JPS58215802A - Package for mic - Google Patents

Package for mic

Info

Publication number
JPS58215802A
JPS58215802A JP57099467A JP9946782A JPS58215802A JP S58215802 A JPS58215802 A JP S58215802A JP 57099467 A JP57099467 A JP 57099467A JP 9946782 A JP9946782 A JP 9946782A JP S58215802 A JPS58215802 A JP S58215802A
Authority
JP
Japan
Prior art keywords
mic
waveguide
hole
high frequency
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57099467A
Other languages
Japanese (ja)
Inventor
Toshiro Sakane
坂根 敏朗
Hiroyuki Hachitsuka
弘之 八塚
Hideo Sugawara
菅原 秀夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57099467A priority Critical patent/JPS58215802A/en
Publication of JPS58215802A publication Critical patent/JPS58215802A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0007Casings
    • H05K9/0049Casings being metallic containers

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Casings For Electric Apparatus (AREA)
  • Waveguide Connection Structure (AREA)

Abstract

PURPOSE:To improve the performance, by providing holes of waveguide construction through each of which an end of a microstrip line of a high frequency input/output terminal is projected and an airtight sealing cover for an entrance/ exit of a waveguide, for improving the heat dissipating effect. CONSTITUTION:A package main body 20 for airtight sealing forming a recess 201 at the center of which an MIC is mounted is provided with a DC bias terminal 4 for the MIC and a signal transmitting terminal 5. Further, a hole 203 of waveguide construction is formed at both ends of the main body 20 in lengthwise direction, an expanding slot 204 is formed on a partition wall between the hole 203 and the recess 201 and a notch 202 is formed at the end of the main body 20 in broadwise direction. A microstrip line 22 of a high frequency input/output terminal is formed at each expanding slot 204 between the hole 203 and the recess 201, the upper part of the main body 20 is covered with a metallic cover and the hole 204 of waveguide construction is sealed airtightly with a window of a quartz glass 23. Further, a part or all of the waveguide construction is filled in with a dielectric for improving the heat dissipating effect.

Description

【発明の詳細な説明】 れ) 発明の技術分野 本発明は、MIC用パッケージの改善に係り、とくに高
周波入出力端子をマイクロストリップラインで形成し、
導波管を気密封止としたMIC用パッケージに関するも
のである。
[Detailed Description of the Invention] TECHNICAL FIELD OF THE INVENTION The present invention relates to an improvement of a MIC package, and in particular, to forming high frequency input/output terminals with microstrip lines,
The present invention relates to a MIC package in which a waveguide is hermetically sealed.

(b)従来技術と問題点 従来のMIC用パッケージは1つの筐体に複数のキャリ
アを実装し、カスケード接続したるのち気密封止を行な
っているMIC用パッケージの斜視図を第1図に示す。
(b) Conventional technology and problems A conventional MIC package has multiple carriers mounted in one housing, which are cascaded and then hermetically sealed. Figure 1 shows a perspective view of the MIC package. .

図において1は金属たとえば銅(011)等からなり中
央部に凹部11を穿設してなる篩体、2はキャリア、3
は高周波入出力用端子、4はDCバイアス端子、5は信
号伝送用端子、6は金属たとえば銅(Cu)等からなる
蓋である。
In the figure, 1 is a sieve body made of metal such as copper (011) and has a recess 11 in the center, 2 is a carrier, and 3
4 is a terminal for high frequency input/output, 4 is a DC bias terminal, 5 is a terminal for signal transmission, and 6 is a lid made of metal such as copper (Cu).

凹部11を穿設した筐体lに高周波入出力用端子3.D
Cバイアヌ端子4および信号伝送用端子すをそれぞれハ
ーメチックシールしたるのち、金属板上に誘電体基板を
実装し、該誘電体基板上に半導体デバイス等の能動素子
を搭載したキャリア2を複数実装してカスケード接続を
行なったのち筐体1に蓋6を合致せしめて溶着し気密封
止を行なっていた。ところが周波数が高く(たとえば1
20H2以上)なると、キャリア間の接続方法が問題と
なり、接続インピーダンス整合を良好に保つことが困難
になるという問題点があった。
A high-frequency input/output terminal 3 is provided in the housing l in which a recess 11 is formed. D
After the C-bias terminal 4 and the signal transmission terminal are each hermetically sealed, a dielectric substrate is mounted on the metal plate, and a plurality of carriers 2 carrying active elements such as semiconductor devices are mounted on the dielectric substrate. After making a cascade connection, the lid 6 was fitted onto the housing 1 and welded to form an airtight seal. However, if the frequency is high (for example, 1
20H2 or more), the method of connecting the carriers becomes a problem, and it becomes difficult to maintain good connection impedance matching.

