JPS58225302A - 光学式機械量測定装置 - Google Patents

光学式機械量測定装置

Info

Publication number
JPS58225302A
JPS58225302A JP57108726A JP10872682A JPS58225302A JP S58225302 A JPS58225302 A JP S58225302A JP 57108726 A JP57108726 A JP 57108726A JP 10872682 A JP10872682 A JP 10872682A JP S58225302 A JPS58225302 A JP S58225302A
Authority
JP
Japan
Prior art keywords
light
target
mechanical quantity
measured
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57108726A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141204B2 (enrdf_load_stackoverflow
Inventor
Yutaka Ono
裕 小野
Eiji Ogita
英治 荻田
Toshitsugu Ueda
敏嗣 植田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP57108726A priority Critical patent/JPS58225302A/ja
Publication of JPS58225302A publication Critical patent/JPS58225302A/ja
Publication of JPH0141204B2 publication Critical patent/JPH0141204B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57108726A 1982-06-24 1982-06-24 光学式機械量測定装置 Granted JPS58225302A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57108726A JPS58225302A (ja) 1982-06-24 1982-06-24 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57108726A JPS58225302A (ja) 1982-06-24 1982-06-24 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS58225302A true JPS58225302A (ja) 1983-12-27
JPH0141204B2 JPH0141204B2 (enrdf_load_stackoverflow) 1989-09-04

Family

ID=14491986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57108726A Granted JPS58225302A (ja) 1982-06-24 1982-06-24 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS58225302A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209431A (ja) * 1988-02-17 1989-08-23 Kokusai Denshin Denwa Co Ltd <Kdd> 偏波ダイバーシティ光受信方式
JP2010151572A (ja) * 2008-12-25 2010-07-08 Ojima Shisaku Kenkyusho:Kk 偏光分離型干渉計の偏光分離部及び偏光分離型干渉計及び偏光分離干渉計型測長器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209431A (ja) * 1988-02-17 1989-08-23 Kokusai Denshin Denwa Co Ltd <Kdd> 偏波ダイバーシティ光受信方式
JP2010151572A (ja) * 2008-12-25 2010-07-08 Ojima Shisaku Kenkyusho:Kk 偏光分離型干渉計の偏光分離部及び偏光分離型干渉計及び偏光分離干渉計型測長器

Also Published As

Publication number Publication date
JPH0141204B2 (enrdf_load_stackoverflow) 1989-09-04

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