JPS5824968B2 - Onsagata Atsudenshindoushi - Google Patents

Onsagata Atsudenshindoushi

Info

Publication number
JPS5824968B2
JPS5824968B2 JP50114505A JP11450575A JPS5824968B2 JP S5824968 B2 JPS5824968 B2 JP S5824968B2 JP 50114505 A JP50114505 A JP 50114505A JP 11450575 A JP11450575 A JP 11450575A JP S5824968 B2 JPS5824968 B2 JP S5824968B2
Authority
JP
Japan
Prior art keywords
support
base
piezoelectric body
vibrator
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50114505A
Other languages
Japanese (ja)
Other versions
JPS5248485A (en
Inventor
柿沢勉
田中節男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KINSEN KK
Original Assignee
KINSEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KINSEN KK filed Critical KINSEN KK
Priority to JP50114505A priority Critical patent/JPS5824968B2/en
Publication of JPS5248485A publication Critical patent/JPS5248485A/en
Publication of JPS5824968B2 publication Critical patent/JPS5824968B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0504Holders; Supports for bulk acoustic wave devices
    • H03H9/0514Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0519Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は発振周波数の高安定性を確保しつつ小形化を進
めた音叉形圧電振動子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a tuning fork-shaped piezoelectric vibrator that is miniaturized while ensuring high stability of oscillation frequency.

従来音叉形圧電振動子において、第1図に示すように、
平板状金属板から一体的に形成された支持部材で支持し
たものが知られているが、これは本来第2図に示す支持
方法において、支持部材2および3がそれぞれ互に分離
した丸棒状金属線であるために圧電体1に対する支持点
4の相対位置精度を出すことが困難であったのに対し、
これを解決すべく作成されたものである。
In the conventional tuning fork type piezoelectric vibrator, as shown in Fig. 1,
It is known that the supporting member is integrally formed from a flat metal plate, but this is originally the supporting method shown in FIG. Since it is a wire, it was difficult to obtain the relative positional accuracy of the support point 4 with respect to the piezoelectric body 1.
It was created to solve this problem.

これらの他にも、音叉形圧電振動子の支持構造には第3
図や第4図に示すようなものがあるが、全てその支持線
は外部への振動の漏れを防ぐために、振動の腹となる圧
電体上支持点からλ/4(λ:波長)の整数倍の長さを
もって基台上支持点において振動の節を支持するように
したものである。
In addition to these, there is also a third
There are some types as shown in Fig. 4 and Fig. 4, but in order to prevent the leakage of vibration to the outside, the support line is an integer of λ/4 (λ: wavelength) from the support point on the piezoelectric body, which is the antinode of vibration. The vibration node is supported at the support point on the base with double the length.

本発明者は、腕時計用等音叉形圧電振動子において最近
特に高まっている小形化の要請に対処すべく、圧電体上
支持点と基台との間の距離を、従来のようなλ/4より
小さくしたままで最適な支持構造を追求するうちに、第
5図に示すような支持構造によると、支持線の湾曲部付
近に振動の腹6が現われ、よって圧電体1と基台7との
間の距離をλ/4より十分小さくしても基台T上で振動
の節をとらえて支持することが可能となることを確認し
た。
In order to meet the recent growing demand for miniaturization of isotuning fork-shaped piezoelectric vibrators for wristwatches, the present inventor has decided to increase the distance between the support point on the piezoelectric body and the base from λ/4 as in the conventional case. While pursuing an optimal support structure while maintaining a smaller size, we found that with the support structure shown in FIG. It has been confirmed that even if the distance between the two is made sufficiently smaller than λ/4, it is possible to capture and support the nodes of vibration on the base T.

