JPS5821635Y2 - 吸着固定装置 - Google Patents

吸着固定装置

Info

Publication number
JPS5821635Y2
JPS5821635Y2 JP1978045679U JP4567978U JPS5821635Y2 JP S5821635 Y2 JPS5821635 Y2 JP S5821635Y2 JP 1978045679 U JP1978045679 U JP 1978045679U JP 4567978 U JP4567978 U JP 4567978U JP S5821635 Y2 JPS5821635 Y2 JP S5821635Y2
Authority
JP
Japan
Prior art keywords
suction
air
grooves
groove
air grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978045679U
Other languages
English (en)
Japanese (ja)
Other versions
JPS54147878U (enExample
Inventor
関家三男
Original Assignee
株式会社デイスコ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社デイスコ filed Critical 株式会社デイスコ
Priority to JP1978045679U priority Critical patent/JPS5821635Y2/ja
Publication of JPS54147878U publication Critical patent/JPS54147878U/ja
Application granted granted Critical
Publication of JPS5821635Y2 publication Critical patent/JPS5821635Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Registering Or Overturning Sheets (AREA)
JP1978045679U 1978-04-07 1978-04-07 吸着固定装置 Expired JPS5821635Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978045679U JPS5821635Y2 (ja) 1978-04-07 1978-04-07 吸着固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978045679U JPS5821635Y2 (ja) 1978-04-07 1978-04-07 吸着固定装置

Publications (2)

Publication Number Publication Date
JPS54147878U JPS54147878U (enExample) 1979-10-15
JPS5821635Y2 true JPS5821635Y2 (ja) 1983-05-09

Family

ID=28924397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978045679U Expired JPS5821635Y2 (ja) 1978-04-07 1978-04-07 吸着固定装置

Country Status (1)

Country Link
JP (1) JPS5821635Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571077Y2 (enExample) * 1976-12-21 1982-01-08

Also Published As

Publication number Publication date
JPS54147878U (enExample) 1979-10-15

Similar Documents

Publication Publication Date Title
US4131267A (en) Apparatus for holding workpiece by suction
US4521995A (en) Wafer attracting and fixing device
US6286822B1 (en) Machinable supports for close tolerance edge support
CN113910072B (zh) 吸盘转台和晶圆加工系统
JPS5821635Y2 (ja) 吸着固定装置
US5580831A (en) Sawcut method of forming alignment marks on two faces of a substrate
JPH0372423B2 (enExample)
JPH031172Y2 (enExample)
CN107275263A (zh) 能够消除厚边效应的匀胶装置
US20030056628A1 (en) Coaxial spindle cutting saw
JP2021079514A (ja) 切削ブレード
JP6548561B2 (ja) 回転機構及び切削装置
CN201455792U (zh) 一种用于方形基片的化学机械磨抛头
JP2008270233A (ja) 真空吸着装置用吸着体及び真空吸着装置
CN110867398B (zh) 卡盘工作台和晶片的加工方法
JPH035413Y2 (enExample)
JPH084979B2 (ja) ダイサ−用ワ−クテ−ブル
CN207900899U (zh) 精密砂轮划片机搭载微型芯片吸盘
JP6708159B2 (ja) ダイシング装置
JP2542445Y2 (ja) バフ溝加工装置
JPS6243142A (ja) 半導体装置及びその使用方法
JPS61100338A (ja) 真空吸着装置
JPS63200902A (ja) 上面規制式座ぐり加工装置
CN216181764U (zh) 一种用于半导体衬底片的减薄机高稳定吸附装置
CN217317563U (zh) 一种用于半导体晶圆划片机的真空抽气盘