig. 3.
It is also possible to take the difference from the set value.

また検出器はテレビカメラに置き換え、ビデオ信号に含
まれる丸棒成分のパルス信号を第3図の波形整形回路に
人力することで本願発明と同一作用効果を奏することは
もちろんのことである。
It goes without saying that the same effect as the present invention can be achieved by replacing the detector with a television camera and manually inputting the pulse signal of the round bar component contained in the video signal to the waveform shaping circuit shown in FIG.

また複数の光電変換素子からなる光電変換器を用いなく
ても実施できることはもちろんのことである。
Moreover, it goes without saying that the present invention can be implemented without using a photoelectric converter consisting of a plurality of photoelectric conversion elements.

すなわち検出器の視野を走査することによって得られた
丸棒の直径方向の成分のパルスの幅を設定幅値と比較し
、この比較信号から欠陥有無を判別する。
That is, the pulse width of the component in the diameter direction of the round bar obtained by scanning the field of view of the detector is compared with a set width value, and the presence or absence of a defect is determined from this comparison signal.

以上本願発明は、検査領域において1回転しつつ移動す
る間の丸棒を、この直径方向に光ビームを複数回走査す
るようにして丸棒の全周を検査するように構成したため
、丸棒を検査のために停止させるようなことをなくても
よく、また回転して行く丸棒を細い光で走査するので検
出感度が向上し、高速度のもとで正確に欠陥検査のでき
る欠陥検査装置が提供できる。
As described above, the present invention is configured so that the entire circumference of the round bar is inspected by scanning the light beam multiple times in the diametrical direction while the round bar moves once in the inspection area. This defect inspection device eliminates the need to stop for inspection, and improves detection sensitivity by scanning the rotating round bar with a thin beam of light, allowing for accurate defect inspection at high speeds. can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は丸棒搬送するための搬送装置の概略構成図、第
2図は本願発明の光学的な検出部の概略構成図、第3図
は処理装置をブロック構成にして示す図、第4図は各点
の出力波形を示す図、第5図は本願発明の他の実施例を
示す図である。 10・・・・・・丸L11,12・・・・・・ベルトコ
ンベア、13・・・・・・光源、14・・・・・・走査
鏡、15,16・・・・・・第1、第2光学系、17・
・・・・・光電変換素子、20・・・・・・パルス発振
器、21・・・・・・ゲート回路、22゜24・・・・
・・第1、第2設定器、23・・・・・・減算回路、2
5・・・・・・比較回路、26・・・・・・光源、27
・・・・・・検出器。
FIG. 1 is a schematic configuration diagram of a conveying device for conveying round bars, FIG. 2 is a schematic configuration diagram of an optical detection section of the present invention, FIG. 3 is a diagram showing a processing device in block configuration, and FIG. The figure shows the output waveform at each point, and FIG. 5 is a diagram showing another embodiment of the present invention. 10... Circle L11, 12... Belt conveyor, 13... Light source, 14... Scanning mirror, 15, 16... First , second optical system, 17.
...Photoelectric conversion element, 20...Pulse oscillator, 21...Gate circuit, 22゜24...
...First and second setter, 23...Subtraction circuit, 2
5... Comparison circuit, 26... Light source, 27
······Detector.

Claims (1)

