JPS63138310A - Focus detector - Google Patents

Focus detector

Info

Publication number
JPS63138310A
JPS63138310A JP61286471A JP28647186A JPS63138310A JP S63138310 A JPS63138310 A JP S63138310A JP 61286471 A JP61286471 A JP 61286471A JP 28647186 A JP28647186 A JP 28647186A JP S63138310 A JPS63138310 A JP S63138310A
Authority
JP
Japan
Prior art keywords
index
projection
pattern
image
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61286471A
Other languages
Japanese (ja)
Inventor
Yoshio Mori
Masahito Kumazawa
Kenichi Kotaki
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP61286471A priority Critical patent/JPS63138310A/en
Publication of JPS63138310A publication Critical patent/JPS63138310A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To realize high-accuracy automatic focusing without generating any false focus error signal by the pattern of an object surface by setting an index projection surface where an index image is formed at a position which is not conjugate to an object projection surface about an object lens.
CONSTITUTION: The cause of the influence of the pattern of the object surface 3 on the index image 5 on a photodetecting means is that the object surface 3 and index light projection surface 6 are set conjugate to each other about the objective 2, so this is utilized to set the optical arrangement between the object surface 3 and index projection surface 6 not to satisfy the conjugation relation about the objective 2. Consequently, even if the index light incident on the index projection surface 6 is under the influence of the object surface pattern, the pattern lighted by the index light is not image-formed sharply on the index projection surface 6, but formed in an out-of-focus state, so the light quantity distribution of the index image on the index projection surface 6 is averaged and the superposition of an error signal on the output of the photodetecting means is suppressed.
COPYRIGHT: (C)1988,JPO&Japio
JP61286471A 1986-12-01 1986-12-01 Focus detector Pending JPS63138310A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61286471A JPS63138310A (en) 1986-12-01 1986-12-01 Focus detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61286471A JPS63138310A (en) 1986-12-01 1986-12-01 Focus detector

Publications (1)

Publication Number Publication Date
JPS63138310A true JPS63138310A (en) 1988-06-10

Family

ID=17704823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61286471A Pending JPS63138310A (en) 1986-12-01 1986-12-01 Focus detector

Country Status (1)

Country Link
JP (1) JPS63138310A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0342611A (en) * 1989-07-10 1991-02-22 Nikon Corp Automatic focusing device for vertical illumination type microscope
JP2008122612A (en) * 2006-11-10 2008-05-29 Olympus Corp Focus detecting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0342611A (en) * 1989-07-10 1991-02-22 Nikon Corp Automatic focusing device for vertical illumination type microscope
JP2008122612A (en) * 2006-11-10 2008-05-29 Olympus Corp Focus detecting device

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