JPS5821148A - Inspecting device for working state - Google Patents

Inspecting device for working state

Info

Publication number
JPS5821148A
JPS5821148A JP12041481A JP12041481A JPS5821148A JP S5821148 A JPS5821148 A JP S5821148A JP 12041481 A JP12041481 A JP 12041481A JP 12041481 A JP12041481 A JP 12041481A JP S5821148 A JPS5821148 A JP S5821148A
Authority
JP
Japan
Prior art keywords
inspected
signal
pattern information
shadow
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12041481A
Other languages
Japanese (ja)
Other versions
JPH059733B2 (en
Inventor
Hisashi Misumi
壽 三角
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kao Corp
Original Assignee
Kao Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kao Corp filed Critical Kao Corp
Priority to JP12041481A priority Critical patent/JPS5821148A/en
Publication of JPS5821148A publication Critical patent/JPS5821148A/en
Publication of JPH059733B2 publication Critical patent/JPH059733B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95607Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To inspect working states with high accuracy and efficiency by detecting the passage of an object to be inspected in a photosensor part, forming the image of the shadow in the leading end part of the material to be inspected on a photoelectric converting part, and comparing the result of operation of the pattern information thereof with a reference pattern. CONSTITUTION:When plural materials 1 to be inspected arrive at an optical sensor part 13 during passage through an inspection port 8, the light from a light source 9 is interrupted, and the output of a photodiode 12 changes. Said change is detected with an inspecting part 14, and the signal is applied to a lamp power source 16 and a scanning part 15. A lamp 17 emits light instantaneously and irradiates the leading end part of the materials 1. The shadow of the leading end part is imaged via a lens 19 on a photoelectric converting part 20. Said image is scanned by the part 20, and the digital signal thereof is converted to a series signal with a parallel to series converting part 21. The series signal is stored via a receiving part 23 in a storage part 24. The pattern information is processed in an arithmetic part, by which the working size is calculated and is compared with the reference pattern in an ROM26. The question whether the pattern is defective or nondefective is displayed 29. Thus the patterns are inspected with high accuracy and efficiency.

Description

【発明の詳細な説明】 本発明は、ブラシの植毛あるいは櫛刃等の線状物等の先
端を加工する工種・で、その加工先端部の良否を自動的
に検査する加工状態の検査装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a machining state inspection device that automatically inspects the quality of the machined tip in a type of work that processes the tip of a linear object such as a brush flock or a comb blade. .

一般ニ、ヘアブラシ等はそのブラシ植毛の先端が頭皮を
傷付けるのを防止するため、先端部に加熱処理を施し球
状に加工している。
In order to prevent the tips of hair brushes from damaging the scalp, the tips of hairbrushes are generally heat-treated to make them spherical.

従来、この種の加工先端部の検査は、拡大レンズを介し
ての目視による検査、あるいは複数段のゲージを順次通
過させて機械的に検査する等の方法が行われている。こ
れらの方法によれば工数が大キク、検査速度が遅く、さ
らに検査精度が必ずしも均一でない場合があり、製品に
バラツキを生じることがある。また、検査装置には先端
部をそろえて流入させなけ牡ばならない等の欠点を有す
る。
Conventionally, this type of inspection of the processed tip has been carried out by visual inspection through a magnifying lens or mechanical inspection by sequentially passing through a plurality of gauges. These methods require a large number of man-hours, the inspection speed is slow, and the inspection accuracy may not always be uniform, resulting in variations in the product. In addition, the inspection device has drawbacks such as the fact that the tip must be aligned to allow inflow.

禾発明はこの点を改良するもので、検査精度が高く、し
かも検査効率の良い加工状態の検出装置を提供すること
を目的とする。
The present invention aims to improve this point, and aims to provide a processing state detection device with high inspection accuracy and inspection efficiency.

