JPS58197269A - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPS58197269A JPS58197269A JP7817082A JP7817082A JPS58197269A JP S58197269 A JPS58197269 A JP S58197269A JP 7817082 A JP7817082 A JP 7817082A JP 7817082 A JP7817082 A JP 7817082A JP S58197269 A JPS58197269 A JP S58197269A
- Authority
- JP
- Japan
- Prior art keywords
- strip
- plating material
- liquid drops
- plated
- heaters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract description 3
- 239000000463 material Substances 0.000 claims abstract description 20
- 238000007747 plating Methods 0.000 claims abstract description 19
- 238000001704 evaporation Methods 0.000 claims abstract description 9
- 230000008020 evaporation Effects 0.000 claims abstract description 8
- 238000007738 vacuum evaporation Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 abstract description 7
- 230000008018 melting Effects 0.000 abstract description 3
- 238000002844 melting Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 6
- 230000002411 adverse Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7817082A JPS58197269A (ja) | 1982-05-12 | 1982-05-12 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7817082A JPS58197269A (ja) | 1982-05-12 | 1982-05-12 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58197269A true JPS58197269A (ja) | 1983-11-16 |
| JPH028025B2 JPH028025B2 (enExample) | 1990-02-22 |
Family
ID=13654460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7817082A Granted JPS58197269A (ja) | 1982-05-12 | 1982-05-12 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58197269A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04311017A (ja) * | 1991-04-09 | 1992-11-02 | Matsushita Electric Ind Co Ltd | 乾式高圧コンデンサ |
-
1982
- 1982-05-12 JP JP7817082A patent/JPS58197269A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH028025B2 (enExample) | 1990-02-22 |
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