JPS58194007A - Focusing detector - Google Patents

Focusing detector

Info

Publication number
JPS58194007A
JPS58194007A JP7771882A JP7771882A JPS58194007A JP S58194007 A JPS58194007 A JP S58194007A JP 7771882 A JP7771882 A JP 7771882A JP 7771882 A JP7771882 A JP 7771882A JP S58194007 A JPS58194007 A JP S58194007A
Authority
JP
Japan
Prior art keywords
light
image
electrodes
pupil
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7771882A
Other languages
Japanese (ja)
Inventor
Yoshiaki Horikawa
嘉明 堀川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP7771882A priority Critical patent/JPS58194007A/en
Publication of JPS58194007A publication Critical patent/JPS58194007A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28Systems for automatic generation of focusing signals
    • G02B7/34Systems for automatic generation of focusing signals using different areas in a pupil plane

Abstract

PURPOSE:To detect the relative position relation of an object image formed through at least three light shielding plates which are not arrayed in a straight line at or near a pupil position and placed in a transmission state selectively by a two-dimensional photoelectric converting element in two different directions precisely with simple constitution. CONSTITUTION:Luminous flux passing through one light transmission part of a pupil splitter 21 equipped with light transmission parts 21a, 21b, 21c, and 21d which are controlled into a transparent state successively is passed through an image forming lens 22 to form its image on an optical position detector 23. The detector 23 is equipped with electrodes 23a and 23b for vertical detection and electrodes 23c and 23d for horizontal detection and currents IA and IB, and I'A and I'B from the opposite electrodes are processed similarly. A subtracter 25 and an adder 26 find the sum and difference and a divider 27 finds (IA-IB)/ (IA+IB); and a comparator 30 compares its value with a synchronizing signal to discriminate between a front and a rear focus and a control circuit 31 performs display and lens driving.

Description

【発明の詳細な説明】 する。[Detailed description of the invention] do.

一般7て光学系の1鍾を分割することにより非合焦時に
は各々分割され,た光束の結ぶ像が異なる方向に移動す
ることが知られでいるか、この原理を第1図により説明
す才1ば、第1図(、1)において1071結像レンズ
、2に1、結像し/ズ1のiiJで瞳の近1力に配設さ
れた開口2 aを有するi!M ff; +#、3 i
r.I: f’4r 而−(’ アリ、合焦時には像面
31−に像Qが結f象さ才する/J・非合焦時には前ビ
ン,佼ビンに71応して像Qに関して各々光軸Ovc垂
直な方向で反勾方向にすねた位置にボケた像Q+ +勃
が像th1;う+に形IJν4される。
It is known that by dividing one frame of an optical system in general 7, when it is out of focus, it will be divided into different parts, and the images formed by the light beams will move in different directions.This principle can be explained using Figure 1. For example, in FIG. 1(, 1), 1071 imaging lens has an aperture 2a disposed near the pupil with iiJ of 1, 2 to 1, and 1 to 2; i! M ff; +#, 3 i
r. I: f'4r (') When in focus, the image Q is formed on the image plane 31. A blurred image Q++ is formed into an image IJν4 at a position perpendicular to the axis Ovc in the opposite direction.

第1図(1〕)は凄光板2の開1丁]2;+奮尤i10
h (1に関して反対側に移動させた場合を71<1〜
でおり、合用時には像面3上に像Q′が結像されるが、
弁台U(時には各々前ビン,後ビンに対応してボケた像
Qf + Q’zが像面3上に形成さ;tする。従って
、liji光板2光間2」を例えば第1図(、I)の位
置から(1))の位置へ移l)のさせると、合焦時に(
c11埃(之及び(λ′が同しフイ1ン置にあるので像
は移動しないが、01■ビンの」揚台にに:J: 1埃
(tj曳。
Figure 1 (1) shows the opening of the light plate 2] 2;
h (If moved to the opposite side with respect to 1, 71<1~
During combined use, an image Q' is formed on the image plane 3.
The valve stand U (sometimes a blurred image Qf + Q'z is formed on the image plane 3 corresponding to the front bin and the rear bin, respectively; , I) to position (1)), when focusing (
c11 dust (and (λ') are in the same position, so the image does not move, but on the lifting platform of the 01 bottle: J: 1 dust (tj pulled.

