JPS58218018A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPS58218018A
JPS58218018A JP10048382A JP10048382A JPS58218018A JP S58218018 A JPS58218018 A JP S58218018A JP 10048382 A JP10048382 A JP 10048382A JP 10048382 A JP10048382 A JP 10048382A JP S58218018 A JPS58218018 A JP S58218018A
Authority
JP
Japan
Prior art keywords
recording
magnetic
reproduction
film
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10048382A
Other languages
Japanese (ja)
Other versions
JPH044642B2 (en
Inventor
Kaoru Toki
土岐 薫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10048382A priority Critical patent/JPS58218018A/en
Publication of JPS58218018A publication Critical patent/JPS58218018A/en
Publication of JPH044642B2 publication Critical patent/JPH044642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier

Abstract

PURPOSE:To attain efficient recording and reproduction only at one side of a meidum, by providing a winding for recording and reproduction near a magnetic pole formed so as to introduce efficiently the magnetic flux at recording and reproduction in a magnetic head for vertical recording and reproduction. CONSTITUTION:A high permeability magnetic film 9 is formed on a nonmagnetic base 8 formed with a roof-shaped projection 13 having two slopes approached each other as they are separated from the base surface, and a recording/reproduction conductive layer 11 is formed so as to surround the said projection 13 through an insulation layer 10. After an insulation layer 12 is formed on the layer 10, the end face of the high permeability megnetic film 9 having (t) width in the direction of running and (w) track width in the orthogonal direction is formed so as to be matched to sizes of a recording medium by polishment. The high permeability magnetic film is made of Pernealloy by 9 vapor deposition and ceramic is used for the base 8. Vapordeposited or plated gold or copper is formed into the said shape of the conductive layer 11 with the mask processing.

Description

【発明の詳細な説明】 本発明は磁゛気記録において記録媒体の磁性膜面に″垂
直な残留磁化を用いて情報を記・俺再生するための磁気
ヘッドに関するも゛のである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic head for recording and reproducing information using residual magnetization perpendicular to the magnetic film surface of a recording medium in magnetic recording.

磁・気記録媒体に高配録密度(短・波長)e)4i′号
を記録す漬場合゛、記録媒体0rfI内方向の磁゛化に
よりて記録を行なう方法゛よりも、記録媒体の辱さ方向
When recording high recording density (short wavelength) e) 4i' on a magnetic/magnetic recording medium, the damage to the recording medium is greater than the method of recording by magnetization in the recording medium 0rfI direction. direction.

すなわち画直義化によって記録を行なう方法の方が有利
であることが知られている。
That is, it is known that a method of recording by converting images into direct definitions is more advantageous.

、この論m磁気記録に用いる記―媒体としては。, as a recording medium used in magnetic recording.

垂直磁気異方性を有する高抗磁力の磁性膜が適し。A high coercive force magnetic film with perpendicular magnetic anisotropy is suitable.

C6−C(、Co−Cr−Rh aバリウムフェライト
C6-C(, Co-Cr-Rh a barium ferrite.

co−Ni−Mn−Pなどの材料が知られている。Materials such as co-Ni-Mn-P are known.

また、垂直痒気記録用磁気ヘッドとしては、媒体面に羞
匣方向の磁界を狭い範囲で釧く発生することが必要であ
り、第11図の様な構成のものが適していることが知ら
れている。この磁気ヘッドは。
It is also known that a magnetic head for perpendicular magnetic recording needs to generate a magnetic field in the vertical direction on the medium surface in a narrow range, and that a structure as shown in Fig. 11 is suitable. It is being This magnetic head.

高透磁率磁性膜、から成る短itt勢の車砿極lと、記
録再生効率Is3を1有し、か′)半碑極1より十分厚
い磁性体から成る補助磁極2とを、記―織体4を挾んで
配!シた構成のも91Toる。また、この様な磁気、5
ツドを用いる場合には、記録媒体4と基体5との関に高
透磁率磁性薄膜層6含有する記録体を用いることによっ
て、記録再生効率が非常に向上することも知られている
A short wheel pole pole l made of a high magnetic permeability magnetic film, and an auxiliary magnetic pole 2 made of a magnetic material having a recording/reproducing efficiency Is3 of 1 and sufficiently thicker than the semi-pole 1 are used. Place the body 4 in between! There are also 91 configurations. Also, such magnetism, 5
It is also known that in the case of using a magnet, recording and reproducing efficiency can be greatly improved by using a recording medium containing a high permeability magnetic thin film layer 6 between the recording medium 4 and the substrate 5.

