JPS5826075A - Low heat expansion heater composition - Google Patents
Low heat expansion heater compositionInfo
- Publication number
- JPS5826075A JPS5826075A JP56123238A JP12323881A JPS5826075A JP S5826075 A JPS5826075 A JP S5826075A JP 56123238 A JP56123238 A JP 56123238A JP 12323881 A JP12323881 A JP 12323881A JP S5826075 A JPS5826075 A JP S5826075A
- Authority
- JP
- Japan
- Prior art keywords
- weight
- thermal expansion
- composition
- low heat
- heat expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ceramic Products (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は急熱急冷に強い低熱膨張発熱体組成物に係るも
のである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a low thermal expansion heating element composition that is resistant to rapid heating and cooling.
従来よりニクロム線、タングステン線、モリブデン線、
ＳｉＣ等のヒータが熱源として利用されてきた。し
かしながら、これらの最大の欠点は急熱急冷により断線
する事であった。また、５ｉＣ−ユクリプタイ） −５
ｉ０２ 、粘土質物質等より成る低熱膨張発熱体は、Ｓ
ｉＣの性格上低電気抵抗を得る事ができなかった。Conventionally, nichrome wire, tungsten wire, molybdenum wire,
Heaters such as SiC have been used as heat sources. However, the biggest drawback of these was that they could break due to rapid heating and cooling. Also, 5iC-Ucryptai) -5
i02, a low thermal expansion heating element made of clay material, etc.
Due to the nature of iC, it was not possible to obtain low electrical resistance.
これらの解決には、材料面より熱膨張係数が小さく、低
電気抵抗の発熱体組成を開発する事である。To solve these problems, it is necessary to develop a heating element composition that has a smaller coefficient of thermal expansion than the material and has a lower electric resistance.
の組成物を提供するものである。The present invention provides a composition of the invention.
すなわち、本発明に係る低熱膨張発熱体組成物はＴｉＣ
、ＴｉＮ 、 Ｗ Ｃ、ＺｒＣ、ＺｒＮの１種または２
種以上を合計３８〜８０重量％、ユークリプタイト （
Ｌｉ２Ｏ・ Ａｊ！２０３ ・ ２Ｓｉ０２
） ： １ ８〜６０ 重ｈ１％、 ＺｎＯ，Ｓ
ｒＯ，ＢａＯ、５ｉ０２ 、 ＴｉＯ２、Ａｊ！２０ｓ
、 Ｌｉ２Ｏ。That is, the low thermal expansion heating element composition according to the present invention is TiC
, TiN, WC, ZrC, or one or two of ZrN
A total of 38-80% by weight of seeds and above, Eucryptite (
Li2O・Aj! 203 ・2Si02
): 1 8~60 Weight h1%, ZnO,S
rO, BaO, 5i02, TiO2, Aj! 20s
, Li2O.
Ｎａ２Ｏ，Ｆｅ２Ｏ３，Ｃｒ２Ｏ５，ＣａＯ９ｚｒＯ２
ノ１種マタハ２種以上を合計５重量％以下の成分範囲よ
り成り、合計が１００重量％である事を特徴とする。Na2O, Fe2O3, Cr2O5, CaO9zrO2
It is characterized in that it consists of a total of 5% by weight or less of two or more types of Mataha, and the total is 100% by weight.
該炭化物、窒化物とユークリプタイトの反応は該成分と
Ｌｉ ２０成分間の反応が主であるがその反応量は少量
である。また、該反応により、炭化物。The reaction between the carbide, nitride and eucryptite is mainly a reaction between the component and the Li20 component, but the amount of reaction is small. In addition, the reaction produces carbide.
窒化物とユークリプタイト間に該反応生成物が存在し、
両者の熱膨張係数差による歪み緩和の働きをする。そし
て、結晶相吉しては炭化物、窒化物とユークリプタイト
が大部分を占めることになる。The reaction product exists between nitride and eucryptite,
It works to relieve strain due to the difference in thermal expansion coefficient between the two. The majority of crystals are carbides, nitrides, and eucryptite.
従って下記の第１表に示す如く熱膨張係数差の異なる炭
化物、窒化物とユークリプタイトが共存するため、熱膨
張効果か相殺される。Therefore, as shown in Table 1 below, since carbides, nitrides, and eucryptite, which have different thermal expansion coefficients, coexist, the thermal expansion effects are canceled out.
〈第１表〉
上記範囲内の組成により、熱膨張係数が小さく旧一つ低
電気抵抗の発熱体を得ることができる。<Table 1> With the composition within the above range, it is possible to obtain a heating element with a small coefficient of thermal expansion and a low electrical resistance.