からQ′Iのイ立″ー′\1多動し寸だ後ビンの」揚台
には1埃はQ2からQ’2の1立i醒へ移]助する3。
From the beginning of Q'I's rise to the end of Q'2, I was on the verge of hyperactivity, and the dust on the lifting platform of the bottle was transferred from Q2 to the first stage of Q'2.

この原理を利用して付線を1灸出するようにした装置f
rIi、例えば特公昭5(う−13929号によるもの
等かあるが、”Fiれも像の位相ずれは一方向にのみ険
111さ:/1 fllるがこれに垂直な方向に関して
C検出することができないので、例えばこの垂直方向e
(のみ強jψ変化を有する像の場合には合焦を検出する
ことができなかった。これは像面に配設された1象情報
を検出するための光検出器として一次元の固体搬像素子
を用いでいるからである。何一つ−C1二次カーの固体
撮11素子を使用しこれに応じて二次元の瞳分割を行な
えば、二次元の像の位相ずれを検出し得るが、二次元の
」場合の計′、v4覇: i佳−次元の場合に比べて(
はマ画素数の二乗で泪搬鼠が増加するため)非常に多く
なり、その実施に1:困!iMGであった。1 本発明I:l1、以トの点に九み、光検出器として光f
)′1. l+qI棄出器を使用することにより1′頂
illな構成で而も梢1基の高い合焦検出装置を提供ぜ
んとするものであるが、先つ第2図に」:り尤firI
纏検出器(f(ついて駅、明する。第2図に(fll、
半導体点曲におけるラテラル・]第1・・エフェクト(
L+1lcrdl I’l+(Jt。
A device f that uses this principle to emit one moxibustion line
rIi, for example, according to Japanese Patent Publication No. 5 (U-13929), ``The phase shift of the image is steep only in one direction. For example, this vertical direction e
(Only in the case of an image with a strong jψ change, focusing could not be detected. This is because the phase shift of the two-dimensional image can be detected by using 11 C1 secondary Kerr solid-state sensors and performing two-dimensional pupil division accordingly. In the case of ``dimension'', v4 victory: Compared to the case of ``i-dimensional'' (
Since the number of vertices increases with the square of the number of pixels), the number of vertices increases significantly, making it difficult to implement. It was iMG. 1 Present invention I:l1, taking into consideration the following points, light f as a photodetector
)′1. By using the l + qI ejector, we aim to provide a highly focused detection device with a 1' top illumination structure and only one unit at the top.
The detector (f) is shown in Figure 2.
Lateral in semiconductor point curve] 1st... effect (
L+1lcrdl I'l+(Jt.

1]NecL)を利用した尤位置検出器の盾杢溝竜か7
f<されており、10Qよ商抵抗道基板、110:J、
1)をjJ(抗層、12はn′一層、13kl、共)1
@ ’Qi 希、14 、15は′@極であって表面層
ば11− n接合によりyt、電カッ果を備えている。
1] Shield of potential position detector using NecL)
f<, 10Q, quotient resistance board, 110:J,
1) to jJ (antilayer, 12 is n' single layer, 13kl, both) 1
@'Qi rare, 14 and 15 are '@poles, and the surface layer is provided with yt and an electric cup due to the n junction.

