CN210081362U

CN210081362U - Conveying device for processing substrate

Info

Publication number: CN210081362U
Application number: CN201920239682.XU
Authority: CN
Inventors: 白井明
Original assignee: Shirai Tech Ltd
Current assignee: Shirai Tech Ltd
Priority date: 2018-07-20
Filing date: 2019-02-25
Publication date: 2020-02-18
Anticipated expiration: 2029-02-25
Also published as: JP3218285U; TWM582234U

Abstract

The utility model provides a handling device of processing base plate can remove the transport under making the dirty or impaired of substrate surface. The utility model discloses a solve mechanism and be a handling device of processing base plate, include: a first platform B comprising parallel bars 2; a suction holding mechanism D for the substrate A on the bar 2; a moving body G moving between the first platform B and the front of the first platform B by a forward and backward moving mechanism F; receiving and transferring bars 20 which are embedded between the bars 2 of the first platform B on the upper side of the moving body G and are arranged in parallel; a forward/backward moving body H which moves up and down by a lifting mechanism I of the moving body G and slides the transfer receiving bar 20 forward and backward; a suction holding mechanism D for receiving the substrate A on the transfer bar 20; and a second platform J, which is provided with a receiving bar 21 that is arranged in parallel and receives the transfer bar 20, a suction pad 42 that sucks the central part of the lower surface of the substrate A between the receiving bars 21, an air ejection hole 41 for floating the substrate A provided in the receiving bar 21, and a rotation mechanism 43 that rotates the suction pad 42 by 90 DEG, and is fitted in front of the moving body G.

Description

Conveying device for processing substrate

Technical Field

The present invention relates to a carrying device for cutting a glass substrate (liquid crystal panel) or grinding an edge.

Background

For example, when cutting a glass substrate or polishing four edges, the substrate needs to be transported to a processing apparatus. The substrate is also carried out after the processing to take out the substrate.

In the substrate transfer method, the substrate is supplied to the upper stage first or second stage, and the opposite second edges of the substrate are ground by the grinding stones during the forward movement, while the lower stage empty first or second stage is moved back to the substrate supply side, and the empty first and second stages after the forward movement is stopped and the substrate transfer is completed are lowered by the elevating mechanism, and the empty first and second stages after the forward movement is stopped are raised by the elevating mechanism for receiving the substrate, so that the first and second stages can be effectively operated and used (see patent document 1).

Further, the upper surface of the substrate is sucked and held by a suction pad of a suction holding device of the transfer device, and the substrate is supplied to and taken out from the first stage and the second stage of patent document 1.

The suction holder is rotated by 90 DEG by a motor, and the direction of the edge of the substrate is changed.

[ background Art document ]

[ patent document ]

Patent document 1: japanese utility model registration No. 3216866.

SUMMERY OF THE UTILITY MODEL

[ problems to be solved by the present invention ]

Further, according to the transfer method of patent document 1, since the substrate surface (upper surface at the time of carrying) is supported and transferred by suction, the substrate surface is damaged, which causes a problem of defective products, and the surface is dirty due to suction holding, which requires a work of removing the dirt.

Accordingly, the present invention provides a conveying device that solves the above problems.

[ means for solving the problems ]

In order to solve the above problem, the present invention adopts a configuration including:

a conveying device for processing a substrate is characterized by comprising:

the first platform is formed by horizontal bars, two ends of which are arranged in the front-back direction and are spaced and arranged in parallel at left and right;

a suction holding mechanism provided to suck and hold the substrate received on the bar on the first table;

a movable body which is provided between the first platform and the front of the first platform and is guided by a guide mechanism, and is provided in a manner of moving back and forth by a forward and backward movement mechanism;

a plurality of receiving and transferring bars which are arranged on the upper side of the moving body in a manner that two ends face to the front and back direction and are arranged in parallel at intervals at the left and right and are embedded between the bars of the first platform;

a reversible advancing/retreating mechanism which is provided so as to be capable of being lifted by the lifting mechanism of the movable body and which slides the transfer receiving bar in the forward and backward directions;

the suction holding means is provided to suck and hold the substrate received on each of the receiving and transferring bars from the receiving and transferring bar; and

a second stage, the second stage being formed of the following components:

a receiving bar arranged in front of the moving body such that both ends thereof are arranged in parallel in the front-rear direction and the receiving bar is fitted between the parallel rows;

a suction pad provided to suck a central portion of a lower surface of the substrate provided between the parallel receiving bars at a central side of the parallel receiving bars;

an air ejection hole capable of floating the substrate provided on the receiving bar; and

and a rotation mechanism which is arranged in a manner that the suction pad can rotate 90 degrees.

[ efficacy of the utility model ]

As described above, according to the substrate conveying apparatus of the present invention, the substrates fed onto the bars on the first stage are moved back by the moving body and then the lifting mechanism lifts each of the parallel receiving transfer bars, so that the substrates are received on the receiving transfer bars, and then the receiving transfer bars are moved forward by the reversible advancing and retracting mechanism while the receiving transfer bars are moved forward, and then the receiving transfer bars are lowered by the lifting mechanism, so that the substrates can be transferred onto the receiving bars on the second stage, and thus the substrates can be conveyed without damaging or contaminating the upper surfaces of the substrates.

