JPS61225604A - Dimension measurement apparatus - Google Patents

Dimension measurement apparatus

Info

Publication number
JPS61225604A
JPS61225604A JP6606985A JP6606985A JPS61225604A JP S61225604 A JPS61225604 A JP S61225604A JP 6606985 A JP6606985 A JP 6606985A JP 6606985 A JP6606985 A JP 6606985A JP S61225604 A JPS61225604 A JP S61225604A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
specimen
dimension
master
image
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6606985A
Inventor
Hiroo Fujita
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
    • G01B11/024Measuring arrangements characterised by the use of optical means for measuring length, width or thickness by means of diode-array scanning

Abstract

PURPOSE:To enable dimension measurement without depending on a value of the threshold level, by arranging a dimension comparing master in the vicinity of a specimen and obtaining a bit number of the difference between them. CONSTITUTION:A dimensionally known dimension compomporing master 21 and a dimensionally unknown specimen 22 are positioned with a distance S apart. And, a beam of light from a source 20 is irradiated to the master 21 and the specimen 22 simultaneously. Next, optical noise included in transmitted beams 201 from the specimen 22 and the master 21 are silenced in an image convertor 23 for conversion of a magnifying ratio of the image. Then, a solid image sensor 24 which received beams of light 202 from the convertor 23 generates a video signal 203 by converting a light quantity value per each bit into an electric intensity value for calculation of the dimension of the specimen 22.
JP6606985A 1985-03-29 1985-03-29 Dimension measurement apparatus Pending JPS61225604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6606985A JPS61225604A (en) 1985-03-29 1985-03-29 Dimension measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6606985A JPS61225604A (en) 1985-03-29 1985-03-29 Dimension measurement apparatus

Publications (1)

Publication Number Publication Date
JPS61225604A true true JPS61225604A (en) 1986-10-07

Family

ID=13305190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6606985A Pending JPS61225604A (en) 1985-03-29 1985-03-29 Dimension measurement apparatus

Country Status (1)

Country Link
JP (1) JPS61225604A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE38025E1 (en) * 1991-02-22 2003-03-11 Cyberoptics Corporation High precision component alignment sensor system
US7746481B2 (en) 2007-03-20 2010-06-29 Cyberoptics Corporation Method for measuring center of rotation of a nozzle of a pick and place machine using a collimated laser beam
US8068664B2 (en) 2007-06-05 2011-11-29 Cyberoptics Corporation Component sensor for pick and place machine using improved shadow imaging

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE38025E1 (en) * 1991-02-22 2003-03-11 Cyberoptics Corporation High precision component alignment sensor system
US7746481B2 (en) 2007-03-20 2010-06-29 Cyberoptics Corporation Method for measuring center of rotation of a nozzle of a pick and place machine using a collimated laser beam
US8068664B2 (en) 2007-06-05 2011-11-29 Cyberoptics Corporation Component sensor for pick and place machine using improved shadow imaging

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