従って光セ吻が入射すると、その入射位置に応じて電f
ifn14.’Iらから各々+L+勾直流■A、’13
が得られる3、ここで市]會14及び150間の距虻a
、抵抗を1(1tとし、さら(i(電Jm I 4から
光の入射位置−序での距隋tをX、その部分J′!t 
h’+□を−R,x 、 iた入射光により発生した尤
電流を1゜とすれば、 となり、抵抗層が均一であれば、次式か摺られる3、[
A −” ’(,1、’l:(−、” ’。  ・(2
)7 従って、市;極14.Isの出力重加1’A、’nから
なる演舞を行なうことにより、入M」エネルギー即ち入
射光)計に無関係に丸の入射位置1!llち距離Xが求
められる。尚、入射光lは 1o−へ十’n             −・・(4
)より求められる。以」−の訝、明は一次元)覧位置演
出盟の場合についてなされでいるが、二次元光位置検出
器の場合でもその原叩は同じである。かくして例オーば
’#: (X’7置装出装置にに第3図に示しだよう流
’ A (×) + ’ 1) (X)(’、J1、I
八(X)=−10(X) 、 II、、  (X)−−
’−10(X)    −(5)7、        
        1でijλ−られ、像全体による′電
極1ヰ、15からの出力用;流IAl’11は、 となる。Kって式(+il 、 (7Jより表わしてい
るから、(8)式」:り尤r1′L置検出器トに結□□
□した像の重心を求めることができるようになっている
Therefore, when the light proboscis enters, the electric current f depends on the incident position.
ifn14. 'I and others + L + gradient direct current ■ A, '13
3, where city] distance a between 14 and 150
, the resistance is 1(1t, the distance t at the incident position of the light from the electric current Jm I 4 is X, and the part J'!t
If the likelihood current generated by the incident light with h'+□ as -R,
A -"'(,1,'l:(-,"'. ・(2
) 7 Therefore, city; pole 14. By performing a performance consisting of the output weights 1'A and 'n of Is, the incident position of the circle is 1!, regardless of the input M' energy (ie, incident light) meter. The distance X is found. Incidentally, the incident light l is 1o- to 1'n-...(4
) is required. The above question has been made for the case of a one-dimensional (one-dimensional) viewing position, but the principle is the same for a two-dimensional optical position detector. Thus, for example O'#: (X'7 equipment as shown in Figure 3) ' A (x) + ' 1) (X) (', J1, I
Eight (X) = -10 (X) , II,, (X) --
'-10(X)-(5)7,
1, and the flow IAl'11 for the output from the electrodes 1 and 15 by the entire image is as follows. K is expressed by the expression (+il, (7J), so the equation (8) is:
□You can now find the center of gravity of the image.

次に二次元光位置検出器を利用した本発明に」:る合焦
検出装置を第4図及び第5図に示した一実施例により説
明すれば、21は第1図の遮光板3に相当する液晶まだ
はエレクトロクロミック素子等を利用した瞳分割器で順
次透明になるように制御される透光部21 a、 2 
] 第1 、21 c及び21dを備えている。22は
結像レンズ、21:J、結像レンズ22の焦点位置に配
設された二次九九i)”r li検出器で垂直方向の検
出を行なう電極2 :38.231)と水平力向の検出
を行なう電極2;うし、 2 :3 dとを備えており
、1(酸分ifU器2jの透光部2.1 、、。
Next, the focus detection device according to the present invention using a two-dimensional optical position detector will be explained with reference to an embodiment shown in FIGS. 4 and 5. The transparent parts 21a and 2 are controlled to become transparent sequentially by a pupil divider using an electrochromic device or the like.
] 1st, 21c and 21d. 22 is an imaging lens; 21: J is an electrode 2 for performing vertical detection with a quadratic multiplier i)"r li detector placed at the focal position of the imaging lens 22; and horizontal force. It is equipped with electrodes 2, 2 and 3d for detecting the direction, and 1 (transparent part 2.1 of the acid content ifU device 2j).