本発明は、被検査材の通過する位置に配置され被検査材
を照射する光学的手段と、被検査材の陰影が結像する面
に配置さtた面状に配列された7トリツクス状のエレメ
ントからなる光電気変換手段と、この光電気変換部の平
面に結像する陰影のパターン情報を電気的に走査して電
気信号として出力する信号出力手段と、この手段の出力
信号を一時記憶する記憶手段と、この記憶手段に記憶さ
nた前記陰影のパターン情報をあらかじめ設定さnた基
準パターン情報と比較してこれが許容さ扛る寸法精度内
で一致するか否かを演算判定する情報処理手段とを備え
たことを特徴とする。
The present invention includes an optical means arranged at a position where the inspected material passes and irradiates the inspected material, and a seven-tricks-shaped optical means arranged in a planar shape arranged on a surface where the shadow of the inspected material is imaged. A photoelectric conversion means consisting of an element, a signal output means for electrically scanning the pattern information of the shadow formed on the plane of the photoelectric conversion section and outputting it as an electric signal, and a signal output means for temporarily storing the output signal of this means. storage means, and information processing for comparing the pattern information of the shading stored in the storage means with preset reference pattern information and calculating and determining whether or not they match within an allowable dimensional accuracy. It is characterized by comprising means.

また、被検査材が所定の結像位置に達したことを光学的
に検査する手段を備え、この手段の出力に同期して信号
出力手段が動作するように構成することか好ましい。
Further, it is preferable that the apparatus is provided with means for optically inspecting whether the inspected material has reached a predetermined imaging position, and the signal output means is configured to operate in synchronization with the output of this means.

また、被検査材を連続的に自動供給する手段を備えるこ
とが好ましい。
Further, it is preferable to include means for continuously and automatically supplying the material to be inspected.

本発明の一実施例を図面に基づいて説明する。An embodiment of the present invention will be described based on the drawings.

第1図は、本発明一実施例の外観を示す要部構造図であ
る。第1図は、被検査材1と、この被検査材1が通過す
る毎にパターン情報を発生する検知装置2と、この検知
装置2の発生するパターン情報を信号線3を介して受取
り、基準パターンと比較し許容範囲内にあるか否かを判
別して出力する制御部5とで構成さnている。
FIG. 1 is a structural diagram of main parts showing the appearance of an embodiment of the present invention. FIG. 1 shows a material to be inspected 1, a detection device 2 that generates pattern information each time the material to be inspected 1 passes, and a detection device 2 that receives the pattern information generated by the detection device 2 via a signal line 3 and uses it as a reference. It is comprised of a control section 5 which compares the pattern with the pattern, determines whether it is within the allowable range, and outputs the result.

第2図は、前記検知装置2および制御部5の詳細図であ
る。検知装置2には被検査材1が通過する帳簿の開口で
ある検査口8が形成されている。
FIG. 2 is a detailed diagram of the detection device 2 and the control section 5. The detection device 2 is formed with an inspection opening 8 which is an opening in a ledger through which the inspected material 1 passes.

この検査口8のほぼ中央には、前記開口の下側に設けら
nた光源9と、この光源9の出射光を前記検査口8に投
光する投光用レンズ10と、この出射光を受光する前記
開口の上側に設けられた受光用レンズ11と、この受光
用レンズ11と光学的に結合さnたフォトダイオード1
2とで構成さnた光学センサ部13が設けられている。
Approximately in the center of this inspection opening 8, there is a light source 9 provided below the opening, a light projecting lens 10 that projects the emitted light of this light source 9 into the inspection opening 8, and A light-receiving lens 11 provided above the light-receiving aperture, and a photodiode 1 optically coupled to the light-receiving lens 11.
An optical sensor section 13 consisting of 2 and 2 is provided.

この光学センサ部13内のフォトダイオード12の電気
出力は検出部14に導かれている。この検出部14の出
力は走査部15およびランプ電源16にそれぞれ導かれ
ている。
The electrical output of the photodiode 12 in this optical sensor section 13 is led to a detection section 14. The output of this detection section 14 is led to a scanning section 15 and a lamp power supply 16, respectively.

このランプ電源16にはランプ17が接続さnている。A lamp 17 is connected to this lamp power source 16.

