JPS58202384A - 真空装置の起動負荷軽減装置 - Google Patents

真空装置の起動負荷軽減装置

Info

Publication number
JPS58202384A
JPS58202384A JP8499782A JP8499782A JPS58202384A JP S58202384 A JPS58202384 A JP S58202384A JP 8499782 A JP8499782 A JP 8499782A JP 8499782 A JP8499782 A JP 8499782A JP S58202384 A JPS58202384 A JP S58202384A
Authority
JP
Japan
Prior art keywords
valve
bellows
container
pump
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8499782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0259307B2 (enrdf_load_stackoverflow
Inventor
Hajime Ishimaru
石丸　肇
Katsuya Narishima
成島　勝也
Yasuo Osawa
大沢　康雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saginomiya Seisakusho Inc
Original Assignee
Saginomiya Seisakusho Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saginomiya Seisakusho Inc filed Critical Saginomiya Seisakusho Inc
Priority to JP8499782A priority Critical patent/JPS58202384A/ja
Publication of JPS58202384A publication Critical patent/JPS58202384A/ja
Publication of JPH0259307B2 publication Critical patent/JPH0259307B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP8499782A 1982-05-21 1982-05-21 真空装置の起動負荷軽減装置 Granted JPS58202384A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8499782A JPS58202384A (ja) 1982-05-21 1982-05-21 真空装置の起動負荷軽減装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8499782A JPS58202384A (ja) 1982-05-21 1982-05-21 真空装置の起動負荷軽減装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP11519490A Division JPH02298690A (ja) 1990-05-02 1990-05-02 流量制御弁と二つのベローズを用いた真空装置の起動負荷軽減装置
JP11519390A Division JPH02298689A (ja) 1990-05-02 1990-05-02 流量制御弁を用いた真空装置の起動負荷軽減装置

Publications (2)

Publication Number Publication Date
JPS58202384A true JPS58202384A (ja) 1983-11-25
JPH0259307B2 JPH0259307B2 (enrdf_load_stackoverflow) 1990-12-12

Family

ID=13846265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8499782A Granted JPS58202384A (ja) 1982-05-21 1982-05-21 真空装置の起動負荷軽減装置

Country Status (1)

Country Link
JP (1) JPS58202384A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244408A (en) * 1975-10-04 1977-04-07 Kyowa Shinku Gijutsu Kk Method and device for the optional control of vacuum degree

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244408A (en) * 1975-10-04 1977-04-07 Kyowa Shinku Gijutsu Kk Method and device for the optional control of vacuum degree

Also Published As

Publication number Publication date
JPH0259307B2 (enrdf_load_stackoverflow) 1990-12-12

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