21 l)、 2 ’I c ′!)だ4:J’ 21
 dを1市って入射する光束が結隊1//ズ22全介し
、て元位置検出器23 LVC結像するようになってい
る。丑だ、第5図は光1装置検出器2;うからの出力信
号を処理する′目J気回路の/ロン2図を小して4.・
す、光位置検出器23の′市(愼2 :3:+ 、 2
 :31)か1.の出力′電流[Al’Hと7五(血2
 :3 c 、 23(Iからの出力電流1′A I 
I′+3とは同様に処理さ、t]、るから出力′電流I
A、II3に関して」ソドにd)1.明する。24.2
CB光1η置検出器2:3の′11テ極23 ;l 、
 23 +1からの出力電流を増幅するア/f、25は
(IA ” ’II )を演算する減轡器、26’l−
”(IA +”n )を演算する1Jll算器、270
J: R(R)の演181−奮行なう除脅器、28d、
瞳分割i!i 21の透光部を順次透明化するように制
師し2得る駆動回路で、同時にコンパレータ30に対]
−てこの制1i111に同ルj17−C透光部2141
が透明状態のとき(→)レベルで透光部21(が透明状
態のとき(−)レベルにある・?ルス(L−111力1
−目つコ/)ぐレータ:3(yに対しては1−i4己制
j1111に同」υ]シ、で透光部211)か透明状態
のとき(→)し・くルで透光部21〔1か透明状態のと
き(−)レベルにあるペルスを出/J−する。29し1
除慢器27の出力から・々イアス成分を除去するフィル
タ、  3 Fl 。
21 l), 2 'I c '! ) da 4: J' 21
A beam of light entering d passes through the entire unit 1//z 22 and forms an LVC image on the original position detector 23. Figure 5 shows optical 1, device detector 2;・
The position of the optical position detector 23 (2:3:+, 2
:31) or 1. The output' current [Al'H and 75 (blood 2
:3 c, 23 (output current 1'A from I
I′+3 is treated similarly, t], so the output′ current I
A, Regarding II3” Sodo d) 1. I will clarify. 24.2
CB light 1η position detector 2:3'11 pole 23;l,
23 A/f that amplifies the output current from +1, 25 a reducer that calculates (IA'''II), 26'l-
1Jll calculator that calculates “(IA +”n), 270
J: R(R)'s Performance 181 - Exerting Threatening Device, 28d,
Pupil split i! A drive circuit that sequentially makes the transparent parts of i 21 transparent, and simultaneously connects them to the comparator 30]
- Lever system 1i111 same lever j17-C transparent part 2141
When is in the transparent state (→) level and when the transparent part 21 (is in the transparent state is at (-) level
- Eyes /) Grate: 3 (same as 1-i4 self-control j1111 for y) υ] When the translucent part 211) is in the transparent state (→) Section 21 [1] When in transparent state, issue a pulse at (-) level/J-. 29shi1
3 Fl, a filter that removes the Ias component from the output of the desensitizer 27;

30′ば1駆動回路28から出力き71′jる同11J
I陪弓とフィルタ2!]を介[7て除時詣27から出ツ
ノ5\:11る。1萌出信号とを比較して前ビンか後ビ
′ンかを判別4゛るコン・gレータである4、このミ団
別の原1411を簡単iCWR。
30' is the same 11J outputted from the drive circuit 28 as 71'j.
I bow and filter 2! ] via [7 to remove the clock from 27 to Tsuno 5\:11. 1. It is a converter that determines whether it is the front bin or the back bin by comparing it with the sprouting signal.