ところがここで、振動の漏れに対する支持状態の影響度
を知る指標となる、基台上支持点5の位置を変化させた
ときの発振周波数の変動を調べる実験を行ったところ入
その変化率が、この支持構造によると従来のものに比較
して格段に小さいこと、しかもそれには、一定の周波数
並びに支持線の幅においては、圧電体上支持点4と支持
線湾曲部との間の最短距離りが関係することが明らかと
なった。
However, when we conducted an experiment to examine the fluctuation of the oscillation frequency when the position of the support point 5 on the base was changed, which is an indicator of the degree of influence of the support state on vibration leakage, we found that the rate of change was as follows. According to this support structure, it is much smaller than the conventional one, and moreover, at a certain frequency and the width of the support line, the shortest distance between the support point 4 on the piezoelectric body and the curved part of the support line is It became clear that it was related.

このため本発明者はこの点を更に追求し、本発明を成す
に至った。
Therefore, the present inventor further pursued this point and came to accomplish the present invention.

すなわち本発明は、音叉形圧電振動子の両主面基部を支
持した支持線が、圧電体長手方向に沿って、−たん振動
子基台と反対の向きに延在し、しかる後に湾曲してその
向きを反転し、該基台に至ってそこで植設される構造を
有し、かつ該支持線の断面主寸法W(it)、圧電体上
支持点と支持線湾曲部との間の最短距離L(mのおよび
基本共振周波数f(kHz)の間にKを定数としてf
=Kw/L2(ただしに≧40(kHz−mm))の関
係があることを特徴とする音叉形圧電振動子をその主構
成とするものである。
That is, in the present invention, the support wire supporting the bases of both principal surfaces of the tuning fork-shaped piezoelectric vibrator extends along the longitudinal direction of the piezoelectric body in the opposite direction to the base of the vibrator, and then curves. It has a structure in which the direction is reversed, and the main cross-sectional dimension W (it) of the support wire is reversed, and the support wire is installed at the base, and the shortest distance between the support point on the piezoelectric body and the curved part of the support wire. f with K as a constant between L(m) and the fundamental resonant frequency f(kHz)
The main component thereof is a tuning fork-shaped piezoelectric vibrator characterized by the following relationship: =Kw/L2 (provided that ≧40 (kHz-mm)).

どこで「音叉形圧電振動子」とは主面(最も広い面をい
う)がU字状に形成され、脚部に屈曲振動を励振する電
極が配置された、水晶、タンタル酸リチウム、ニオブ酸
リチウム、圧電セラミック等の圧電体から成る振動子で
あり、脚部を連結する部分を「基部」という。
What is a "tuning fork piezoelectric vibrator"?The principal surface (the widest surface) is formed in a U-shape, and the legs are arranged with electrodes that excite bending vibration.It is made of crystal, lithium tantalate, or lithium niobate. , a vibrator made of a piezoelectric material such as piezoelectric ceramic, and the part that connects the legs is called the "base".

また「圧電体長手方向」とは圧電体の最大寸法の方向で
ある。
Furthermore, the "longitudinal direction of the piezoelectric body" is the direction of the maximum dimension of the piezoelectric body.

以下、本発明を実施例に即して具体的に説明する。Hereinafter, the present invention will be specifically explained based on examples.

第6図は本発明の一実施例である音叉形圧電振動子を示
す。
FIG. 6 shows a tuning fork-shaped piezoelectric vibrator which is an embodiment of the present invention.

振動子周波数は32kHzで、Kを80としてLを0.
7 mm、支持線断面主寸法Wを0.2m1ttとしで
ある。
The transducer frequency is 32kHz, K is 80, and L is 0.
7 mm, and the main cross-sectional dimension W of the support wire is 0.2 m1tt.

振動の腹6と基台7との間の距離H=λ/4は1.6龍
、一方、圧電体1と基台7との間の距離dは0.6 m
mである。
The distance H=λ/4 between the vibration antinode 6 and the base 7 is 1.6 m, while the distance d between the piezoelectric body 1 and the base 7 is 0.6 m.
It is m.

支持線は基台上でその節を支持されるが、外部引出線と
一体に形成されている。
The support line is supported at its joints on the base, and is formed integrally with the external leader line.

