JPS5832262Y2 - Semiconductor pellet flipping device - Google Patents
Semiconductor pellet flipping deviceInfo
- Publication number
- JPS5832262Y2 JPS5832262Y2 JP1978086343U JP8634378U JPS5832262Y2 JP S5832262 Y2 JPS5832262 Y2 JP S5832262Y2 JP 1978086343 U JP1978086343 U JP 1978086343U JP 8634378 U JP8634378 U JP 8634378U JP S5832262 Y2 JPS5832262 Y2 JP S5832262Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- suction
- drive system
- suction nozzle
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Description
【考案の詳細な説明】
本考案は、半導体ペレットの特性検査に用いられるペレ
ット表裏反転装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pellet flipping device used for testing the characteristics of semiconductor pellets.
従来、半導体ペレットの特性を検査する際、ペレット収
納部より裏向きのペレットが検査部に送られてきた場合
、ペレットは再びペレット収納部へもどされる構造にな
っていたため、ペレットの表面よごれが激しくなり、特
性が悪化し、かつペレット収納部へのもどし動作にとも
なう割れ、欠けが頻繁に発生するという欠点があった。Conventionally, when testing the characteristics of semiconductor pellets, if a face-down pellet was sent from the pellet storage section to the inspection section, the pellet was returned to the pellet storage section, which resulted in the surface of the pellet becoming heavily soiled. This has the disadvantage that the properties deteriorate and cracks and chips frequently occur when the pellets are returned to the pellet storage section.
本考案の目的は上記の欠点を除去し、ペレットのよごれ
、割れ、欠けが発生しない表裏反転装置を提供すること
にある。The object of the present invention is to eliminate the above-mentioned drawbacks and to provide a flipping device that does not cause pellets to become dirty, cracked, or chipped.
すなわち本考案によれば、第１図および第２図に示すよ
うに、半導体ペレット載せ台２の下方に上下駆動系４と
連結された上下吸着ノズル３を備え、ペレット載せ台２
の上方でかつ上下吸着ノズル３と略々対応した位置に複
数個の吸着口１３を配置しかつペレット載せ台２と平行
に前後駆動系６および回転駆動系７と連結された回転吸
着ノズル５を備えたことを特徴とする半導体ペレット表
裏反転装置が得られる。That is, according to the present invention, as shown in FIGS. 1 and 2, a vertical suction nozzle 3 connected to a vertical drive system 4 is provided below the semiconductor pellet platform 2.
A plurality of suction ports 13 are arranged above and at positions approximately corresponding to the upper and lower suction nozzles 3, and a rotary suction nozzle 5 is connected to a longitudinal drive system 6 and a rotary drive system 7 in parallel to the pellet platform 2. A device for inverting semiconductor pellets is obtained.
以下図面に従って説明する、第１図は本考案の一実施例
を示す概観図で、２はペレット載せ台であり、中心に上
下吸着ノズル３の逃げ穴８を備えている。FIG. 1, which will be described below with reference to the drawings, is a general view showing an embodiment of the present invention, in which 2 is a pellet mounting table, and the center thereof is provided with escape holes 8 for upper and lower suction nozzles 3.
上下吸着ノズル３はペレット１を吸着口１２に吸着する
機構１０を備え、かつ上下に一定量移動するための上下
駆動系４を備えている。The vertical suction nozzle 3 includes a mechanism 10 for sucking the pellet 1 into the suction port 12, and a vertical drive system 4 for vertically moving a certain amount.
ペレット載せ台２の上方でかつ上下吸着ノズル３と略々
対応した位置に、第２図に示すように上下吸着ノズル３
の逃げ溝１１を備えた回転吸着ノズル５があり、吸着口
１３にペレット１を吸着する機構９を備え、かつ前後方
向へ一定量移動するための前後駆動系６および回転駆動
系７を備えている。As shown in FIG.
There is a rotary suction nozzle 5 equipped with an escape groove 11, a mechanism 9 for suctioning the pellets 1 to the suction port 13, and a front-back drive system 6 and a rotation drive system 7 for moving a certain amount in the front-back direction. There is.
次に本考案の動作について説明する。Next, the operation of the present invention will be explained.
ペレット収納部よりペレット載せ台２上に搬送されてき
たペレット１が裏向きの場合、回転吸着ノズル５は前後
駆動系６により前進するとともに吸着機構９は吸着動作
を開始する。When the pellets 1 conveyed from the pellet storage section onto the pellet platform 2 are face down, the rotary suction nozzle 5 is moved forward by the front-back drive system 6, and the suction mechanism 9 starts a suction operation.
上下吸着ノズル３は第３図に示すように回転吸着ノズル
５が前進すると同時にペレット１を吸着口１２に吸着し
たまま上下駆動系４により上昇し、略々回転吸着ノズル
５の直下にペレット１を位置決めした後吸着を停止シ、
ペレット１は回転吸着ノズル５の吸着口１３に吸着され
る。As shown in FIG. 3, the vertical suction nozzle 3 is raised by the vertical drive system 4 with the pellet 1 adsorbed to the suction port 12 at the same time as the rotating suction nozzle 5 moves forward, and the pellet 1 is placed almost directly below the rotary suction nozzle 5. After positioning, stop suction.
The pellet 1 is adsorbed to the suction port 13 of the rotary suction nozzle 5.