このランプ17の発する光線は投光用レンズ18に光学
的に結合されている。この投光用レンズ18により前記
検査口8を通過した光は受光用レンズ19に光学的に結
合されている。このランプ17、投光用レンズ18およ
び受光用レンズ19からなる光学系は、前記光学センサ
部13の出射光を遮断する被検査材1の先端部圧このラ
ンプ17の出射光が照射さする位置にそれぞれ設けら牡
ている。この受光用レンズ19の結像点には面状のマト
リックス状の光電気変換素子からなる光電気変換部20
が配置されている。この光電、気変換部20の走査入力
には前記走査部15の出力が導かれている。この光電気
変換部20の電気出力は並直列変換回路21に導かnで
いる。この並直列変換回路21は前記光電5気変換部2
0に一体形成されている。この並直列変換回路21の出
力は増幅部22に導かれている。
The light beam emitted by this lamp 17 is optically coupled to a projection lens 18. The light passing through the inspection port 8 is optically coupled to the light receiving lens 19 by the light projecting lens 18 . An optical system consisting of this lamp 17, a light projecting lens 18, and a light receiving lens 19 is arranged so that the tip of the object to be inspected 1 that blocks the light emitted from the optical sensor section 13 is located at a position where the light emitted from the lamp 17 is irradiated. Each has its own set of fish. At the imaging point of this light receiving lens 19, there is a photoelectric conversion section 20 consisting of a planar matrix photoelectric conversion element.
is located. The output of the scanning section 15 is led to the scanning input of the photoelectric/electronic converter 20. The electrical output of this photoelectric converter 20 is led to a parallel-to-serial converter circuit 21. This parallel-to-serial conversion circuit 21 includes the photoelectric 5-voltage conversion section 2.
0 is integrally formed. The output of this parallel-to-serial conversion circuit 21 is led to an amplifier section 22.

この増幅部22の出力は信号線3を介して制御部5内の
受信部23に導かれている。この制御部23の出力は記
憶部24に導かれている。この記憶部24には演算部2
5が接続されている。この演算部25には基準パターン
および制御プログラムが記憶されたR OM (Rea
d 0nly Memory ) 26が接続されてい
る。
The output of this amplifying section 22 is led to a receiving section 23 in the control section 5 via a signal line 3. The output of this control section 23 is led to a storage section 24. This storage unit 24 has an arithmetic unit 2
5 is connected. This calculation unit 25 has a ROM (Rea) in which a reference pattern and a control program are stored.
d0nlyMemory) 26 is connected.

この演算部25の出力はインタフェース部nを介I7て
信号線28〜30に導かれている。
The output of this calculation section 25 is led to signal lines 28 to 30 via an interface section I7.

第3図は、前記光電気変換部2o上に結像された被検査
材1の先端部の陰影の一例を拡大して示す図である。第
3図でAは先端部の最大径、Bは先端からCの長さを有
する点の線径をそれぞれ示している。
FIG. 3 is an enlarged view showing an example of the shadow of the tip of the object to be inspected 1 imaged on the photoelectric converter 2o. In FIG. 3, A indicates the maximum diameter of the tip, and B indicates the wire diameter at a point having a length of C from the tip.

このようガ回路構成の本発明の特徴ある動作を説明する
。被検査材1は所定間隔を有してライン上(図示せず)
に配置される。このラインの移動にしたがって複数の被
検査材1は第1図に示すように自動的に連続して検知装
置2の検査口8に供給されその先端部の検査が連続して
自動的に行ゎれる。
The characteristic operation of the present invention having such a circuit configuration will be explained. The material to be inspected 1 is placed on a line with a predetermined interval (not shown).
will be placed in As this line moves, a plurality of materials 1 to be inspected are automatically and successively supplied to the inspection port 8 of the detection device 2 as shown in FIG. 1, and their tips are automatically and continuously inspected. It will be done.

いま、被検査材1が検査口8を通過中に光学センサ部1
3の位誼に至ると、光源9から常時検査口8に投光され
ている出射光が被検査材1により遮断される。これによ
り、フォトダイオード12の出力は変化する。この変化
を検出部14が検出し検出出力をランプ電源および走査
部15にそれぞれ与える。
Now, while the inspected material 1 is passing through the inspection port 8, the optical sensor section 1
When the position 3 is reached, the emitted light that is constantly projected into the inspection port 8 from the light source 9 is blocked by the inspected material 1. As a result, the output of the photodiode 12 changes. The detection section 14 detects this change and provides detection outputs to the lamp power supply and the scanning section 15, respectively.