ここで、基台上支持点5の位置を移動してそれに伴う発
振周波数の変化を測定した結果、第T図aの特性曲線が
得られた。
Here, as a result of moving the position of the support point 5 on the base and measuring the change in the oscillation frequency accompanying the change, the characteristic curve shown in Figure T a was obtained.

bは同じく第1,2゜3および4図に示したような従来
の圧電体上支持点からλ/4の整数倍の長さをもって基
台上支持点において振動の節を支持した音叉形圧電振動
子の場合である。
Similarly, b is a tuning fork-shaped piezoelectric whose vibration node is supported at a support point on the base with a length that is an integral multiple of λ/4 from the conventional support point on the piezoelectric body as shown in Figures 1, 2, 3, and 4. This is the case with a vibrator.

縦軸の周波数は基準値に対する変動率で表わしである。The frequency on the vertical axis is expressed as a rate of variation with respect to the reference value.

また横軸は単に基台上支持点の位置の移動を示す。Further, the horizontal axis simply indicates the movement of the position of the support point on the base.

先にも述べたように、この特性曲線は一般に振動の漏れ
の程度あるいはそれに対する支持状態の影響度を知る指
標となるもので、この曲線の傾きか小さいこと、傾き零
の範囲の広いことが振動の漏れのない望ましい支持を可
能にする条件である。
As mentioned earlier, this characteristic curve is generally an indicator of the degree of vibration leakage or the influence of the support condition on it, and the slope of this curve is small and the range of zero slope is wide. This is a condition that enables desirable support without vibration leakage.

一見して明らかなようにa、b両者の特性には比較にな
らないほどの差違がある。
As is clear at first glance, there is an incomparable difference in the characteristics of both a and b.

aにおいてAおよびBは振動の腹に当るが、この部分を
除けば、本発明の音叉形圧電振動子の支持構造において
は基台上支持点の位置が振動の節(同図0)からずれて
もその発振周波数にはほとんど全く変化が見られない。
In a, A and B correspond to the antinode of vibration, but apart from this part, in the support structure of the tuning fork type piezoelectric vibrator of the present invention, the position of the support point on the base is shifted from the vibration node (0 in the same figure). However, there is almost no change in the oscillation frequency.

これはすなわち振動の漏れがないことであり、振動子の
発振周波数がその安定性を確実に維持し得ることである
This means that there is no vibration leakage, and that the oscillation frequency of the vibrator can maintain its stability reliably.

そこで種々のKの値についてこの特性曲線を求めた実験
結果が第8図に示すものである。
FIG. 8 shows the experimental results of determining this characteristic curve for various values of K.

このとき、基本共振周波数fを32.768kHzとし
、WとLとの組合せによって、所望のKの値を得た。
At this time, the basic resonance frequency f was set to 32.768 kHz, and a desired value of K was obtained by combining W and L.

例えば、同図aはに−80、bはに−60、Cはに=4
0およびdはに=20の場合である。
For example, in the same figure, a is -80, b is -60, and C is =4.
0 and d = 20.

また、周波数が16.384 kHzのときについても
ほぼ同様な結果が得られている。
Furthermore, almost similar results were obtained when the frequency was 16.384 kHz.

同図よりに≧40であれば、節点付近で傾き塔部分が得
られるが、さらにに≧60程度に限定するなら、腹付近
のごく狭い範囲を除いてほぼ平たんな特性が得られるこ
とが分る。
According to the same figure, if it is ≧40, a tilted tower part can be obtained near the node, but if it is further limited to ≧60, almost flat characteristics can be obtained except for a very narrow area near the belly. I understand.

実際、製作した振動子についてクランプ試験(振動子を
収容した容器に約100gの荷重を加えた前後の共振周
波数の変動試験)を行った結果、K≧40としたロフト
については95%の良品率、K≧60としたものでは1
00%の良品率であった。
In fact, as a result of performing a clamp test (a test of variation in resonance frequency before and after applying a load of approximately 100 g to the container containing the vibrator) on the manufactured vibrator, the yield rate was 95% for lofts with K≧40. , 1 for K≧60
The yield rate was 0.00%.

