JPS5826170B2 - ウエハ処理方法 - Google Patents

ウエハ処理方法

Info

Publication number
JPS5826170B2
JPS5826170B2 JP48060892A JP6089273A JPS5826170B2 JP S5826170 B2 JPS5826170 B2 JP S5826170B2 JP 48060892 A JP48060892 A JP 48060892A JP 6089273 A JP6089273 A JP 6089273A JP S5826170 B2 JPS5826170 B2 JP S5826170B2
Authority
JP
Japan
Prior art keywords
jig
wafer
etching
cleaning
processing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48060892A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5011670A (OSRAM
Inventor
俊比古 高柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP48060892A priority Critical patent/JPS5826170B2/ja
Publication of JPS5011670A publication Critical patent/JPS5011670A/ja
Publication of JPS5826170B2 publication Critical patent/JPS5826170B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP48060892A 1973-06-01 1973-06-01 ウエハ処理方法 Expired JPS5826170B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48060892A JPS5826170B2 (ja) 1973-06-01 1973-06-01 ウエハ処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48060892A JPS5826170B2 (ja) 1973-06-01 1973-06-01 ウエハ処理方法

Publications (2)

Publication Number Publication Date
JPS5011670A JPS5011670A (OSRAM) 1975-02-06
JPS5826170B2 true JPS5826170B2 (ja) 1983-06-01

Family

ID=13155450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48060892A Expired JPS5826170B2 (ja) 1973-06-01 1973-06-01 ウエハ処理方法

Country Status (1)

Country Link
JP (1) JPS5826170B2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164548U (OSRAM) * 1980-05-08 1981-12-07

Also Published As

Publication number Publication date
JPS5011670A (OSRAM) 1975-02-06

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