尚上記組成において、ＴｉＣ、ＴｉＮ 、 Ｗ Ｇ 、
ＺｒＣ。In the above composition, TiC, TiN, W G ,
ZrC.
ＺｒＮの１種または２種以」二の合計が３８重ＩＪ４％
未満では電気抵抗値か上昇し、８０重量％を超えると焼
結性の低下及び熱膨張係数の一ヒ昇が起こる。The total of one or more types of ZrN is 38-fold IJ4%
If it is less than 80% by weight, the electrical resistance value increases, and if it exceeds 80% by weight, the sinterability decreases and the coefficient of thermal expansion increases.
また、ユークリプタイトが１８重最％未満では熱膨張係
数か上昇し、６０重量％を超えると電気抵抗値が上昇し
、且つ熱膨張係数は低下する。さらに、ＴｉＯ２，ＡＪ
２０５． Ｌｉ２Ｏ，ＺｒＯ２，Ｎａ２Ｏ，Ｆｅ２Ｏ
３゜Ｃｒ、０５ 、 ＺｎＯ、ＳｒＯ、ＢａＯ、５ｉ０
２ 、 ＣａＯの１種または２種以上の合計が５重量％
を超えると熱膨張係数が上昇する。Furthermore, if the eucryptite content is less than 18% by weight, the thermal expansion coefficient increases, and if it exceeds 60% by weight, the electrical resistance value increases and the thermal expansion coefficient decreases. Furthermore, TiO2, AJ
205. Li2O, ZrO2, Na2O, Fe2O
3゜Cr, 05, ZnO, SrO, BaO, 5i0
2. The total amount of one or more types of CaO is 5% by weight
If it exceeds , the coefficient of thermal expansion increases.
以上記述した如く、発熱体としては急熱急冷という過酷
な条件下で使用するため、熱膨張係数。As described above, the coefficient of thermal expansion is high because the heating element is used under harsh conditions of rapid heating and cooling.
耐熱性、電気抵抗値等との関連性が非常に重要であるが
、これら条件を満足する材料として本発明範囲内の組成
物を提供するものである。The relationship with heat resistance, electrical resistance, etc. is very important, and the composition within the scope of the present invention is provided as a material that satisfies these conditions.
以下、本発明を実施例を挙げ具体的に説明する。Hereinafter, the present invention will be specifically explained with reference to Examples.
試料の調整工程としては工業用原料（純度９９％以上）
であるＴｉｅ 、 ＴｉＮ 、 Ｗ Ｃ、ＺｒＣ、Ｚ
ｒＮ 。For the sample preparation process, industrial raw materials (purity of 99% or more) are used.
Tie, TiN, W C, ZrC, Z
rN.
ユークリプタイト、 ５ｉ０２ 、 ＣａＯ、Ｚｎ
Ｏ、ＳｒＯ。Eucryptite, 5i02, CaO, Zn
O, SrO.
Ｂａｄ、 Ｆｅ２Ｏ５，Ａ７：２０３． Ｃｒ２Ｏ
５，ＴｉＯ２，ＺｒＯ２゜Ｎａ２Ｏ、Ｌｉ２Ｏを用い、
混合は不純物混入防止のためウレタン内張ポットを用い
湿式混合した。試料作成の手順としては下記の第２表及
び第３表に示す組成比になるよう原料を調合し、その後
湿式押し出し成型機を用い成型した。Bad, Fe2O5, A7:203. Cr2O
5. Using TiO2, ZrO2゜Na2O, Li2O,
The mixture was wet-mixed using a urethane-lined pot to prevent contamination with impurities. The sample preparation procedure was to mix raw materials to have the composition ratios shown in Tables 2 and 3 below, and then mold them using a wet extrusion molding machine.
焼成はＡｒガス中１３０ｏ〜１４５００Ｃの間で行い、
１ｏ−×２ｏｏ′ヶの形状とした。得られた素子は下記
の第４表のような各緒特性を示した。Firing was performed in Ar gas at a temperature of 130° to 14,500°C.
The shape was 1o-x2oo'. The obtained device exhibited various characteristics as shown in Table 4 below.
〈第４表〉
ここで、第４表の試料Ａ１１〜１４は従来例であり、そ
れぞれニクロム線、タングステン積層型セラミックヒー
タ、ＳｉＣヒータ、５ｉＣ−ユークリプタイト系ヒータ
である。試料屋１４の形状は本実施例と同一の１０φユ
×２００’ｍｍである。<Table 4> Here, samples A11 to A14 in Table 4 are conventional examples, and are respectively a nichrome wire, a tungsten laminated ceramic heater, a SiC heater, and a 5iC-eucryptite heater. The shape of the sample chamber 14 is the same as in this embodiment, 10 mm x 200 mm.