以上のとおり、本発明によれば、圧電体と基台との間の
距離を小さくできるから、小形化が可能で、しかも支持
点の位置が多少ずれても振動の漏れがないから、安定し
た発振が得られる。
As described above, according to the present invention, since the distance between the piezoelectric body and the base can be reduced, it is possible to downsize the piezoelectric body, and even if the position of the support point is slightly shifted, there is no leakage of vibration, so the stable Oscillation is obtained.

また支持線と外部引出線を一括形成できるから、信頼性
および作業性を向上させるのに役立つ。
Furthermore, since the support wire and the external leader wire can be formed all at once, it is useful for improving reliability and workability.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第2図、第3図および第4図は従来の音叉形圧
電振動子の説明図、第5図および第6図はそれぞれ本発
明による実施例の説明図、第7図および第8図は本発明
による音叉形圧電振動子の支持点の移動に伴う周波数の
変動状態を従来のものと比較しながら示した特性曲線図
である。 1・・・・・・圧電体、2・・・・・・支持線、5・・
・・・・基台上支持点、7・・・・・・基台。
1, 2, 3, and 4 are explanatory diagrams of a conventional tuning fork-shaped piezoelectric vibrator, FIG. 5 and 6 are explanatory diagrams of an embodiment according to the present invention, and FIG. 7 and FIG. FIG. 8 is a characteristic curve diagram illustrating the state of frequency fluctuation caused by movement of the support point of the tuning fork-shaped piezoelectric vibrator according to the present invention in comparison with that of a conventional one. 1...Piezoelectric body, 2...Support wire, 5...
...Support point on the base, 7...Base.

Claims (1)

【特許請求の範囲】[Claims] 1 音叉形圧電振動子の両主面基部を支持した支持線が
、圧電体長手方向に沿って、−たん振動子基台と反対の
向きに延在し、しかる後に湾曲してその向きを反転し、
該基台に至ってそこで植設される構造を有し、かつ該支
持線の断面主寸法W−圧電体上支持点と支持線湾曲部と
の間の最短距離L (mm)および基本共振周波数f(
kHz)の間にKを定数としてf =Kw7L2(ただ
しに≧40(kHz−7n7IL乃の関係があることを
特徴とする音叉形圧電振動子。
1. The support wire that supported the bases of both main surfaces of the tuning fork-shaped piezoelectric vibrator extends along the longitudinal direction of the piezoelectric body in the opposite direction to the -tan vibrator base, and then curves and reverses its direction. death,
It has a structure that reaches the base and is planted there, and the main cross-sectional dimension W of the support wire - the shortest distance L (mm) between the support point on the piezoelectric body and the curved part of the support wire, and the fundamental resonance frequency f (
kHz), where K is a constant, f = Kw7L2, where ≧40 (kHz-7n7IL).
JP50114505A 1975-09-22 1975-09-22 Onsagata Atsudenshindoushi Expired JPS5824968B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50114505A JPS5824968B2 (en) 1975-09-22 1975-09-22 Onsagata Atsudenshindoushi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50114505A JPS5824968B2 (en) 1975-09-22 1975-09-22 Onsagata Atsudenshindoushi

Publications (2)

Publication Number Publication Date
JPS5248485A JPS5248485A (en) 1977-04-18
JPS5824968B2 true JPS5824968B2 (en) 1983-05-24

Family

ID=14639424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50114505A Expired JPS5824968B2 (en) 1975-09-22 1975-09-22 Onsagata Atsudenshindoushi

Country Status (1)

Country Link
JP (1) JPS5824968B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5661530U (en) * 1979-10-15 1981-05-25
US4410827A (en) * 1980-04-24 1983-10-18 Kabushiki Kaisha Suwa Seikosha Mode coupled notched tuning fork type quartz crystal resonator
JPS59171208A (en) * 1984-02-09 1984-09-27 Seiko Epson Corp Combined tuning fork crystal oscillator
JP4868299B2 (en) * 2002-01-30 2012-02-01 セイコーエプソン株式会社 Support device and support structure of vibrator

Also Published As

Publication number Publication date
JPS5248485A (en) 1977-04-18

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