明すれば、第4図において牟(1’t: i面検出器2
:(1−で隊の重心が−1,力にず]]たときを除曽器
27の出J)の(+)側にとると、駆辺+ DlljM
 28からの出ノノイh弓(以下「信号A−1と呼ふ3
.)と除釣器27か1−)の出力信号(以下1信弓13
」と吋ふ1.)とを比i咬1〜だとき、イ芭−号への(
−1)とイ8弓1(の(−1)とが一致(1,でいる場
合に(弓、透尾部2 I rlが濤1ν14〕ζ態(/
(’: 7!i:つていて目つ1濃が光位置1r!出器
1ニー′c−1−力G′(二すfl こイ?、コねは第
1図(2」)の汀Q2の状態を示しており、またINけ
への(→)とfi号I4・の(−)とが一致し、でいる
」局舎にf(1即ち第11ン目、)の1啄(λ1の1大
閤を/]マして1.・す、コ/・ミ゛レータはとちらσ
)状態かを検出するJ、うに仲)成さt1′でいる4、
3 + 6:1合1ズ1令′:倹(1,1−J−るど共
に図小(,7ない衣材く装置dチたば?1古像レンズの
駆動回す省に信号命出力する制御回路であつ一コ、イハ
号13の振幅の太きさに」:す+4’ントのず7]、の
人きさを検知し、士だ二つのコン・ミ゛レータからの前
ビンか後ビ′ンかの信号とに、1:す、合焦状態を判別
し7表示装置芽たは駆動装置(=C効J L、、て必要
なイ苦弓を出力する。尚、合焦時にU1信シサ13の振
幅dOとなる。さらに、加算器26の出力からべ射光−
が検知され得るのでこれを沼川バIに初用することもで
き、例えば第5図に示さ′!1ている」二うにυlド]
θ器2()の出力を駆動回路28に“ノイー・ISバッ
クさせて瞳分割器21の透光部21;l 、 2111
 、2+ (’、及び21dの透過率を調整して白11
iIJガ、…゛ハ周整か1jなわ2主イ尋る。自Hgb
光量調整は他の両賞な手段により透光部の開り面積を制
御して行なわれる」二うに1−2でもよい。
To be clear, in FIG.
:(With 1-, the center of gravity of the squad is -1, the force is not equal)] If we take the time when it is on the (+) side of the output J of the remover 27, then the front edge + DlljM
28 (hereinafter referred to as "Signal A-1")
.. ) and the output signal of the fish remover 27 or 1-) (hereinafter 1 Shinyumi 13
” 1. ) and when the ratio is 1~, the (
-1) and A8 bow 1('s (-1) match (1,
(': 7!i: Eyes 1 dark light position 1r! Output device 1 knee'c-1-force G' (2sfl Koi?, the corner is in Figure 1 (2)) It shows the state of the channel Q2, and the (→) of the IN channel matches the (-) of the fi number I4. (1 large scale of λ1/] is 1.・co/・millerator is σ
) to detect whether the state is
3 + 6:1 1st 1st order': 1, 1-J-rudo both figure small (, 7 no clothing device d chitaba? 1 signal command output to the old image lens drive turning part The control circuit detects the level of the amplitude of the amplitude of 13": 4' + 4' and 7], and detects the intensity of the amplitude of the amplitude of 13, and 1: The in-focus state is determined by the signal from the rear bin or the rear bin, and the display device or drive device (=C effect JL) outputs the necessary amber signal. When focused, the amplitude of the U1 signal sensor 13 becomes dO.Furthermore, from the output of the adder 26, the radiation light -
can be detected, so this can be used for the first time in Numakawa Bay, for example, as shown in Figure 5'! 1 is there” 2 sea urchin υldo]
The output of the θ device 2 () is sent back to the drive circuit 28 by "Noy IS" and the transparent part 21 of the pupil divider 21; l, 2111
, 2+ (', and white 11 by adjusting the transmittance of 21d.
iIJ ga... ゛Ha is rounded up? 1j rope 2 main I ask. Own Hgb
The amount of light may be adjusted by controlling the opening area of the light-transmitting portion by other means.

本実施例v」:1以、1−のように構成さ;ルているか
ら、入1′11光、奮]1酵0′j川ン’i−(/Cよ
り光11ン11矢1j1著’i (’C刑H較させるこ
とに」、す、垂面方向及び水平方向に関して各々f¥f
、((状態即ち前ピノ、少ビ゛ン2合焦のf1j■れか
であるか捷ブこピノ)−のずれlk検出し得ると共にこ
rl、 l’)4−、 Rzle L fiM イ(’
J市ll IflII L+ jW VCJ:り白!1
v1焦点台−1っせを行なうことができる、。
This embodiment is structured as follows: 1 and 1-; Author'i ('To make a comparison'), each of the vertical and horizontal directions
, ((state ie front pinot, small beam 2 in focus f1j ■ or switch pinout) - can detect the deviation lk and this rl, l') 4-, Rzle L fiM i( '
J Cityll IflII L+ jW VCJ: Rihaku! 1
v1 focal beam - 1 focus can be performed.

