JPS5828167Y2 - 三点式真直度測定装置 - Google Patents
三点式真直度測定装置Info
- Publication number
- JPS5828167Y2 JPS5828167Y2 JP17490581U JP17490581U JPS5828167Y2 JP S5828167 Y2 JPS5828167 Y2 JP S5828167Y2 JP 17490581 U JP17490581 U JP 17490581U JP 17490581 U JP17490581 U JP 17490581U JP S5828167 Y2 JPS5828167 Y2 JP S5828167Y2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- deviation
- axis
- point
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17490581U JPS5828167Y2 (ja) | 1981-11-24 | 1981-11-24 | 三点式真直度測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17490581U JPS5828167Y2 (ja) | 1981-11-24 | 1981-11-24 | 三点式真直度測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57116813U JPS57116813U (de) | 1982-07-20 |
JPS5828167Y2 true JPS5828167Y2 (ja) | 1983-06-20 |
Family
ID=29967037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17490581U Expired JPS5828167Y2 (ja) | 1981-11-24 | 1981-11-24 | 三点式真直度測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5828167Y2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4376545B2 (ja) * | 2003-05-14 | 2009-12-02 | Ntn株式会社 | 円すいころ軸受の円すい面形状測定方法 |
-
1981
- 1981-11-24 JP JP17490581U patent/JPS5828167Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS57116813U (de) | 1982-07-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2764103B2 (ja) | アナログ測定プローブの使用方法および位置決め装置 | |
US3944798A (en) | Method and apparatus for measuring direction | |
US5798828A (en) | Laser aligned five-axis position measurement device | |
US7526873B2 (en) | Use of surface measurement probes | |
JPH03180711A (ja) | プローブならびに連続の測定プローブを較正するための方法および装置ならびに案内手段 | |
US5390424A (en) | Analogue probe | |
CA1336532C (en) | Probe motion guiding device, position sensing apparatus and position sensing method | |
JP4964691B2 (ja) | 被測定面の測定方法 | |
JPS5828167Y2 (ja) | 三点式真直度測定装置 | |
JP4980818B2 (ja) | 多点プローブの零点誤差の変動検出方法 | |
JPH10103905A (ja) | 測定方法 | |
JP5858673B2 (ja) | 位置計測装置、光学部品の製造方法、及び型の製造方法 | |
JP3126101B2 (ja) | 当接型測定器 | |
JPH04140691A (ja) | 位置決め装置 | |
JPS63175716A (ja) | 歯形誤差測定装置 | |
JPS5870101A (ja) | 曲率半径測定装置 | |
JPS6288904A (ja) | 変位・回転検出方法及び姿勢制御装置 | |
JPS62274202A (ja) | Nc旋盤のレ−ザ計測装置 | |
JP2003232625A (ja) | 真直度測定法 | |
JPH02210206A (ja) | 円の中心割り出し方法 | |
JPH07286830A (ja) | 面形状測定方法 | |
Zhang et al. | Distance-distance method for straightness measurement | |
CN115248533A (zh) | 运动台系统及光刻设备 | |
JP2000317776A (ja) | 工作機械 | |
KR920010575B1 (ko) | 로보트의 미세한 위치설정을 위한 위치보정시스템 |