JPS58207373A - エツチング方法 - Google Patents

エツチング方法

Info

Publication number
JPS58207373A
JPS58207373A JP8809882A JP8809882A JPS58207373A JP S58207373 A JPS58207373 A JP S58207373A JP 8809882 A JP8809882 A JP 8809882A JP 8809882 A JP8809882 A JP 8809882A JP S58207373 A JPS58207373 A JP S58207373A
Authority
JP
Japan
Prior art keywords
etching
etched
shadow mask
speed
steel sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8809882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427299B2 (enExample
Inventor
Masaharu Kanto
関東　正治
Yasuhisa Otake
大竹　康久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8809882A priority Critical patent/JPS58207373A/ja
Publication of JPS58207373A publication Critical patent/JPS58207373A/ja
Publication of JPH0427299B2 publication Critical patent/JPH0427299B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP8809882A 1982-05-26 1982-05-26 エツチング方法 Granted JPS58207373A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8809882A JPS58207373A (ja) 1982-05-26 1982-05-26 エツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8809882A JPS58207373A (ja) 1982-05-26 1982-05-26 エツチング方法

Publications (2)

Publication Number Publication Date
JPS58207373A true JPS58207373A (ja) 1983-12-02
JPH0427299B2 JPH0427299B2 (enExample) 1992-05-11

Family

ID=13933386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8809882A Granted JPS58207373A (ja) 1982-05-26 1982-05-26 エツチング方法

Country Status (1)

Country Link
JP (1) JPS58207373A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0372089A (ja) * 1989-08-11 1991-03-27 Matsushita Electric Works Ltd 配線回路形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0372089A (ja) * 1989-08-11 1991-03-27 Matsushita Electric Works Ltd 配線回路形成装置

Also Published As

Publication number Publication date
JPH0427299B2 (enExample) 1992-05-11

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