Then, the suction pad is rotated by 90 ° by the rotation mechanism, thereby rotating the substrate sucking the central portion of the lower surface of the substrate by 90 °. In this case, since the substrate is floated by blowing air upward from the blowing holes of the receiving bar, the receiving bar is prevented from contacting the lower surface of the substrate, and the substrate can be smoothly rotated by 90 degrees to change the directions of the four sides of the substrate.

Then, after rotating the substrate by 90 degrees, the air injection from the injection holes is stopped, and the substrate is received on the receiving bar of the second stage, and thereafter the receiving transfer bar is moved to the rear side by the reversible advancing/retreating moving mechanism, and the moving body is moved to the rear side, and the receiving transfer bar is retreated between the bars of the first stage, and the substrate is sent directly above the bars, and thereafter the receiving transfer bar is lowered by the elevating mechanism, and the substrate is received on the bars of the first stage.

Therefore, the substrate can be conveyed without being damaged or stained after rotating 90 degrees, and the substrate conveying device has more effect when conveying large-sized and heavy substrates.

Drawings

The partially omitted side view of fig. 1 shows an embodiment of the present invention.

Fig. 2 is a plan view as above.

Fig. 3 is a front view.

The partially-omitted enlarged side view of fig. 4 shows the essential part of the first stage portion as described above.

Fig. 5 is an enlarged side view showing a state where the substrate is conveyed on the second stage.

Fig. 6 is a side view showing a state where the substrate is conveyed directly above the receiving bar of the second table.

Fig. 7 is a side view showing a state where the substrate is received by the receiving bar of the second table.

Description of reference numerals: a-a substrate; b-a first platform; c-floor; d-a suction holding mechanism; e-a guide mechanism; f-a forward and backward moving mechanism; g-a mobile body; h-an advancing-retreating movable body; i-a lifting mechanism; j-a second platform; 1-a foot material; 2-bar material; 3-small holes; 4-orbit; 5-a slide; 6-male screw; 7-female screws; 8-a motor; 9-a pulley; 10-timing belt; 11-a motor; 12-running the pulley; 13-frame; 14-a plate; 15-a slide; 16-a track; 17-a motor; 18-male screws; 19-female screws; 20-receiving the transfer bar; 21-receiving the rod; 25-a mounting tool; 41-jet hole; 42-a suction pad; 43-a rotation mechanism; 44-a substrate; 45-suction hole.

Detailed Description

Next, an embodiment of the present invention will be described with reference to fig. 1 to 7 of the drawings.

In the drawings, a is, for example, a glass substrate (e.g., a liquid crystal panel), and the present invention is intended to convey a large substrate, for example, a substrate a of 3500mm × 3200mm, without damaging or staining the surface (upper surface in the drawing).

B is a first platform to receive the underside of substrate a.

The first platform B is formed by a horizontal bar 2 on the upper end of a leg member 1 erected from a floor C, and the horizontal bar 2 is arranged with its both ends facing in the front-rear direction and spaced apart from each other in the left-right direction.

Furthermore, a suction holding mechanism D is provided on the upper surface of the parallel bar 2 of the first stage B for sucking and holding the lower surface of the receiving substrate A placed thereon.

As shown in fig. 2, the suction holding means D sucks and holds the hollow square tube by providing numerous small holes 3 in the upper surface of the hollow square tube and sucking the tube (sucking the tube with a hose connected to the tube).

When the suction holding is released, the suction holding is released by pressing air from the hose into the tube.

A moving body G is provided between the first platform B and the front of the first platform B, and is guided by a guide mechanism E and moved back and forth by a forward and backward moving mechanism F.

In the figure, the guide mechanism E is constituted by a rail 4 laid on the floor C and a slider 5 slidably engaged with the rail 4 and provided under the moving body G, but is not limited thereto.

In the drawing, the forward and backward movement mechanism F is composed of a male screw 6 which is rotatably supported on both ends of the rail 4, a female screw 7 which is screwed to the male screw 6 and supported by the movable body G, and a motor 8 which reversibly drives the male screw 6, and the forward and backward movement is performed by operating the male screw 6 with the motor 8.

A movable body H having both ends moving forward and backward is disposed above the movable body G, and the movable body H is moved up and down by a lift mechanism I provided in the movable body G.

As shown in fig. 1, the forward/backward moving body H is configured such that a timing belt 10 is hung on the front and rear pulleys 9, and the timing belt 10 is engaged with a pulley 12 operated by a motor 11 and moved backward toward the loading side of the timing belt 10 on the way of the return side of the timing belt 10.