前記の様、な構造の磁気ヘッドは、王iIl極と補助磁
極との間隔が小さいほど、記録再生効率が向上すること
から、a気テープあるいは7レキシプルディスクなど藩
い基体を有する磁気記録体に適している・ 一方、リジッド鼻気ディスクの様に、比較的厚い基体を
有する磁気記録体に対しては、その片面ているので、こ
れまでは2gE米のり/グヘッドがそのtto杉で用−
られてき九〇 しかし、リングヘッドは、yt米1面内記録一体化に対
する記Ia丹生〒十分ではなかった。
The magnetic head with the above-mentioned structure improves recording and reproducing efficiency as the distance between the magnetic pole and the auxiliary magnetic pole becomes smaller. On the other hand, for magnetic recording media that have a relatively thick base, such as rigid nasal disks, since one side of the base is attached, the 2gE rice glue/glue head has so far been used for that purpose.
However, the ring head was not sufficient for the integration of YT and US single-plane recording.

本発明の目的は0画直義気配録d生用−気ヘッドにおい
て、記録再生時の磁束を効率よく導く様に形成した磁極
の近傍に記録再生用の巻#Iを設けることによって、媒
体の片面側だけで効率よく。
The object of the present invention is to provide a winding #I for recording and reproducing in the vicinity of a magnetic pole formed to efficiently guide magnetic flux during recording and reproducing in a 0-picture direct distribution recording head. Efficiently only on the side.

記録再生ができる磁気ヘッドを提供することにある・ 、・・□・1:。Our goal is to provide a magnetic head that can record and reproduce information. ,...□・1:.

本発明の磁気ヘッドは、−4:の基体面から一詐るにつ
れて互いに近づくような2つの1+面を有する突起が形
成された非d1住基体と、この基体上に形成された高速
−率磁性膜、さらにこの蝿注A上に形成され九絶縁層上
に、前記突起を囲む様に形成された導電体層を有する構
成であることを特徴とする。
The magnetic head of the present invention includes a non-d1 substrate in which protrusions having two 1+ planes are formed that approach each other as one goes from the -4: substrate surface, and a high-rate magnetic field formed on this substrate. The present invention is characterized in that it has a structure including a conductor layer formed on the film and further on the insulating layer so as to surround the protrusion.

次に0本発明の実施例について図面を参照して説明する
Next, embodiments of the present invention will be described with reference to the drawings.

第2図は0本発明による磁気ヘッドを示す図である。1
f#、、、第3図は、第2図のX、 X1間の断面図で
ある。これらの図に示すように0本発明の磁気ヘッドは
、基体面から離れるにつれて互いに舷づくような2つの
斜面t−有する慮根状の突起13が形成された非磁性基
体8の上に高透磁率磁性膜9が形成され、さらに記録再
生用導電体層11が。
FIG. 2 is a diagram showing a magnetic head according to the present invention. 1
f#, . . . FIG. 3 is a sectional view between X and X1 in FIG. 2. As shown in these figures, the magnetic head of the present invention has a highly transparent substrate 8 on which is formed a root-like protrusion 13 having two slopes t that extend over each other as the distance from the substrate surface increases. A magnetic film 9 is formed, and a recording/reproducing conductive layer 11 is further formed.

絶縁層lOを隔て゛て、前記突起13を囲む様に形成し
た構造である。
This structure is formed so as to surround the protrusion 13 with an insulating layer IO in between.

さらに、この上に一縁層12を形成し丸後、研磨によっ
て、記録媒輛の寸法に合わせるように走向方向の幅t、
これと11111□直角方向のトラック幅WO高透磁率
磁性膜9の端面を形成した。同、導電体端子A、Hの外
部への取9出しは1図の繁雑さをさけるため省略しであ
る〇 高透磁率磁性N9は8ノく−マロイやCo−Zr等を蒸
着やス゛バッタリングにより形成したものから成り、非
磁性基体8としては、セラミック。
Further, an edge layer 12 is formed on this, and after rounding, the width t in the strike direction is adjusted to match the dimensions of the recording medium by polishing.
The end face of the high magnetic permeability magnetic film 9 having a track width of 11111□ in the direction perpendicular to this was formed. Similarly, the external conductor terminals A and H have been omitted to avoid complication in Figure 1.High permeability magnetic N9 is made by vapor deposition or sintering of 8 mm malloy, Co-Zr, etc. The non-magnetic substrate 8 is made of ceramic.