第２表〜第４表より明らかなように本発明範囲内の実施
例は屋１〜Ａ７迄であり、他は範囲外の比較例及び従来
例である。As is clear from Tables 2 to 4, Examples 1 to A7 are within the scope of the present invention, and the others are comparative examples and conventional examples outside the scope.
本発明範囲内の試料は低い熱膨張係数及び優れた熱衝撃
性を示している。また、試料屋８〜１４は範囲外及び従
来例であり、熱衝撃性、電気゛向性質等が悪いものであ
った。Samples within the scope of the invention exhibit low coefficients of thermal expansion and excellent thermal shock properties. Moreover, samples 8 to 14 were outside the range and were conventional examples, and had poor thermal shock resistance, electrical direction properties, etc.
以上のように、本発明範囲内の組成物は、発熱体として
優れた性能を備えており、工業的量産化においても著し
く安定であり、産業的価値の大なるものである。As described above, the composition within the scope of the present invention has excellent performance as a heating element, is extremely stable even in industrial mass production, and has great industrial value.
Claims (1)
１種または２種以上を合計３８〜８０重量％、ユークリ
プタイ） （Ｌｉ２Ｏ−ｇ２ｏ５ Ｈ２Ｓｉ０２
） ： １ ８〜６０重量％、 ＺｎＯ，ＳｒＯ，
Ｂａｄ、 ５ｉ０２． ＴｉＯ２，ＡＪ２０３゜Ｌｉ２
Ｏ，Ｎａ２Ｏ，Ｆ９２０５． Ｃｒ２Ｏ５，Ｃａｂ、
ＺｒＯ２の１種または２種以」二を合計５重量％以下の
成分範囲より成り、合計が１００重量％になる組成物を
焼結してなる事を特徴とする低熱膨張発熱体組成物。A total of 38 to 80% by weight of one or more of TiC, TiN, W C, ZrG, and ZrN, Eucrypti) (Li2O-g2o5 H2Si02
): 18 to 60% by weight, ZnO, SrO,
Bad, 5i02. TiO2, AJ203゜Li2
O, Na2O, F9205. Cr2O5, Cab,
1. A low thermal expansion heating element composition, characterized in that it is obtained by sintering a composition comprising one or more ZrO2 components in a total amount of 5% by weight or less, the total amount being 100% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56123238A JPS5826075A (en) | 1981-08-05 | 1981-08-05 | Low heat expansion heater composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56123238A JPS5826075A (en) | 1981-08-05 | 1981-08-05 | Low heat expansion heater composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5826075A true JPS5826075A (en) | 1983-02-16 |
Family
ID=14855611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56123238A Pending JPS5826075A (en) | 1981-08-05 | 1981-08-05 | Low heat expansion heater composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5826075A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03290352A (en) * | 1990-04-05 | 1991-12-20 | Gifu Pref Gov | High-strength ceramics having low thermal expansion and production thereof |
| WO2001094272A1 (en) * | 2000-06-06 | 2001-12-13 | Nippon Steel Corporation | Electrically conductive ceramic sintered compact exhibiting low thermal expansion |
| WO2002024600A1 (en) * | 2000-09-20 | 2002-03-28 | Sumitomo Metal Industries, Ltd. | Low thermal expansion ceramic and member for exposure system |
-
1981
- 1981-08-05 JP JP56123238A patent/JPS5826075A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03290352A (en) * | 1990-04-05 | 1991-12-20 | Gifu Pref Gov | High-strength ceramics having low thermal expansion and production thereof |
| WO2001094272A1 (en) * | 2000-06-06 | 2001-12-13 | Nippon Steel Corporation | Electrically conductive ceramic sintered compact exhibiting low thermal expansion |
| US6953538B2 (en) * | 2000-06-06 | 2005-10-11 | Nippon Steel Corporation | Electroconductive low thermal expansion ceramic sintered body |
| WO2002024600A1 (en) * | 2000-09-20 | 2002-03-28 | Sumitomo Metal Industries, Ltd. | Low thermal expansion ceramic and member for exposure system |
| US7112549B2 (en) * | 2000-09-20 | 2006-09-26 | Sumitomo Metal Industries, Ltd. | Low thermal expansion ceramic and member for exposure system |
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