ペレット１が回転吸着ノズル５の吸着口１３に吸着され
ると、上下吸着ノズル３は下降し、第４図に示すように
回転吸着ノズル５は回転駆動系７により１８０°回転し
、回転終了後吸着を停止する。When the pellet 1 is adsorbed to the suction port 13 of the rotary suction nozzle 5, the upper and lower suction nozzles 3 descend, and as shown in FIG. Stop adsorption.
次に第５図に示すように上下吸着ノズル３は吸着動作を
開始しながら上昇し、回転吸着ノズル５の逃げ溝１１を
通ってペレット１を吸着口１２に吸着し、さらに一定量
だけ上昇し停止する。Next, as shown in FIG. 5, the upper and lower suction nozzles 3 rise while starting the suction operation, pass through the relief groove 11 of the rotary suction nozzle 5, adsorb the pellet 1 to the suction port 12, and then rise a certain amount. Stop.
次に回転吸着ノズル５は後退し、さらに１８０°回転し
てもとの位置に復帰し、上下吸着ノズル３はペレット１
を吸着したまま下降し、ペレット載せ台２上にペレット
１を位置決めして吸着動作を停止する。Next, the rotary suction nozzle 5 retreats, rotates further 180 degrees and returns to its original position, and the upper and lower suction nozzles 3 release the pellet 1.
The pellet 1 is lowered while being sucked, and the pellet 1 is positioned on the pellet mounting table 2, and the suction operation is stopped.
以上に述べた動作により裏向きで搬送されてきたペレッ
トはペレット載せ台上で表裏反転され、表向きにペレッ
ト載せ台上に載せられる。Through the above-described operation, the pellets that have been conveyed face down are turned over on the pellet platform and placed face up on the pellet platform.
以上説明したように本考案によれば、半導体ペレットの
特性検査の際に、ペレットのよごれを最小限にとどめ、
かつ割れ、欠けが発生することなくペレットの表裏を反
転させることができるなど種々の効果がある。As explained above, according to the present invention, when testing the characteristics of semiconductor pellets, contamination of the pellets can be minimized,
It also has various effects, such as being able to turn the pellets upside down without cracking or chipping.
なお、本考案は半導体ペレットの同様の形状をしたセラ
ミック等のペレット表裏反転装置としても用いることが
できるのはもちろんのことである。It goes without saying that the present invention can also be used as an apparatus for reversing a ceramic pellet having a similar shape to a semiconductor pellet.
第１図および第２図は本考案装置の一実施例を示す概観
図および一部分の拡大図、第３図、第４図および第５図
は上下吸着ノズルおよび回転吸着ノズルの動作を示す部
分拡大図である。
なお図において、１はペレット、２はペレット載せ台、
３は上下吸着ノズル、４は上下駆動系、５は回転吸着ノ
ズル、６は前後駆動系、７は回転駆動系、８は逃げ穴、
９は吸着機構、１０は吸着機構、１１は逃げ溝、１２は
吸着口、１３は吸着口である。Figures 1 and 2 are general views and partially enlarged views showing one embodiment of the device of the present invention, and Figures 3, 4, and 5 are partially enlarged views showing the operation of the vertical suction nozzle and the rotating suction nozzle. It is a diagram. In the figure, 1 is a pellet, 2 is a pellet platform,
3 is a vertical suction nozzle, 4 is a vertical drive system, 5 is a rotary suction nozzle, 6 is a front and rear drive system, 7 is a rotary drive system, 8 is an escape hole,
9 is a suction mechanism, 10 is a suction mechanism, 11 is an escape groove, 12 is a suction port, and 13 is a suction port.
Claims (1)
れた上下吸着ノズル３を備え、ペレット載せ台２の上方
でかつ上下吸着ノズル３と略々対応した位置に複数個の
吸着口１３を配置しかつペレット載せ台２と平行に前後
駆動系６および回転駆動系７と連結された回転吸着ノズ
ル５を備えたことを特徴とする半導体ペレット表裏反転
装置。A vertical suction nozzle 3 connected to a vertical drive system 4 is provided below the semiconductor pellet platform 2, and a plurality of suction ports 13 are arranged above the pellet platform 2 and at positions approximately corresponding to the vertical suction nozzles 3. A device for reversing semiconductor pellets, characterized in that a rotary suction nozzle 5 is connected to a front-rear drive system 6 and a rotary drive system 7 in parallel with the pellet platform 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978086343U JPS5832262Y2 (en) | 1978-06-22 | 1978-06-22 | Semiconductor pellet flipping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978086343U JPS5832262Y2 (en) | 1978-06-22 | 1978-06-22 | Semiconductor pellet flipping device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS554540U JPS554540U (en) | 1980-01-12 |
| JPS5832262Y2 true JPS5832262Y2 (en) | 1983-07-18 |
Family
ID=29010837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978086343U Expired JPS5832262Y2 (en) | 1978-06-22 | 1978-06-22 | Semiconductor pellet flipping device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5832262Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295976A (en) * | 1976-02-09 | 1977-08-12 | Hitachi Ltd | Inversion of semiconductor element pellet |
-
1978
- 1978-06-22 JP JP1978086343U patent/JPS5832262Y2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295976A (en) * | 1976-02-09 | 1977-08-12 | Hitachi Ltd | Inversion of semiconductor element pellet |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS554540U (en) | 1980-01-12 |
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