In the drawing, as the lifting mechanism I, a slider 15 is slidably engaged with a longitudinal rail 16 of the movable body G, the slider 15 is provided above and below a plate 14, the plate 14 protrudes downward from an installation frame 13 of the advancing and retreating movable body H, a female screw 19 supported by the plate 14 is screwed to a male screw 18 which can rotate reversibly by the operation of a motor 17 attached to the movable body G, and the advancing and retreating movable body H is lifted and lowered together with the plate 14, and the plate 14 is lifted and lowered by the reversible operation of the motor 17, but the lifting mechanism I is not limited thereto, and the advancing and retreating movable body H can be moved in the front-rear direction by another mechanism.

Next, the advancing/retreating moving body H is provided with the receiving/transferring bars 20 arranged in parallel (with both ends facing in the front-rear direction), which are raised from the lowered state as the frame 13 is raised, fitted between the bars 2 of the first platform B, and passed upward.

In this way, the substrate a on the bar 2 on the first stage B is received so as to be transferred onto the ascending receiving transfer bar 20 (see fig. 4).

The parallel receiving/transferring bar 20 is moved upward together with the advancing/retreating moving body H (in the illustrated case, the mounting tool 25 is movably connected in the front-rear direction on the carrying side of the timing belt 10), and is transferred from the bar 2 to the receiving/transferring bar 20 (see fig. 1 to 4).

Of course, since the receiving/transferring bar 20 is provided with the same suction/holding mechanism D as the bar 2, the substrate a on the receiving/transferring bar 20 is sucked and held.

A second platform J is provided ahead of the moving body G when the moving body G stops moving, and receives the substrate A on the transfer bar 20.

The second platform J is arranged with the receiving bar materials 21 in parallel at a position lower than the receiving transfer bar materials 20 in the elevation stop state, and the receiving transfer bar materials 21 are inserted into the receiving transfer bar materials 20 in parallel with the lowering of the advancing and retreating moving body H.

Then, the parallel receiving bar 21 is provided with a discharge hole 41 for floating the received substrate A.

The ejection holes 41 are made of a tube (square tube) for sealing both ends of the receiving bar 21, air is pushed into the tube, and the air is ejected from the ejection holes 41 provided on the upper wall of the tube, so that the receiving substrate a is rotated by 90 ° and floated.

The floating-up preventing bar 21 contacts the inner surface of the substrate A, so that the substrate A can be smoothly rotated by 90 deg. I.e. the direction of the two opposite edges of the substrate a is changed.

A suction pad 42 is provided between the two rows of the

parallel receiving rods

21, 21 on the center side of the parallel receiving rods 21, and sucks the center of the lower surface of the substrate A, and the suction pad 42 is rotated by 90 DEG by a motor of a rotating mechanism 43.

As shown in fig. 2, the suction pad 42 is mounted on a base 44, the base 44 is rotated by 90 ° by a rotating mechanism 43, the suction pad 42 is hollow and provided with a large number of suction holes 45 in the top wall of the flat case, and the substrate a is sucked and held on the suction pad 42.

With the above configuration, the substrate a on the bar 2 on the first stage B is moved to the receiving transfer bar 20 raised by the raising and lowering mechanism I by the operation.

Thereafter, the frame 13 of the forward-backward moving body H is moved forward while the moving body G is moved forward by the forward-backward moving mechanism F, and the receiving substrate a is sent forward (as shown in fig. 5).

After the transfer, the receiving/transferring bar 20 is moved forward while the advancing/retreating moving body H is moved forward, and the receiving/transferring bar 20 receiving the substrate a is further fed forward, so that the receiving/transferring bar 20 is positioned between the parallel receiving bars 21 (as shown in fig. 6).

In this state, the receiving transfer bar 20 is lowered together with the advancing/retreating movable body H by the elevating mechanism I, and the substrate a on the receiving transfer bar 20 is lowered onto the receiving bar 21 and received (as shown in fig. 7).

Thereafter, the forward/backward moving mechanism F moves the forward/backward moving body H forward/backward and moves the same to the first stage B.

The substrate A is moved forward by the advancing and retreating moving body H together with the moving body G, and the substrate A on the receiving bar 21 is received on the receiving transfer bar 20 (the receiving operation is performed by the elevating mechanism I and the advancing and retreating moving body H) and is then carried out backward.

The substrate A is ground on the left and right opposite sides during the forward movement, and after rotating by 90 degrees, the other opposite side left and right during the backward movement is ground or scribed to cut the X, Y direction cutting line on the upper surface of the substrate A.

The substrate a is carried in (supplied) to the first surface plate B by, for example, a conveyor belt, and the substrate a returned to the first surface plate B after processing is taken out (removed) by, for example, a conveyor belt (not shown).

The purpose of this apparatus is, of course, to prevent the surface of the substrate a from being damaged (the surface does not become dirty).

Claims

1. A conveying device for processing a substrate is characterized by comprising:

a second stage, the second stage being formed of the following components:

a receiving bar arranged in front of the moving body such that both ends thereof are arranged in parallel in the front-rear direction and the receiving transfer bar is fitted between the parallel receiving bars;