【特許請求の範囲】 1 ビーム状の光を放出する光源と、重複せずに丸棒を
自転させつつこの自転軸線に対し直角方向に搬送する搬
送装置と、前記ビーム光を前記自転軸線に対し直角方向
にかつ丸棒の一自転中複数回走査する走査機構と、走査
して行くビーム光を入力し、丸棒の遮蔽により丸棒の太
さに比例した幅のパルスを生ずる光電変換部と、このパ
ルス幅値と丸棒の太さに対応した幅設定値とを比較して
丸棒の欠陥有無の判別信号を出力する回路とを備えてな
る欠陥検査装置。 2 帯状に光を放出する光源と、帯状の光領域内におい
て重複せずに丸棒を自転させつつこの自転軸線に対し直
角方向に搬送する搬送装置と、帯状の光を視野内に位置
して丸棒の1自転中にこの帯状方向に沿って複数個走査
し、丸棒の遮蔽により丸棒の太さに比例したディジタル
量またはパルス幅の信号を出力する光電変換部と、この
変換出力量と丸棒の太さに対応した設定値とを比較して
丸棒の欠陥有無の判別信号を出力する回路とを備えてな
る欠陥検査装置。
[Scope of Claims] 1. A light source that emits beam-shaped light, a conveyance device that rotates a round bar without overlapping and conveys it in a direction perpendicular to the rotation axis, and A scanning mechanism that scans the round bar multiple times in the right angle direction during one rotation of the round bar, and a photoelectric conversion unit that inputs the scanning beam light and generates a pulse with a width proportional to the thickness of the round bar by shielding the round bar. , and a circuit that compares this pulse width value with a width setting value corresponding to the thickness of the round bar and outputs a signal for determining whether or not there is a defect in the round bar. 2. A light source that emits light in the form of a band, a conveying device that rotates a round bar without overlapping within the band-shaped light area and conveys it in a direction perpendicular to the axis of rotation, and a light source that emits the band-shaped light within the field of view. A photoelectric conversion unit that scans multiple pieces along this strip direction during one rotation of the round bar and outputs a signal with a digital amount or pulse width proportional to the thickness of the round bar by shielding the round bar, and the converted output amount. A defect inspection device comprising: a circuit that compares the data with a set value corresponding to the thickness of the round bar and outputs a signal for determining the presence or absence of a defect in the round bar.
JP9335777A 1977-08-05 1977-08-05 Defect inspection equipment Expired JPS5834775B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9335777A JPS5834775B2 (en) 1977-08-05 1977-08-05 Defect inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9335777A JPS5834775B2 (en) 1977-08-05 1977-08-05 Defect inspection equipment

Publications (2)

Publication Number Publication Date
JPS5428185A JPS5428185A (en) 1979-03-02
JPS5834775B2 true JPS5834775B2 (en) 1983-07-28

Family

ID=14080018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9335777A Expired JPS5834775B2 (en) 1977-08-05 1977-08-05 Defect inspection equipment

Country Status (1)

Country Link
JP (1) JPS5834775B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4882574B2 (en) * 2006-07-27 2012-02-22 セイコーエプソン株式会社 Round bar imaging device and round bar measuring device

Also Published As

Publication number Publication date
JPS5428185A (en) 1979-03-02

Similar Documents

Publication Publication Date Title
US4483615A (en) Method and apparatus for detecting checks in glass tubes
JPH0412416B2 (en)
US4253768A (en) Processing system for detection and the classification of flaws on metallic surfaces
JPH0225121B2 (en)
JPH0815163A (en) Visual inspecting apparatus for cylindrical object
JP2019148607A (en) Inspection device
US4185921A (en) Surface flaw detector
US4219277A (en) Method of detecting flaws on surfaces
JPS5834775B2 (en) Defect inspection equipment
JP2990820B2 (en) Surface defect inspection equipment
JP2002123811A (en) Detecting and counting method for moving object
JP3845958B2 (en) Periodic defect detection method and apparatus
JPH04121647A (en) Appearance inspection method and device for metal can edge part
JPH0763699A (en) Flaw inspection apparatus
JP2002048727A (en) Laver visual inspection device
JPS6269113A (en) Inspection instrument for surface of screw
JPS5981544A (en) Detecting method of internal defect
JPS637439Y2 (en)
JP3359970B2 (en) Perforated hole position inspection device
JP2002090306A (en) Self-diagnostic method for surface inspection device
JPS63135532A (en) Inspecting method for bunch winding of yarn package
JPH0558497B2 (en)
JPH04291138A (en) Marking device for flaw portion on strip
JPH0523274Y2 (en)
JP2003315286A (en) X-ray foreign-matter detector