これにより、ランプ17が瞬間的に発光し、光学センサ
部13に至った被検査材1の先端部を照射する。この照
射光によシ受光用レンズ19を介して、光電、気変換部
20の上に第3図に示すような陰影が結像される。この
結像は光電気変換部20の走査に同期して、第3図に斜
線で示す陰影部分は黒レベル信号に、第5図の白部分は
白レベル信号にそれぞれ変換される。このディジタル信
号によシバターン情報は並直列変換部21で直列信号に
変換され受信部23でTTLレベル変換された後に記憶
部24の所定アドレスに記憶される。
As a result, the lamp 17 momentarily emits light and irradiates the tip of the inspected material 1 that has reached the optical sensor section 13. This irradiation light forms a shadow as shown in FIG. 3 on the photoelectric/air converter 20 through the light receiving lens 19. This image formation is synchronized with the scanning of the photoelectric converter 20, and the shaded areas shown in FIG. 3 are converted into black level signals, and the white areas in FIG. 5 are converted into white level signals. The digital signal converter information is converted into a serial signal by a parallel-to-serial converter 21, converted to a TTL level by a receiver 23, and then stored at a predetermined address in a storage 24.

このパターン情報は演算部25により読出され、第3図
Aに示す先端部最大径と同図Bに示す線径とのデータが
演算されるとともに、加工寸法dがa=A−B のように演算される。この加工寸法d iJ ROM 
25内の基準パターンと比較演算され、許容範囲内にあ
ればインタフェース部nを介して信号線28に「良」表
示が、許容範囲外にあれば「否」表示が信号線29にそ
れぞれ表示される。これにより、「否」表示がなされた
被検査材1は監視者の手操作により、あるいは他の制御
装置による自動操作によりラインより除去される。
This pattern information is read out by the calculation unit 25, and the data of the maximum diameter of the tip shown in FIG. 3A and the wire diameter shown in FIG. Calculated. This processing dimension d iJ ROM
25, and if it is within the allowable range, a "good" display is displayed on the signal line 28 via the interface section n, and if it is outside the allowable range, a "fail" display is displayed on the signal line 29. Ru. As a result, the inspected material 1 marked as "fail" is removed from the line either manually by the supervisor or automatically by another control device.

ここで、パターン情報により認識されるべきデータは先
端部の最大径A、この先端よりCの長さを有する部分の
線径Bである。このため、前記光電気変換部20上に結
像される場合に、その結像位置は光電気変換部20の結
像面内にあればその結像位置が一致してい、なくても検
査に悪影響は生じない。したがって、被□検査材1の先
端は、検査口80通過時に完全にそろっていなくとも良
い。検査時に被検査材1の先端位置が大きくずれていて
結像状態が光電気変換部20上で大きくずれ、パターン
情報より前記AおよびBが認識でき方いときには、信号
線30にその旨の表示がなされる。
Here, the data to be recognized from the pattern information is the maximum diameter A of the tip, and the wire diameter B of a portion having a length C from the tip. Therefore, when an image is formed on the photoelectric converter 20, if the image forming position is within the image forming plane of the photoelectric converter 20, the image forming position will match, but even if it is not, it can be inspected. No adverse effects will occur. Therefore, the tips of the inspection object 1 do not need to be completely aligned when passing through the inspection port 80. During inspection, if the position of the tip of the material to be inspected 1 is greatly shifted and the image formation state is largely shifted on the photoelectric converter 20 and it is difficult to recognize A and B from the pattern information, a message to that effect is displayed on the signal line 30. will be done.

なお、上記実施例は加工寸法の検査を先端部の最゛大径
と所定位置の線径との差より行う場合を示したが、パタ
ーン情報より先端部の球形状のゆがみ等を検出t、、こ
れをROM内の基準パターンと比較して高精度の検査を
行うこともできる。さらに、線状材料の先端部の検査に
限られるものでな(ROMの内容を交換して、基準パタ
ーンを変えることにより多種類の検査を同様に行うこと
ができる。また、線状材料に限られるものでなく照射光
により光電気変換部上に鮮明に結像する材料であれば同
様の検査を行うことができる。
In addition, although the above embodiment shows a case where the machining dimensions are inspected based on the difference between the maximum diameter of the tip and the wire diameter at a predetermined position, it is also possible to detect distortion of the spherical shape of the tip from pattern information. , it is also possible to perform a highly accurate inspection by comparing this with a reference pattern in the ROM. Furthermore, it is not limited to the inspection of the tip of a linear material (by exchanging the contents of the ROM and changing the reference pattern, many types of inspections can be performed in the same way). A similar inspection can be performed on any material that can be clearly imaged onto the photoelectric conversion section by the irradiated light.