8t02 e Al 203 #シリコン等が用いられ
、絶縁層10及び12としては、 8it)2 、 A
l2O3等が用いられる。さらに8導電体層11は蒸着
やメッキもしくはスパッタリングをした金や銅を、マス
ク処理を施して上記形状に形成されるO ここで非碑a基体B上に設けられる。基体向から離れる
につれて互いに蔽づくような2′−)の斜面t−有する
遣根゛状の突起13の形成法を、非磁性基体8としてs
 i02を用いた場合について説明する。
8t02 e Al 203 #Silicon etc. are used, and the insulating layers 10 and 12 are 8it)2, A
l2O3 etc. are used. Further, the conductive layer 11 is formed in the above shape by applying vapor deposition, plating, or sputtering of gold or copper to a mask process. A method for forming root-shaped protrusions 13 having slopes t- of 2'-) such that they cover each other as they move away from the substrate direction is described below using the non-magnetic substrate 8.
The case where i02 is used will be explained.

例えば、第4図に示す様に、 8i02基板8上に。For example, as shown in FIG. 4, on an 8i02 board 8.

厚さ1.5μm9幅3μm、長さ20μmの形状にポジ
タイプフォト□レジスト14を形成した後、アルゴン圧
PAr=2−X10 ’Torr 、電圧500v 電
流密度0. B m Alrs2で45分間イオ/ミリ
ングを行うと、第5図に示す様に、高さ1.5μm、頂
上での幅0.8μm×18μm、角度約58′の斜面を
有する1141j状突起13が形成される。この上に0
例えば、パーマロイやa、−zr等の高透磁率磁性膜9
を、厚さ、欽μm形成した後、絶縁層10を隔てて、@
及び厚みが数千〜数ミクロンの記録再生用導電体層11
を1yI記突起13を囲む様に形成し。
After forming a positive type photoresist 14 in a shape with a thickness of 1.5 μm, a width of 3 μm, and a length of 20 μm, argon pressure PAr = 2-X10' Torr, voltage 500 V, current density 0. When Io/milling was performed for 45 minutes with Bm Alrs2, a 1141j-shaped protrusion 13 with a height of 1.5 μm, a width at the top of 0.8 μm x 18 μm, and a slope with an angle of about 58' was formed as shown in FIG. It is formed. 0 on this
For example, a high permeability magnetic film 9 such as permalloy, a, -zr, etc.
After forming a film with a thickness of 1 μm, @
and a recording/reproducing conductor layer 11 with a thickness of several thousand to several microns.
is formed so as to surround the protrusion 13 of 1yI.

さらに、絶縁412を形成し死後研磨すると、記録媒体
走向方向の幅t、数電電クロントラック幅約20μmの
端面を有する一極が形成される・第6図及び第7図は8
本発明による磁気ヘッドO記倦及び再生の動作を定性的
に説明するための図である。すなわち1本磁気ヘッドで
は記舞時に。
Furthermore, by forming an insulator 412 and polishing it after death, a single pole having an end face with a width t in the running direction of the recording medium and a several electron track width of approximately 20 μm is formed.
FIG. 3 is a diagram for qualitatively explaining the recording and reproducing operations of the magnetic head according to the present invention. In other words, when recording with one magnetic head.

