JPS58217674A - 複数の蒸発源を備えたイオンプレ−テイング装置 - Google Patents

複数の蒸発源を備えたイオンプレ−テイング装置

Info

Publication number
JPS58217674A
JPS58217674A JP57098200A JP9820082A JPS58217674A JP S58217674 A JPS58217674 A JP S58217674A JP 57098200 A JP57098200 A JP 57098200A JP 9820082 A JP9820082 A JP 9820082A JP S58217674 A JPS58217674 A JP S58217674A
Authority
JP
Japan
Prior art keywords
evaporation
evaporation source
downward
ion
evaporation sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57098200A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229746B2 (enExample
Inventor
Kyoyu Sasanuma
笹沼　恭友
Shotaro Shimizu
章太郎 清水
Mitsugi Enomoto
榎本　貢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Original Assignee
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Holdings Co Ltd, Citizen Watch Co Ltd filed Critical Citizen Holdings Co Ltd
Priority to JP57098200A priority Critical patent/JPS58217674A/ja
Publication of JPS58217674A publication Critical patent/JPS58217674A/ja
Publication of JPH0229746B2 publication Critical patent/JPH0229746B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP57098200A 1982-06-08 1982-06-08 複数の蒸発源を備えたイオンプレ−テイング装置 Granted JPS58217674A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57098200A JPS58217674A (ja) 1982-06-08 1982-06-08 複数の蒸発源を備えたイオンプレ−テイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57098200A JPS58217674A (ja) 1982-06-08 1982-06-08 複数の蒸発源を備えたイオンプレ−テイング装置

Publications (2)

Publication Number Publication Date
JPS58217674A true JPS58217674A (ja) 1983-12-17
JPH0229746B2 JPH0229746B2 (enExample) 1990-07-02

Family

ID=14213357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57098200A Granted JPS58217674A (ja) 1982-06-08 1982-06-08 複数の蒸発源を備えたイオンプレ−テイング装置

Country Status (1)

Country Link
JP (1) JPS58217674A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226858A (ja) * 1985-07-26 1987-02-04 Stanley Electric Co Ltd 遮光層を有する薄膜トランジスタ−アセンブリ−

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450243U (enExample) * 1990-08-31 1992-04-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226858A (ja) * 1985-07-26 1987-02-04 Stanley Electric Co Ltd 遮光層を有する薄膜トランジスタ−アセンブリ−

Also Published As

Publication number Publication date
JPH0229746B2 (enExample) 1990-07-02

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