以上説明したように本開明によれば、被検査材の通過を
光センサ部で検出し、この検出時に光電気変換部上に被
検査材の先端部の陰影を結像させてパターン情報を発生
させ、このパターン情報の演算結果を基準パターンと比
較【−で加工寸法が許容範囲内にあるか否かを判別する
こととした。
As explained above, according to the present invention, the passage of the material to be inspected is detected by the optical sensor section, and at the time of this detection, the shadow of the tip of the material to be inspected is imaged on the photoelectric conversion section to generate pattern information. Then, the calculation result of this pattern information is compared with the reference pattern to determine whether the machining dimensions are within the allowable range.

したがって、被検査材の検査を自動的に連続的に、し7
かも高速に行うことができる。また、検査はパターン情
報の演算結果を用いて行うため、検査精度も任意に選ぶ
ことができる。さらに、ゲージ等も必要とせず検査工数
を少なくすることができる。また、検査精度も均一とガ
り製品の品質も向上させることができる等の効果を有す
る。
Therefore, the inspection of the inspected material can be carried out automatically and continuously.
It can also be done faster. Furthermore, since the inspection is performed using the calculation results of the pattern information, the inspection accuracy can also be arbitrarily selected. Furthermore, no gauges or the like are required, and the number of inspection steps can be reduced. In addition, the inspection accuracy is uniform, and the quality of gulped products can also be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明一実施例の外観を示す図。 第2図は前記実施例の詳細図。 第3図は前記実施例の結像状態を示す図。 1・・・被検査材、2・・・検査装置、3.27〜29
・・・信号線、5・・・制御部、8・・・検査口、9・
・・光源、10.18・・・投光用レンズ、11.19
・・・受光用レンズ、12・・・フォトダイオード、1
3・・・光学センサ部、14・・・検出部、15・・・
走査部、16・・・ランプ電源、17・・・ランプ、2
0・・・光電気変換部、21・・・増幅部、23・・・
記憶部、24・・・演31 部、 25・・・ROM、
26・・・インタフェース部。 特許出願人 花王石鹸株式会社 代理人  弁理士 井 出 直 孝
FIG. 1 is a diagram showing the appearance of an embodiment of the present invention. FIG. 2 is a detailed view of the embodiment. FIG. 3 is a diagram showing the imaging state of the embodiment. 1... Material to be inspected, 2... Inspection device, 3.27-29
...Signal line, 5.Control unit, 8.Inspection port, 9.
...Light source, 10.18...Lens for projection, 11.19
...Lens for light reception, 12...Photodiode, 1
3... Optical sensor section, 14... Detection section, 15...
Scanning unit, 16... Lamp power supply, 17... Lamp, 2
0... Photoelectric conversion section, 21... Amplification section, 23...
Memory section, 24... Performance 31 section, 25... ROM,
26...Interface section. Patent applicant: Kao Soap Co., Ltd. Representative Patent attorney: Naotaka Ide

Claims (3)

【特許請求の範囲】[Claims] (1)被検査材の通過する位置に配置さn被検査材を照
射する光学的手段と、被検査材の陰影が結像する面に配
置された面状に配列さ牡たマトリックス状のエレメント
から力る光電気変換手段と、この光電気変換手段の平面
に結像す不陰影のパターン情報を電気的に走査して電気
信号として出力する信号出力手段と、この手段の出力信
号を一時記憶する記憶手段と、この記憶手段に記憶され
た前記陰影のパターン情報をあらかじめ設定さnた基準
パターン情報と比較してこれが許容される寸法精度内で
一致するか否かを演算判定する情報処理手段とを備えた
加工状態の検査装置。
(1) An optical means arranged at a position where the inspected material passes, and an optical means for irradiating the inspected material, and a matrix-like element arranged in a plane on the surface where the shadow of the inspected material is imaged. a photoelectric conversion means that outputs an electric signal from the photoelectric conversion means; a signal output means that electrically scans the pattern information of the shadow formed on the plane of the photoelectric conversion means and outputs it as an electric signal; and a signal output means that temporarily stores the output signal of this means. and an information processing means for comparing the pattern information of the shading stored in the storage means with preset reference pattern information to determine whether or not they match within an allowable dimensional accuracy. A machining condition inspection device equipped with
(2)被検査材が所定の結像位置に達したことを光学的
に検出する手段を備え、この手段の出力に同期して信号
出力手段が動作するように構成された特許請求の範囲第
(1)項記載の加工状態あ検査装置。
(2) Claim No. 1 comprising means for optically detecting that the inspected material has reached a predetermined imaging position, and the signal output means is configured to operate in synchronization with the output of this means. Processing condition inspection device described in (1).
(3)被検査材を連続的に自動供給する手段を供えた特
許請求の範囲第(2)項記載の加工状態の検査装置。
(3) A processing state inspection device according to claim (2), which is provided with means for continuously and automatically supplying the material to be inspected.
JP12041481A 1981-07-30 1981-07-30 Inspecting device for working state Granted JPS5821148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12041481A JPS5821148A (en) 1981-07-30 1981-07-30 Inspecting device for working state

