JPS58202808A - 測長方法 - Google Patents

測長方法

Info

Publication number
JPS58202808A
JPS58202808A JP8633182A JP8633182A JPS58202808A JP S58202808 A JPS58202808 A JP S58202808A JP 8633182 A JP8633182 A JP 8633182A JP 8633182 A JP8633182 A JP 8633182A JP S58202808 A JPS58202808 A JP S58202808A
Authority
JP
Japan
Prior art keywords
scanning
scanning signal
distance
lenses
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8633182A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125004B2 (OSRAM
Inventor
Kazumitsu Tanaka
一光 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP8633182A priority Critical patent/JPS58202808A/ja
Publication of JPS58202808A publication Critical patent/JPS58202808A/ja
Publication of JPH0125004B2 publication Critical patent/JPH0125004B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP8633182A 1982-05-21 1982-05-21 測長方法 Granted JPS58202808A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8633182A JPS58202808A (ja) 1982-05-21 1982-05-21 測長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8633182A JPS58202808A (ja) 1982-05-21 1982-05-21 測長方法

Publications (2)

Publication Number Publication Date
JPS58202808A true JPS58202808A (ja) 1983-11-26
JPH0125004B2 JPH0125004B2 (OSRAM) 1989-05-16

Family

ID=13883849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8633182A Granted JPS58202808A (ja) 1982-05-21 1982-05-21 測長方法

Country Status (1)

Country Link
JP (1) JPS58202808A (OSRAM)

Also Published As

Publication number Publication date
JPH0125004B2 (OSRAM) 1989-05-16

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