JPS5830605A - 表面被膜厚さ測定方法 - Google Patents
表面被膜厚さ測定方法Info
- Publication number
- JPS5830605A JPS5830605A JP12906281A JP12906281A JPS5830605A JP S5830605 A JPS5830605 A JP S5830605A JP 12906281 A JP12906281 A JP 12906281A JP 12906281 A JP12906281 A JP 12906281A JP S5830605 A JPS5830605 A JP S5830605A
- Authority
- JP
- Japan
- Prior art keywords
- surface coating
- thickness
- film
- measured
- steel plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 23
- 239000000463 material Substances 0.000 claims abstract description 18
- 230000031700 light absorption Effects 0.000 claims abstract description 5
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 3
- 238000000576 coating method Methods 0.000 claims description 81
- 239000011248 coating agent Substances 0.000 claims description 79
- 239000000126 substance Substances 0.000 claims description 12
- 238000009675 coating thickness measurement Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 abstract description 34
- 239000010959 steel Substances 0.000 abstract description 34
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 abstract description 19
- 229910000423 chromium oxide Inorganic materials 0.000 abstract description 19
- 238000005259 measurement Methods 0.000 abstract description 13
- 229910001335 Galvanized steel Inorganic materials 0.000 abstract 2
- 239000008397 galvanized steel Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 15
- 229910052804 chromium Inorganic materials 0.000 description 15
- 239000011651 chromium Substances 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 8
- 239000010410 layer Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000011088 calibration curve Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000000572 ellipsometry Methods 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- 239000002345 surface coating layer Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000576 Laminated steel Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 230000002262 irrigation Effects 0.000 description 1
- 238000003973 irrigation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000985 reflectance spectrum Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12906281A JPS5830605A (ja) | 1981-08-18 | 1981-08-18 | 表面被膜厚さ測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12906281A JPS5830605A (ja) | 1981-08-18 | 1981-08-18 | 表面被膜厚さ測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5830605A true JPS5830605A (ja) | 1983-02-23 |
| JPS6217166B2 JPS6217166B2 (enrdf_load_stackoverflow) | 1987-04-16 |
Family
ID=15000139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12906281A Granted JPS5830605A (ja) | 1981-08-18 | 1981-08-18 | 表面被膜厚さ測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5830605A (enrdf_load_stackoverflow) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6017304A (ja) * | 1983-07-08 | 1985-01-29 | Mitsubishi Heavy Ind Ltd | 不溶性液の薄膜厚測定法 |
| US4957370A (en) * | 1984-06-21 | 1990-09-18 | Kabushiki Kaisha Toshiba | Method and apparatus for determining the degree of oxidation of an oxide coating |
| FR2674325A1 (fr) * | 1991-03-18 | 1992-09-25 | Lorraine Laminage | Procede et dispositif de mesure d'une epaisseur d'un revetement sur un substrat metallique. |
| EP0428717A4 (en) * | 1989-05-09 | 1993-06-09 | Richard Joseph Weniger | Optical sensor for detecting quantity of protective coating |
| FR2695721A1 (fr) * | 1992-09-15 | 1994-03-18 | Glaverbel | Contrôle de l'épaisseur de couches minces. |
| JP2011154002A (ja) * | 2010-01-28 | 2011-08-11 | Mitsubishi Heavy Ind Ltd | 管内スケール計測装置及び計測方法 |
| CN104359412A (zh) * | 2014-10-01 | 2015-02-18 | 上海光刻电子科技有限公司 | 光刻掩模版铬膜厚度测量方法 |
| JP2021177155A (ja) * | 2020-05-08 | 2021-11-11 | コニカミノルタ株式会社 | 被覆率検出装置、画像形成装置、被覆率検出方法、および被覆率検出プログラム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49120261U (enrdf_load_stackoverflow) * | 1973-02-09 | 1974-10-15 | ||
| JPS5066266A (enrdf_load_stackoverflow) * | 1973-10-12 | 1975-06-04 |
-
1981
- 1981-08-18 JP JP12906281A patent/JPS5830605A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49120261U (enrdf_load_stackoverflow) * | 1973-02-09 | 1974-10-15 | ||
| JPS5066266A (enrdf_load_stackoverflow) * | 1973-10-12 | 1975-06-04 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6017304A (ja) * | 1983-07-08 | 1985-01-29 | Mitsubishi Heavy Ind Ltd | 不溶性液の薄膜厚測定法 |
| US4957370A (en) * | 1984-06-21 | 1990-09-18 | Kabushiki Kaisha Toshiba | Method and apparatus for determining the degree of oxidation of an oxide coating |
| EP0428717A4 (en) * | 1989-05-09 | 1993-06-09 | Richard Joseph Weniger | Optical sensor for detecting quantity of protective coating |
| FR2674325A1 (fr) * | 1991-03-18 | 1992-09-25 | Lorraine Laminage | Procede et dispositif de mesure d'une epaisseur d'un revetement sur un substrat metallique. |
| FR2695721A1 (fr) * | 1992-09-15 | 1994-03-18 | Glaverbel | Contrôle de l'épaisseur de couches minces. |
| BE1006795A3 (fr) * | 1992-09-15 | 1994-12-13 | Glaverbel | Controle de l'epaisseur de couches minces. |
| US5396080A (en) * | 1992-09-15 | 1995-03-07 | Glaverbel | Thin film thickness monitoring with the intensity of reflected light measured at at least two discrete monitoring wavelengths |
| JP2011154002A (ja) * | 2010-01-28 | 2011-08-11 | Mitsubishi Heavy Ind Ltd | 管内スケール計測装置及び計測方法 |
| CN104359412A (zh) * | 2014-10-01 | 2015-02-18 | 上海光刻电子科技有限公司 | 光刻掩模版铬膜厚度测量方法 |
| CN104359412B (zh) * | 2014-10-01 | 2017-05-24 | 上海光刻电子科技有限公司 | 光刻掩模版铬膜厚度测量方法 |
| JP2021177155A (ja) * | 2020-05-08 | 2021-11-11 | コニカミノルタ株式会社 | 被覆率検出装置、画像形成装置、被覆率検出方法、および被覆率検出プログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6217166B2 (enrdf_load_stackoverflow) | 1987-04-16 |
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