JPS5824952U - Scan coil device in macro analyzer - Google Patents

Scan coil device in macro analyzer

Info

Publication number
JPS5824952U
JPS5824952U JP11951281U JP11951281U JPS5824952U JP S5824952 U JPS5824952 U JP S5824952U JP 11951281 U JP11951281 U JP 11951281U JP 11951281 U JP11951281 U JP 11951281U JP S5824952 U JPS5824952 U JP S5824952U
Authority
JP
Japan
Prior art keywords
coil
scan coil
scan
mounting plate
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11951281U
Other languages
Japanese (ja)
Inventor
渡辺　忠悟
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP11951281U priority Critical patent/JPS5824952U/en
Publication of JPS5824952U publication Critical patent/JPS5824952U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面はこの考案によるマクロアナライザに於るスキャン
コイル装置を示すためのもので、第１図は平面断面図、
第２図は第１図の側断面図である。 １は第１鏡筒本体、２は第２鏡筒本体、３はスキャンコ
イル、４は取付板、５はアーム、６は調整ねじである。The drawings are for showing the scanning coil device in the macro analyzer according to this invention, and Fig. 1 is a plan sectional view;
FIG. 2 is a side sectional view of FIG. 1. 1 is a first lens barrel body, 2 is a second lens barrel body, 3 is a scan coil, 4 is a mounting plate, 5 is an arm, and 6 is an adjustment screw.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電子線を照射するための電子銃と、この電子銃からの電
子線が試料に照射されるように電子線を案内するための
インナーチューブと、このインナーチューブの外周部に
設けられ回動可能に保持されたスキャンコイルと、この
スキャンコイルを支持するためのコイル取付板と、この
コイル取付板を保持する鏡筒本体と、コイル取付板に装
置されたアームと、鏡筒本体に設けられその先端部が前
記アームの一端に衝合可能に構成された調整ねじとを備
え、前記調整ねじの回動によりスキャンコイルが回動さ
れるように構成されていることを特徴とするマクロアナ
ライザに於るスキャンコイル装置。An electron gun for irradiating an electron beam, an inner tube for guiding the electron beam from the electron gun so that the sample is irradiated with the electron beam, and a rotatable structure provided on the outer periphery of the inner tube. A held scan coil, a coil mounting plate for supporting this scan coil, a lens barrel body that holds this coil mounting plate, an arm attached to the coil mounting plate, and an arm provided on the lens barrel body at its tip. A macro analyzer characterized in that the macro analyzer is provided with an adjustment screw configured to be able to abut against one end of the arm, and a scan coil is rotated by rotation of the adjustment screw. Scan coil device.
JP11951281U 1981-08-12 1981-08-12 Scan coil device in macro analyzer Pending JPS5824952U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11951281U JPS5824952U (en) 1981-08-12 1981-08-12 Scan coil device in macro analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11951281U JPS5824952U (en) 1981-08-12 1981-08-12 Scan coil device in macro analyzer

Publications (1)

Publication Number Publication Date
JPS5824952U true JPS5824952U (en) 1983-02-17

Family

ID=29913571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11951281U Pending JPS5824952U (en) 1981-08-12 1981-08-12 Scan coil device in macro analyzer

Country Status (1)

Country Link
JP (1) JPS5824952U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4315728Y1 (en) * 1965-06-02 1968-07-01
JPS5390859A (en) * 1977-01-19 1978-08-10 Siemens Ag Long focal length magnetic lens for large area article projection

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4315728Y1 (en) * 1965-06-02 1968-07-01
JPS5390859A (en) * 1977-01-19 1978-08-10 Siemens Ag Long focal length magnetic lens for large area article projection

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