((3)  発明の目的 本発明は上記従来の問題点に鑑み、キャリアを個々に実
装するパッケージを形成し、該パッケージ間をマイクロ
ストリップフィンと導波管で接続し、該導波管を気密封
止したMIC用パッケージを提供することを目的とする
ものである。
((3) Purpose of the Invention In view of the above conventional problems, the present invention forms packages in which carriers are individually mounted, connects the packages with microstrip fins and waveguides, and connects the waveguides with air. The purpose is to provide a sealed MIC package.

(d)  発明の構成 前述の目的を達成するために本発明は、中央部にM工C
を実装する凹部を形成した気密封止の筐体に、該MTC
用のDCバイアヌ、信号電送および高周波入出力用の端
子を設けたMIC用パッケージにおいて、前記高周波入
出力用端子をマイクロストリップラインで形成するとと
もに、前記筐体に前記マイクロストリップラインの端部
が突出するような導波管構造の孔を穿設し、藺導波管の
出入口に気密封止用蓋を利設するかまたは導波管を誘電
体材料で充填密封することによって達成される。
(d) Structure of the Invention In order to achieve the above-mentioned object, the present invention has an M construction in the central part.
The MTC is placed in a hermetically sealed housing with a recess for mounting the
In the MIC package provided with terminals for DC bias, signal transmission, and high frequency input/output, the high frequency input/output terminals are formed by a microstrip line, and an end of the microstrip line protrudes from the housing. This can be achieved by drilling holes in the waveguide structure and using airtight sealing lids at the entrance and exit of the waveguide, or by filling and sealing the waveguide with a dielectric material.

(e)  発明の実施例 以下図面を参照しながら本発明に係るMIC用パッケー
ジの実施例について詳細に説明する。
(e) Embodiments of the Invention Hereinafter, embodiments of the MIC package according to the present invention will be described in detail with reference to the drawings.

第2図は本発明の一夾施例を説明するための(a)は斜
視図、(b)は断面図、(C)は裏面の斜視図で、前回
と同等の部分については同一符号を付しており、20は
金属たとえば銅(011)等からなるパッケージ本体で
、該パッケージ本体20には中央部にキャリア2を実装
する凹部201と、その幅方向両側面に切欠き202を
形成し、長手方向両端部に導波管構造の孔208と、該
導波管構造の孔203と凹部201の仕切り壁に割シ溝
204を形成するとともにパッケージ本体20の周囲に
複数の取付孔205を穿設したものである。21は金属
たとえば銅(On)等からなる蓋、22は高周波入出力
端子のマイクロストリップフィン、28は導波管203
を気密封止する絶縁体材料たとえば石英ガラス板等から
なる窓である。
Fig. 2 is a perspective view for explaining one embodiment of the present invention, (a) is a perspective view, (b) is a sectional view, and (C) is a perspective view of the back side, and the same parts as the previous one are designated by the same reference numerals. 20 is a package body made of metal such as copper (011), and the package body 20 has a recess 201 in the center for mounting the carrier 2 and notches 202 on both sides in the width direction. A waveguide structure hole 208 is formed at both ends in the longitudinal direction, a split groove 204 is formed in the partition wall between the waveguide structure hole 203 and the recess 201, and a plurality of mounting holes 205 are formed around the package body 20. It was drilled. 21 is a lid made of metal such as copper (On), 22 is a microstrip fin serving as a high frequency input/output terminal, and 28 is a waveguide 203.
This is a window made of an insulating material such as a quartz glass plate that hermetically seals the window.

パッケージ本体20の中央部にキャリア2を実装する四
部201を穿設するとともに、該凹部201の幅方向両
側に切欠き2o2を形成して、その壁部にDCバイアス
端子4および信号伝送端子5をそれぞれハーメチックシ
ールにより取iする。そして前記パッケージ本体2oの
長手方向両端部に導波管構造の孔203を穿孔し、該孔
203と凹部201の仕切り壁に割り溝204を形成し
、該割り溝204に高周波入出力端子用マイクロストリ
ップフィン22をその一部が導波管203に突出するよ
う取着したものである。この状態で前記凹部201に図
示しない受動および能動素子を搭載したキャリア2を実
装し、それぞれの端子3゜4およびマイクロストリップ
フィン22と接着接続したるのち、蓋21を溶着等によ
り取着し、さらに導波管203に絶縁体材料たとえば石
英ガラス板28を接着して気密封止したものである。
A four part 201 for mounting the carrier 2 is formed in the center of the package body 20, and a notch 2o2 is formed on both sides of the recess 201 in the width direction, and a DC bias terminal 4 and a signal transmission terminal 5 are connected to the wall part of the notch 2o2. Seal each with a hermetic seal. Then, holes 203 having a waveguide structure are bored at both ends in the longitudinal direction of the package body 2o, and a split groove 204 is formed in the partition wall between the hole 203 and the recess 201. The strip fin 22 is attached so that a part thereof protrudes into the waveguide 203. In this state, the carrier 2 carrying passive and active elements (not shown) is mounted in the recess 201, and is adhesively connected to the respective terminals 3.4 and the microstrip fins 22, and then the lid 21 is attached by welding or the like. Furthermore, an insulating material such as a quartz glass plate 28 is adhered to the waveguide 203 to seal it hermetically.