以−に述べたように本発明によれば、 jll、直方面
及び水平方向について合焦を険出し併る。1.うt’(
′、じノコ。
As described above, according to the present invention, focusing is sharply focused in the vertical direction and the horizontal direction. 1. Ut'(
', Jinoko.

から、−次元の合焦検出装置で6:[、模用不1’J1
fニー:であるかまたは険出困Mltであイ)」:つな
一方向にFlj 、凋な\11−      −− 物体でも合焦の検出を行なうことが可能になり、非常(
f(@果的である1、また、」以−にの説明でな−4、
二次元毘(8r置検出器を利用しているため非常に簡1
1fi−i光検出器も使用され得る。さらに、瞳分割器
1置ては、−面線トにない少なくともEつの開1’lを
イラする遮光板でもよく、この場合、像の移動を二つの
方向について検知することにJ:り合焦を検出し7倚る
。従って、本発明をカメラNI’−の光学機器の7ケめ
の自動焦点装置(tC通j月ず7′1ば、簡qiで1−
1つ+t’flΩ〜の高い自動焦点装置を肖ることかで
きる。
6: [, imitation unnecessary 1'J1
f-knee: or difficult to reach Mlt)': Connected in one direction, it is possible to detect focus even on small objects, and extremely (
f(@effective1, also, in the following explanation-4,
Two-dimensional bi(8r position detector is used, so it is very easy to use)
A 1fi-i photodetector may also be used. Furthermore, the pupil divider 1 may be a light-shielding plate that disturbs at least E openings 1'l that are not on the -plane line G. In this case, J: is used to detect the movement of the image in two directions. Detects char and swallows 7. Therefore, the present invention can be applied to the 7th automatic focusing device of the optical equipment of the camera NI'- (if tC is 7'1, then 1-
It is possible to use a high autofocus device with +t'flΩ.

尚、瞳分割器の透光部&:j: I残株的にlii閉す
る」、うにしてもコニ<、斗だロ■IIvJステージ紫
11するに〔11散鋭のソ11き光学・機器i/(m 
JL・いて自11vJ、1.j々7り、1、を行なう」
易イtには、制御卸回路により結像レンズではなくステ
ージを駆動調整することになるのは首うまでもない。
In addition, the transparent part of the pupil divider &:j:I closes as if it were a remaining stock. Equipment i/(m
JL・Iteji 11vJ, 1. I will do 1.
It goes without saying that the control circuit would be used to drive and adjust the stage rather than the imaging lens.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の合焦横用の原理を示す説明図、第2図
は本発明で使用する光位置検出器の、−例を示す顧、略
断面図、第3図は光位置検出器に入射する像の光輔分布
の一例を示す図、第4図は本発明による二次元合焦検出
装置の光学系を示す斜視図、第5図−、第4図の合焦検
出装置のブロック図である。 1.22・・結像レンズ、2 遮光板、3・・像面、1
0 高抵抗8皿基板、11 p型抵抗層、12・・−1
11層、13 ・共通電極、] /1 、 ] 5−電
極、21・1節分割器、23 ・光f〜シ置検出旨、2
4.24’アンプ、25・減勢器、26・加算器、27
 除算器、28 駆動回j晴、29・・・フィルタh 
 30 。 30’・コンノ々レータ、:31 ・制御回路。 代理人 升理十 篠 原 公 司
Fig. 1 is an explanatory diagram showing the principle of horizontal focusing of the present invention, Fig. 2 is a schematic sectional view showing an example of the optical position detector used in the present invention, and Fig. 3 is an optical position detection diagram. FIG. 4 is a perspective view showing the optical system of the two-dimensional focus detection device according to the present invention, and FIG. It is a block diagram. 1.22...Imaging lens, 2 Light shielding plate, 3... Image surface, 1
0 High resistance 8 plate substrate, 11 P type resistance layer, 12...-1
11 layers, 13 - common electrode, ] /1, ] 5-electrode, 21 - 1 node divider, 23 - light f~shi position detection, 2
4. 24' amplifier, 25, reducer, 26, adder, 27
Divider, 28 Drive time j clear, 29... Filter h
30. 30'・Controller: 31・Control circuit. Agent Masuriju Shinohara

