JPS5011670A - - Google Patents
Info
- Publication number
- JPS5011670A JPS5011670A JP6089273A JP6089273A JPS5011670A JP S5011670 A JPS5011670 A JP S5011670A JP 6089273 A JP6089273 A JP 6089273A JP 6089273 A JP6089273 A JP 6089273A JP S5011670 A JPS5011670 A JP S5011670A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48060892A JPS5826170B2 (ja) | 1973-06-01 | 1973-06-01 | ウエハ処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48060892A JPS5826170B2 (ja) | 1973-06-01 | 1973-06-01 | ウエハ処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5011670A true JPS5011670A (OSRAM) | 1975-02-06 |
| JPS5826170B2 JPS5826170B2 (ja) | 1983-06-01 |
Family
ID=13155450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48060892A Expired JPS5826170B2 (ja) | 1973-06-01 | 1973-06-01 | ウエハ処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5826170B2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56164548U (OSRAM) * | 1980-05-08 | 1981-12-07 |
-
1973
- 1973-06-01 JP JP48060892A patent/JPS5826170B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56164548U (OSRAM) * | 1980-05-08 | 1981-12-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5826170B2 (ja) | 1983-06-01 |