また、図示しないが、前記石英ガラス板に代えて、導波
管208の一部または全部に誘電体を充填して気密封止
して本よい。この誘電体を充填することにより導波管2
08を小さく形成することができるので、パッケージ自
体を小形化することが可能である。
Although not shown, instead of the quartz glass plate, part or all of the waveguide 208 may be filled with a dielectric and hermetically sealed. By filling this dielectric, the waveguide 2
08 can be formed small, it is possible to downsize the package itself.

第3図は、本発明に係るMXC用パッケージの実装例を
説明するための側面図で、30は金属たとえば銅(Cu
)等からなり、モジュー/I/81の導波管構造の孔2
03に対応する挿通孔801合穿孔してなる金属ベーク
、82はモジュール81を金属ベーク30に螺着する締
付ねじ、38は高周波入出力用の導波管である。
FIG. 3 is a side view for explaining a mounting example of the MXC package according to the present invention, and 30 is a metal such as copper (Cu).
), etc., and the hole 2 of the waveguide structure of Module/I/81.
82 is a tightening screw for screwing the module 81 onto the metal bake 30, and 38 is a waveguide for high frequency input/output.

複数のモジュー/l/31を金属ベーク30の表裏に交
互に導波管接続する挿通孔801を穿孔し、該挿通孔8
01に前記モジュー/L’81の図示しない導波管構造
の孔203が対応するよう締付ねじ82で取着する。そ
して配列接続された前記モジュー/L’81の高周波入
出力端に対応する挿通孔801にはそれぞれ導波管83
を取着すればよい。
Through-holes 801 for connecting a plurality of modules/l/31 with waveguides alternately on the front and back sides of the metal bake 30 are drilled.
01 with the tightening screw 82 so that the hole 203 of the waveguide structure (not shown) of the module/L'81 corresponds to the hole 203 of the module/L'81. A waveguide 83 is inserted into each insertion hole 801 corresponding to the high frequency input/output end of the array-connected modules/L'81.
All you have to do is attach the .

なお、本実装例ではモジュー/l/81を3個接続した
説明をしたが、モジュー/L’81は3個に限らず目的
に応じ複数個であっても構わず、またパッケージ本体2
0にはキャリア2を1枚搭載した説明を行なったが、回
路内容に応じ、2〜3枚を搭載する構造であっても構わ
ない。
In this implementation example, three modules /L'81 are connected, but the number of modules /L'81 is not limited to three, and it is possible to have more than one module depending on the purpose.
Although the explanation was given in which one carrier 2 is mounted on the carrier 2, the structure may be such that two or three carriers are mounted depending on the circuit content.

(f)発明の効果 以上の説明から明らかなように本発明に係るMIC用パ
ッケージによれば、従来のパッケージにくらべて周波数
の高い領域においてモジュール着脱の際の接続インピー
ダンスを良好に保持できるとともに、放熱効果が良好と
なり特性向上に寄与するところが大であり、さらに補修
が容易となる付加的効果がある。
(f) Effects of the Invention As is clear from the above explanation, the MIC package according to the present invention can better maintain connection impedance during module attachment and detachment in a high frequency range compared to conventional packages, and It has a good heat dissipation effect, which greatly contributes to improving properties, and has the additional effect of facilitating repair.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のMIC用パッケージを説明するための斜
視図、第2図は本発明に係るMIC用パッケージの一実
施例を説明するための(a)は斜視図、(至)は断面図
、(C)は裏面の斜視図、第8図は本発明に係るMIC
用パッケージの実装例を説明するための側面図である。 図において、lは筐体、2はキャリア、8は高周波入出
力用端子、4はDCバイアス端子、5は信号伝送用端子
、6および21は蓋、11および201は凹部、20は
パッケージ本体、22はマイクロストリップフィン、2
3は石英ガラス板、30は金属ベース、202は切欠き
、203は導波管構造の孔、204は割り溝、205は
取付孔、31はモジュール、32は締付ねじ、83は導
波管、301は挿通孔をそれぞれ示す。 第1図 第2図 、。2 夕1 第3図  ゛ /20 05
FIG. 1 is a perspective view for explaining a conventional MIC package, and FIG. 2 is a perspective view for explaining an embodiment of the MIC package according to the present invention. , (C) is a perspective view of the back side, and FIG. 8 is a MIC according to the present invention.
FIG. In the figure, l is a housing, 2 is a carrier, 8 is a high frequency input/output terminal, 4 is a DC bias terminal, 5 is a signal transmission terminal, 6 and 21 are lids, 11 and 201 are recesses, 20 is a package body, 22 is a microstrip fin, 2
3 is a quartz glass plate, 30 is a metal base, 202 is a notch, 203 is a hole in the waveguide structure, 204 is a split groove, 205 is a mounting hole, 31 is a module, 32 is a tightening screw, 83 is a waveguide , 301 indicate through holes, respectively. Figure 1 Figure 2. 2 Evening 1 Figure 3 ゛/20 05