Claims (1)

【特許請求の範囲】[Claims] 結像光学系の異なる径路を通る光束により夫々形成され
る物体像を正規の結像面またはその共役面に配設された
光電変換要素で受は該物体像の相対的位置関係により合
焦を検出するよう’t’e−した合焦検出装置において
1.結像光学系の瞳装置またはその共役位置或いはその
近傍に配設されていて且つ一直線状にない少なくとも三
個の111次選択的に光透過状態になる透光部を有する
遮光板と、前記光電変換要素として備えられた二次元光
電変換素子とを含んでいて、前記透光部を結ぶ異なる二
方向について合焦をf笑出し得るようにしたことを特徴
とする装置。
The object images formed by the light beams passing through different paths of the imaging optical system are received by a photoelectric conversion element disposed on the regular imaging plane or its conjugate plane, and are focused based on the relative positional relationship of the object images. 1. In a focus detection device configured to perform detection. a light-shielding plate having at least three 111-order transparent parts disposed at or near the pupil device of the imaging optical system or at a conjugate position thereof and which are not in a straight line and which selectively transmit light; A device comprising a two-dimensional photoelectric conversion element provided as a conversion element, and capable of focusing in two different directions connecting the light-transmitting portion.
JP7771882A 1982-05-10 1982-05-10 Focusing detector Pending JPS58194007A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7771882A JPS58194007A (en) 1982-05-10 1982-05-10 Focusing detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7771882A JPS58194007A (en) 1982-05-10 1982-05-10 Focusing detector

Publications (1)

Publication Number Publication Date
JPS58194007A true JPS58194007A (en) 1983-11-11

Family

ID=13641663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7771882A Pending JPS58194007A (en) 1982-05-10 1982-05-10 Focusing detector

Country Status (1)

Country Link
JP (1) JPS58194007A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4930896A (en) * 1985-03-27 1990-06-05 Olympus Optical Co., Ltd. Surface structure measuring apparatus
US4979045A (en) * 1986-01-21 1990-12-18 Minolta Camera Kabushiki Kaisha Image sensor for a movable zone detection array
WO1991011742A1 (en) * 1990-01-30 1991-08-08 Nikon Corporation Focus detecting device
US5422701A (en) * 1990-01-30 1995-06-06 Nikon Corporation Focus detection apparatus
DE102022108474A1 (en) 2022-04-07 2023-10-12 Carl Zeiss Industrielle Messtechnik Gmbh Method and measuring camera for measuring a surface profile of an object

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4930896A (en) * 1985-03-27 1990-06-05 Olympus Optical Co., Ltd. Surface structure measuring apparatus
US4979045A (en) * 1986-01-21 1990-12-18 Minolta Camera Kabushiki Kaisha Image sensor for a movable zone detection array
US5068737A (en) * 1986-01-21 1991-11-26 Minolta Camera Kabushiki Kaisha Image sensor having multiple pairs of array sensors
WO1991011742A1 (en) * 1990-01-30 1991-08-08 Nikon Corporation Focus detecting device
US5422701A (en) * 1990-01-30 1995-06-06 Nikon Corporation Focus detection apparatus
DE102022108474A1 (en) 2022-04-07 2023-10-12 Carl Zeiss Industrielle Messtechnik Gmbh Method and measuring camera for measuring a surface profile of an object
DE102022108474B4 (en) 2022-04-07 2024-03-07 Carl Zeiss Industrielle Messtechnik Gmbh Method and measuring camera for measuring a surface profile of an object

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