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12041481A JPS5821148A (en) 1981-07-30 1981-07-30 Inspecting device for working state

Publications (2)

Publication Number Publication Date
JPS5821148A true JPS5821148A (en) 1983-02-07
JPH059733B2 JPH059733B2 (en) 1993-02-05

Family

ID=14785622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12041481A Granted JPS5821148A (en) 1981-07-30 1981-07-30 Inspecting device for working state

Country Status (1)

Country Link
JP (1) JPS5821148A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106574A (en) * 1983-11-15 1985-06-12 凸版印刷株式会社 Automatic detector for defective of paper cup

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5055380A (en) * 1973-09-12 1975-05-15
JPS5136164A (en) * 1974-09-21 1976-03-26 Mitsubishi Heavy Ind Ltd Tsukabutsutai no kenshutsuhanbetsusochi
JPS5491181A (en) * 1977-12-28 1979-07-19 Fujitsu Ltd Pattern deffect discrimination
JPS5570702A (en) * 1978-11-22 1980-05-28 Yoshida Tsunehiro Detector for screw pitch

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5055380A (en) * 1973-09-12 1975-05-15
JPS5136164A (en) * 1974-09-21 1976-03-26 Mitsubishi Heavy Ind Ltd Tsukabutsutai no kenshutsuhanbetsusochi
JPS5491181A (en) * 1977-12-28 1979-07-19 Fujitsu Ltd Pattern deffect discrimination
JPS5570702A (en) * 1978-11-22 1980-05-28 Yoshida Tsunehiro Detector for screw pitch

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60106574A (en) * 1983-11-15 1985-06-12 凸版印刷株式会社 Automatic detector for defective of paper cup
JPS6322196B2 (en) * 1983-11-15 1988-05-11 Toppan Printing Co Ltd

Also Published As

Publication number Publication date
JPH059733B2 (en) 1993-02-05

Similar Documents

Publication Publication Date Title
US5090811A (en) Optical radius gauge
US6208750B1 (en) Method for detecting particles using illumination with several wavelengths
JP3105702B2 (en) Optical defect inspection equipment
JPS5821148A (en) Inspecting device for working state
JPH06509416A (en) Probe for surface measurement
KR920002920B1 (en) Method and apparatus for measuring the size of wire rod with laser beam
JP2521729B2 (en) Flatness measuring device
JP2607108Y2 (en) Solder inspection system
JPS6364738B2 (en)
JPS63269006A (en) Apparatus for inspecting flatness
JPS6218358Y2 (en)
JPH01227910A (en) Optical inspection device
JPH06267315A (en) Linear lighting system and line image sensor inspecting device
JPS61225604A (en) Dimension measurement apparatus
JPH01214743A (en) Optical apparatus for checking
JPS61246608A (en) Inspecting apparatus of shape
JPS6011106A (en) Shape detecting device
JPH0356845A (en) Device and method for laser inspection
JPH05223753A (en) Inspection device for light diffusion body
JPH07229842A (en) Method and equipment for inspecting dust particle in ic
JPS6129704A (en) Measuring method
KR20010036825A (en) Method of 3D visual check by rotating mirrors and computer vision system using thereof
JPH0621179A (en) Erasing method for eliminated area of ic chip
JPH02190707A (en) Method and device for inspecting surface defect
JP3101773B2 (en) Wafer foreign matter inspection device