Claims (1)

【特許請求の範囲】[Claims] (1)中央部にM工Cを実装する凹部を形成した気密封
止の筐体に、該MIC用のDCバイアス。 信号電送および高周波入出力用の端子を設けたMIC用
パッケージにおいて、前記高周波入出力用端子をマイク
ロストリップラインで形成するとともに、前記筐体に、
前記マイクロストリップラインの端部が突出するような
導波管構造の孔を穿設し、該導波管の出入口に気密封止
用蓋を付設したことを特徴とするMTCIC用パッケー ジ2)前記導波管の一部または全部に誘電体材料を充填
することにより気密封止することを特徴とする特許請求
の範囲第(1)項に記載のMIC用パッケージ。
(1) A DC bias for the MIC is placed in a hermetically sealed casing with a recess formed in the center to mount the MIC. In a MIC package provided with terminals for signal transmission and high frequency input/output, the high frequency input/output terminals are formed with microstrip lines, and the housing includes:
2) A package for MTCIC, characterized in that a hole in the waveguide structure is bored through which the end of the microstrip line protrudes, and an airtight sealing lid is attached to the entrance and exit of the waveguide. The MIC package according to claim 1, wherein the wave tube is hermetically sealed by filling part or all of the wave tube with a dielectric material.
JP57099467A 1982-06-09 1982-06-09 Package for mic Pending JPS58215802A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57099467A JPS58215802A (en) 1982-06-09 1982-06-09 Package for mic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57099467A JPS58215802A (en) 1982-06-09 1982-06-09 Package for mic

Publications (1)

Publication Number Publication Date
JPS58215802A true JPS58215802A (en) 1983-12-15

Family

ID=14248110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57099467A Pending JPS58215802A (en) 1982-06-09 1982-06-09 Package for mic

Country Status (1)

Country Link
JP (1) JPS58215802A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6466101B2 (en) 1998-07-08 2002-10-15 Nec Corporation Microstrip line-waveguide converter structure, integrated circuit package for high frequency signals provided with this converter structure, and manufacturing method therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552602A (en) * 1978-10-13 1980-04-17 Fujitsu Ltd Waveguide mount

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552602A (en) * 1978-10-13 1980-04-17 Fujitsu Ltd Waveguide mount

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6466101B2 (en) 1998-07-08 2002-10-15 Nec Corporation Microstrip line-waveguide converter structure, integrated circuit package for high frequency signals provided with this converter structure, and manufacturing method therefor

Similar Documents

Publication Publication Date Title
US6476463B1 (en) Microwave integrated circuit multi-chip-module
US5847453A (en) Microwave circuit package
US7756503B2 (en) High frequency module
US5574314A (en) Packaged semiconductor device including shielded inner walls
JP3209183B2 (en) High frequency signal integrated circuit package and method of manufacturing the same
JPS58215802A (en) Package for mic
JP3328235B2 (en) Ceramic package for semiconductor device
JP2603310B2 (en) High frequency integrated circuit package
JPS62179135A (en) Microwave device module
US5107074A (en) Multi-lead hermetic power package with high packing density
JPH0810198Y2 (en) Package for storing semiconductor devices
JPH06112352A (en) Package for high frequency element
AU607367B1 (en) Power semiconductor package
GB2237453A (en) High current feedthrough package and method of making same.
JP2001274278A (en) Microwave semiconductor device and its manufacturing method
JPS58215801A (en) Package for mic
US4972043A (en) Multi-lead hermetic power package with high packing density
Drevon et al. Mixed LF/RF MCM
JPS603781B2 (en) Assembly method of ultra-high frequency transistor device
JP2687172B2 (en) High-speed device package
JP2002198712A (en) Waveguide conversion board and high frequency module
JP2609767B2 (en) Semiconductor device
JPS6123346A (en) Electronic cooling low noise amplifier
JPS59107601A (en) Strip line module
JPS58213502A (en) Package for mic