導電体4@11の端子A−B関に1例えば1図示した方
向(非磁性基体8@から見て時計まわ如方向)に記録電
流を流すと、磁極を成す高透磁率磁性膜9内に、磁束1
5[−生じ、これが磁極の突端から媒体7の方向へ磁電
磁界16を発生させる(第6図)。再生時に社、媒体内
磁化18から生じる磁束19を、al極突端でとりこん
で、高透磁率#I性膜9内に導き、この磁束の変化を導
電体層llの端子電圧として検出する(菖7図)。ここ
で磁極を成す高透磁率磁性II&9は、媒体内の磁化1
8から生じる磁束にそった形をしてお9.しかも媒体対
向面から数(クロン程度という媒体に極めて近い位置に
形成されているので、記俺時の磁束15及び再生時の磁
束19を、効率曳く導くことができる。さらに、記録再
生用導電体層11はこの磁極及び媒体に近接して設けら
れているので・記録磁束の発生及び再生磁束の検出が効
率良く行うことができる。
When a recording current is passed between the terminals A and B of the conductor 4@11 in the direction shown in the figure (clockwise direction when viewed from the non-magnetic substrate 8@), a high magnetic permeability magnetic film 9 forming the magnetic pole flows. , magnetic flux 1
5 [- is generated, which generates a magnetic field 16 from the tip of the magnetic pole toward the medium 7 (FIG. 6). During reproduction, the magnetic flux 19 generated from the magnetization 18 in the medium is taken in by the tip of the Al pole and guided into the high magnetic permeability #I film 9, and the change in this magnetic flux is detected as the terminal voltage of the conductive layer 1. Figure 7). Here, the high permeability magnetism II & 9 forming the magnetic pole is the magnetization 1 in the medium.
The shape follows the magnetic flux generated from 8 and 9. In addition, since it is formed at a position very close to the medium (on the order of several micrometers) from the medium facing surface, it is possible to efficiently guide the magnetic flux 15 during recording and the magnetic flux 19 during reproduction. Since the layer 11 is provided close to the magnetic pole and the medium, the recording magnetic flux can be generated and the reproducing magnetic flux can be detected efficiently.

又、ここで述べた磁極の形状は、イオンミリング条件及
び高透磁率磁性層の厚さ及び研磨条件を適宜選ぶととに
よって、所望の形に成形できる。
Further, the shape of the magnetic pole described here can be formed into a desired shape by appropriately selecting the ion milling conditions, the thickness of the high permeability magnetic layer, and the polishing conditions.

1ks?非磁性基磁性基形成される突起上の基体面1 から離れるに従うて互いに近□づくような2つの斜面は
図面に示したような平門ニーである必要はなく曲面であ
ってもよい。またー、′突起の断面は図示したよりな左
右対称でなくともl”l:’Ilよい。
1ks? The two slopes, which approach each other with distance from the base surface 1 on which the non-magnetic base and magnetic base are formed, do not have to be flat knees as shown in the drawings, but may be curved surfaces. Also, the cross section of the protrusion does not have to be as symmetrical as shown in the figure.

1・・1即1・ tた突起上端は図のような平面である必要はなくエツジ
状になりてい°Cもかまわない。
1..1 The upper end of the protrusion does not need to be flat as shown in the figure, but may be edge-shaped and may be at °C.

図面に示した絶縁層12は磁気記録媒体7が本発明の磁
気ヘッドのごく近傍を走行することを考直すると形成さ
れている仁とが望ましいが、形成しない場合でも原理的
には本発明の優れた幼果が失なわれる仁とはない。
Considering that the magnetic recording medium 7 runs very close to the magnetic head of the present invention, it is desirable that the insulating layer 12 shown in the drawing be formed with a layer, but even if it is not formed, the present invention can still be applied in principle. There is no kernel where excellent young fruit is lost.

以上述べたように、不発明によれば記録媒体の片肉側だ
けで記銀再虫ができ、しかも、その効率が高い垂直記録
再生用磁気ヘッドを提供することができる・
As described above, according to the present invention, it is possible to provide a magnetic head for perpendicular recording and reproducing which can perform recording and reproducing on only one side of the recording medium and has high efficiency.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、従来の垂直義気配録再生用磁気ヘッドを示す
図、第2図は、不発明による磁気ヘッドを示す図、第3
図は、第2図のX 、 XI閣の断面図、第4図、第5
雫は作製方法を説明するための図、第6図、第7−は1
本発明の詳細な説明する]ま ための図である。9″: :、:11’ 図において、lは、主磁極、2は・補助釦13は、記録
再生用@@、4は、垂直磁気異方性を有する磁性薄膜、
5は、基体、6は、高透磁率磁性層、7は、磁気記録媒
体−8は参非繊性基体・9は、高遠硫率砿法膜、10s
i2は絶創111は、記録再生用導電体層、13は、非
磁性基体上の突起、14はレジスト、15.16.19
は磁束、17は媒体走行方向、18は記録磁化を示す。 ゛\− 娑 4 図 、  悼5 図 ′工
FIG. 1 is a diagram showing a conventional magnetic head for recording and reproducing vertically arranged vertical beams, FIG. 2 is a diagram showing a magnetic head according to the invention, and FIG.
The figures are X in Figure 2, a cross-sectional view of the
Droplets are diagrams for explaining the production method, Figures 6 and 7- are 1
FIG. 3 is a diagram for explaining the detailed description of the present invention. 9'': :, :11' In the figure, l is the main magnetic pole, 2 and auxiliary buttons 13 are for recording and reproduction @@, 4 is a magnetic thin film having perpendicular magnetic anisotropy,
5 is a substrate, 6 is a high magnetic permeability magnetic layer, 7 is a magnetic recording medium, 8 is a non-woven substrate, 9 is a high sulfur content film, 10s
i2 is an electric conductor layer for recording and reproduction, 13 is a protrusion on a non-magnetic substrate, 14 is a resist, 15.16.19
17 indicates the magnetic flux, 17 indicates the medium running direction, and 18 indicates recording magnetization.゛\− 娑 4 fig. Mourning 5 fig.

Claims (1)

【特許請求の範囲】[Claims] 基体向から離れるに゛つれて互いに近づくような2つの
91+rIa′f:有する突起が形成された非磁性基□
体とこの基体上に形成され九゛高透磁率m注威、さらに
このa性膜上に形成されfc絶縁層上に1.前記突起を
囲む様に゛形成された導電体ノfIを有する構成で多る
□こと′を特徴とする磁気ヘッド。
Two non-magnetic bases formed with protrusions having 91+rIa'f: □ which approach each other as they move away from the substrate direction.
A film with a high magnetic permeability of 90% is formed on the substrate, and a film of 1.0% is formed on the FC insulating layer on the amorphous film. A magnetic head characterized in that it has a structure in which a conductive material fI is formed so as to surround the protrusion.
JP10048382A 1982-06-11 1982-06-11 Magnetic head Granted JPS58218018A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10048382A JPS58218018A (en) 1982-06-11 1982-06-11 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10048382A JPS58218018A (en) 1982-06-11 1982-06-11 Magnetic head

Publications (2)

Publication Number Publication Date
JPS58218018A true JPS58218018A (en) 1983-12-19
JPH044642B2 JPH044642B2 (en) 1992-01-29

Family

ID=14275168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10048382A Granted JPS58218018A (en) 1982-06-11 1982-06-11 Magnetic head

Country Status (1)

Country Link
JP (1) JPS58218018A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2575577A1 (en) * 1984-12-28 1986-07-04 Bull Sa MAGNETIC WRITING / READING TRANSDUCER FOR PERPENDICULAR RECORDING
FR2586851A1 (en) * 1985-09-04 1987-03-06 Commissariat Energie Atomique METHOD FOR PRODUCING A BOREHORN HORIZONTAL MAGNETIC HEAD AND MAGNETIC HEAD OBTAINED THEREBY
US5999380A (en) * 1995-06-07 1999-12-07 Seagate Technology, Inc. Smooth topography head surface on a head with patterned pole
WO2009019981A1 (en) * 2007-08-08 2009-02-12 Seiko Instruments Inc. Proximity-field optical head, and information recording/reproducing device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2575577A1 (en) * 1984-12-28 1986-07-04 Bull Sa MAGNETIC WRITING / READING TRANSDUCER FOR PERPENDICULAR RECORDING
FR2586851A1 (en) * 1985-09-04 1987-03-06 Commissariat Energie Atomique METHOD FOR PRODUCING A BOREHORN HORIZONTAL MAGNETIC HEAD AND MAGNETIC HEAD OBTAINED THEREBY
US5999380A (en) * 1995-06-07 1999-12-07 Seagate Technology, Inc. Smooth topography head surface on a head with patterned pole
WO2009019981A1 (en) * 2007-08-08 2009-02-12 Seiko Instruments Inc. Proximity-field optical head, and information recording/reproducing device
JP5611590B2 (en) * 2007-08-08 2014-10-22 セイコーインスツル株式会社 Near-field optical head and information recording / reproducing apparatus

Also Published As

Publication number Publication date
JPH044642B2 (en) 1992-01-29

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